@book{CTT100846136, author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone}, title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers}, publisher = {IFSA PUBLISHING, S.L.}, year = 2021, } @book{CTT100835470, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, publisher = {MDPI}, year = 2020, } @book{CTT100791876, author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Pulse-Current Electrodeposition of Gold}, publisher = {IntechOpen}, year = 2019, } @book{CTT100791875, author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Electrodeposition of Gold Alloys and the Mechanical Properties}, publisher = {IntechOpen}, year = 2019, } @book{CTT100770100, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2019, } @book{CTT100748622, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2017, } @book{CTT100645577, author = {Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi and Masayoshi Esashi and Hiroyuki Fujita and Makoto Ishida and Shuji Tanaka and Kazuhiro Takahashi and Nobuyoshi Koshida and Hideki Koyama and Minoru Sasaki and SEIICHI HATA and Gen Hashiguchi and Hidekuni Takao and Masao Nagase and Hiroshi Yamaguchi and Masashi Kitazawa and Kazusuke Maenaka and Kazuaki Sawada and Ichiro Shibasaki and Satoshi Nomura and Yukihiro Takeuchi and Hideki Shibata and Narahashi Shoichi and Yuji Suzuki and Yasuhiro Nishioka and Hiroki Morimura and Eiji Higurashi and Mitsuru Chino and Naoki Uchiyama and Hideki Adachi and Harunobu Inoue and Hideki Hashimoto}, title = {Integration Technology for Heterogeneous Advanced Devices: Basics and Applications}, publisher = {株式会社 シーエムシー出版}, year = 2012, } @article{CTT100911525, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100910937, author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  }, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909951, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909052, author = {Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki ; Ito and Yoshihiro Miyake and Masato Sone}, title = {Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications}, journal = {Journal of The Electrochemical Society}, year = 2024, } @article{CTT100908961, author = {Kisuke Miyado and Devi Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @article{CTT100902767, author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  }, journal = {Micro and Nano Engineering}, year = 2023, } @article{CTT100888636, author = {Kosuke Suzuki and Yiming Jiang and Ryohei Hori and Ken Hashigata and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold}, journal = {Materials Today Communications}, year = 2023, } @article{CTT100887972, author = {Akira Onishi and Kisuke Miyado and Devi Srujana Tenneti and Katsuyuki Machida and Parthojit Chakraborty and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology}, journal = {2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)}, year = 2023, } @article{CTT100875654, author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure}, journal = {IEEE Sensors Journal}, year = 2022, } @article{CTT100866853, author = {Akira Onishi and Kohei Shibata and Akihiro Uchiyama and Katsuyuki Machida and Taiki Ogata and Noboru Ishihara and Hirotaka Uchitomi and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement}, journal = {Japanese Journal of Applied Physics}, year = 2022, } @article{CTT100866394, author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression}, journal = {Surface & Coatings Technology}, year = 2022, } @article{CTT100874042, author = {Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Yoshihiro Miyake and Kazuya Masu}, title = {A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds}, journal = {ECS Transactions}, year = 2021, } @article{CTT100846484, author = {Hitomi Watanabe and Tso-Fu Mark Chang and Michael Schneider and Ulrich Schmid and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency}, journal = {Electrochem}, year = 2021, } @article{CTT100834843, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties}, journal = {Electrochem}, year = 2020, } @article{CTT100823024, author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Ryo Shigeyama and Taiki Ogata and Yoshihiro Miyake}, title = {CMOS-MEMS Based Microgravity Sensor and Its Application}, journal = {ECS Transactions}, year = 2020, } @article{CTT100820976, author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers}, journal = {Journal of The Electrochemical Society}, year = 2020, } @article{CTT100806473, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability}, journal = {IEEE Conference Paper}, year = 2020, } @article{CTT100807192, author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100803948, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, journal = {Metals}, year = 2019, } @article{CTT100807019, author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu}, title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology}, journal = {ECS Transactions}, year = 2019, } @article{CTT100793648, author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100795920, author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100796028, author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100786193, author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100785326, author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer}, journal = {Sensors and Materials}, year = 2018, } @article{CTT100766193, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications}, journal = {Microelectronic Engineering}, year = 2018, } @article{CTT100766253, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology}, journal = {}, year = 2018, } @article{CTT100756750, author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices}, journal = {Microelectronic Engineering}, year = 2018, } @article{CTT100759221, author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide}, journal = {Surface and Coatings Technology}, year = 2018, } @article{CTT100758009, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices}, journal = {Journal of The Electrochemical Society}, year = 2018, } @article{CTT100759250, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers}, journal = {IEICE Electronics Express}, year = 2018, } @article{CTT100751408, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year = 2017, } @article{CTT100751410, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY}, journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)}, year = 2017, } @article{CTT100742124, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices}, journal = {Microelectronic Engineering}, year = 2017, } @article{CTT100742125, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures}, journal = {Materials Letters}, year = 2017, } @article{CTT100736023, author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices}, journal = {Journal of The Electrochemical Society}, year = 2017, } @article{CTT100734738, author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold}, journal = {Microelectronics Engineering}, year = 2017, } @article{CTT100721712, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer}, journal = {Microelectronics Reliability}, year = 2016, } @article{CTT100733964, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology}, journal = {IEEE Proceeding}, year = 2016, } @article{CTT100722024, author = {Kazuya Masu and Daisuke Yamane and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake}, title = {Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease}, journal = {the 46th European Solid-State Device Research Conference (ESSDERC)}, year = 2016, } @article{CTT100716349, author = {Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100704360, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression}, journal = {Materials Transactions}, year = 2016, } @article{CTT100708352, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 1-mG MEMS Sensor}, journal = {ECS Transactions}, year = 2016, } @article{CTT100702128, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers}, journal = {Microelectronics Engineering}, year = 2016, } @article{CTT100703226, author = {Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100748054, author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida}, title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip}, journal = {ECS Trans.}, year = 2015, } @article{CTT100692402, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor}, journal = {Japanese Journal of Applied Physics}, year = 2015, } @article{CTT100690964, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Sub-1G MEMS Sensor}, journal = {ECS Transactions}, year = 2015, } @article{CTT100685143, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Shota Kamei and Kazuya Masu and Katsuyuki Machida}, title = {An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors}, journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）}, year = 2015, } @article{CTT100686951, author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass}, journal = {Microsystem Technologies}, year = 2015, } @article{CTT100674611, author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Integrated CMOS-MEMS Technology and Its Applications}, journal = {ECS Transactions}, year = 2014, } @article{CTT100669022, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology}, journal = {Japanese Journal of Applied Physics}, year = 2014, } @article{CTT100666863, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Design of sub-1g microelectromechanical systems accelerometers}, journal = {Applied Physics Letters}, year = 2014, } @article{CTT100666864, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology}, journal = {Japanese Journal of Applied Physics}, year = 2014, } @article{CTT100658034, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer}, journal = {Japanese Journal of Applied Physics}, year = 2013, } @article{CTT100657729, author = {Toshifumi Konishi and Katsuyuki Machida and Satoshi Maruyama and Makoto Mita and Kazuya Masu and Hiroshi Toshiyoshi}, title = {A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language}, journal = {IEEE/ASME Journal of Microelectromechanical Systems}, year = 2013, } @article{CTT100674612, author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi}, title = {Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators}, journal = {ECS Transactions}, year = 2012, } @inproceedings{CTT100908973, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun Yi Chen and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Tso-Fu Mark Chang and Masato Sone}, title = {Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908972, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908971, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100903112, author = {Ryohei Hori and Kazuya Fujita and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength}, booktitle = {Taiwan Association for Coating and Thin Film Technology (TACT2023)}, year = 2023, } @inproceedings{CTT100906278, author = {Kisuke Miyado* and Akira Onishi and Tenneti Devi Srujana and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer}, booktitle = {第15回集積化MEMSシンポジウム論文集}, year = 2023, } @inproceedings{CTT100892415, author = {Masato Sone and Tso-Fu Mark Chang and Tomoyuki Kurioka and Chun-yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake}, title = {Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers}, booktitle = {244th ECS Meeting}, year = 2023, } @inproceedings{CTT100895779, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components}, booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)}, year = 2023, } @inproceedings{CTT100895772, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer}, booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)}, year = 2023, } @inproceedings{CTT100903469, author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology}, booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100903468, author = {御宿 希祐Kisuke Miyado and Devi.Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer}, booktitle = {Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02}, year = 2023, } @inproceedings{CTT100895776, author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers}, booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)}, year = 2023, } @inproceedings{CTT100903103, author = {Kisuke Miyado and Devi.Srujana Tenneti and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer}, booktitle = {}, year = 2023, } @inproceedings{CTT100885246, author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {単結晶金微小カンチレバーの曲げ強度に対する断面積の影響}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, } @inproceedings{CTT100885243, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun Yi Chen and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, } @inproceedings{CTT100885240, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, } @inproceedings{CTT100903096, author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Katsuyuki Machida and Parthojit CHAKRABORTY and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Design of serpentine spring for MEMS devices by gold multi-layer metal technology}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, } @inproceedings{CTT100885244, author = {Syunkai Watanabe and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Akira Onishi and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, } @inproceedings{CTT100873968, author = {Taro Omura and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer}, booktitle = {}, year = 2022, } @inproceedings{CTT100873964, author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components}, booktitle = {}, year = 2022, } @inproceedings{CTT100903097, author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Parthojit CHAKRABORTY and Katsuyuki Machida and Shinichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure}, booktitle = {第83回応用物理学会秋季学術講演会}, year = 2022, } @inproceedings{CTT100881483, author = {Masato Sone and Hitomi Watanabe and Kyotaro Nitta and Hideaki Nakajima and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Tso-Fu Mark Chang}, title = {A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer}, booktitle = {}, year = 2022, } @inproceedings{CTT100881436, author = {Tomoyuki Kurioka and Koichiro Tachibana and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests}, booktitle = {}, year = 2022, } @inproceedings{CTT100873967, author = {Takumi Akiyama and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS}, booktitle = {}, year = 2022, } @inproceedings{CTT100903102, author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Parthojit CHAKRABORTY and Katsuyuki Machida and Shinichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer}, booktitle = {}, year = 2022, } @inproceedings{CTT100865532, author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Yoshihiro Miyake and Masato Sone}, title = {Au単結晶の微⼩カンチレバーの機械的特性における断⾯形状依存性}, booktitle = {}, year = 2022, } @inproceedings{CTT100865530, author = {Taro Omura and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Yoshihiro Miyake and Masato Sone}, title = {⾦めっき材料における機械的特性の電流密度依存性}, booktitle = {}, year = 2022, } @inproceedings{CTT100865533, author = {Takumi Akiyama and Yu-An Chien and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Yoshihiro Miyake and Masato Sone}, title = {MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価}, booktitle = {}, year = 2022, } @inproceedings{CTT100862629, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics}, booktitle = {}, year = 2021, } @inproceedings{CTT100873384, author = {Akira Onishi and Akihiro Uchiyama and Kohei Shibata and Takasi Ichikawa and Sangyeop Lee and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100873385, author = {Akihiro Uchiyama and Kohei Shibata and Akira Onishi and Takasi Ichikawa and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {ワイドレンジAu錘1軸MEMS加速度センサの検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100873383, author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Sangyeop Lee and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito}, title = {Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100862643, author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale}, booktitle = {TACT2021 International Thin Films Conference}, year = 2021, } @inproceedings{CTT100862622, author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath}, booktitle = {TACT2021 International Thin Films Conference}, year = 2021, } @inproceedings{CTT100862621, author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics}, booktitle = {TACT2021 International Thin Films Conference}, year = 2021, } @inproceedings{CTT100873379, author = {Akira Onishi and Akihiro Uchiyama and Kohei Shibata and Takasi Itikawa and Sangyeop Lee and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100861440, author = {藤田 一矢 and 鈴木 康介 and Chun-Yi Chen and Tso-Fu Mark Chang and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人}, title = {金単結晶微小カンチレバーの機械的特性とサンプル形状効果}, booktitle = {第82回応用物理学会秋季学術講演会}, year = 2021, } @inproceedings{CTT100860772, author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect}, booktitle = {}, year = 2021, } @inproceedings{CTT100860787, author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test}, booktitle = {}, year = 2021, } @inproceedings{CTT100860788, author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components}, booktitle = {}, year = 2021, } @inproceedings{CTT100842072, author = {Takasi Itikawa and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100873378, author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100873362, author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {A MEMS accelerometer with a single axis two proof masses for a wide detection range}, booktitle = {}, year = 2021, } @inproceedings{CTT100873376, author = {Takasi Ichikawa and Akihiro Uchiyama and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer}, booktitle = {}, year = 2021, } @inproceedings{CTT100873377, author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100845540, author = {Masato Sone and Tso-Fu Mark Chang and Takashi Nagoshi and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu}, title = {医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価}, booktitle = {日本金属学会 2021年春季講演大会}, year = 2021, } @inproceedings{CTT100842067, author = {Takasi Itikawa and Akihiro Uchiyama and Sayaka Koga and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Shinichi Iida and Hiroyuki Ito}, title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842066, author = {Akihiro Uchiyama and Takasi Itikawa and Sayaka Koga and Katsuyuki Machida and Kazuya Masu and Noboru Ishihara and Shinichi Iida and Hiroyuki Ito}, title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842065, author = {Kohei Shibata and Takasi Itikawa and Sayaka Koga and Katsuyuki Machida and Kazuya Masu and Noboru Ishihara and Shinichi Iida and Hiroyuki Ito}, title = {高分解能単一Au 錘CMOS-MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842063, author = {Takashi Ichikawa and Kohei Shibata and Tatsuya Koga and Katsuyuki Machida and Shinichi Iida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito}, title = {A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer}, booktitle = {}, year = 2020, } @inproceedings{CTT100842068, author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842069, author = {Akihiro Uchiyama and Takasi Itikawa and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ}, booktitle = {}, year = 2020, } @inproceedings{CTT100842071, author = {本田優斗 and 田中佐和子 and 崔容俊 and Toshihiko Noda and Kazuhiro Takahashi and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Hiroyuki Ito and 二階堂靖彦 and Mitsumasa Saito and Shinichi Yoshida}, title = {フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842064, author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes}, booktitle = {}, year = 2020, } @inproceedings{CTT100816076, author = {Ken Atsumi and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100816077, author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100816075, author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing}, booktitle = {}, year = 2020, } @inproceedings{CTT100806470, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film}, booktitle = {}, year = 2019, } @inproceedings{CTT100806469, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method}, booktitle = {}, year = 2019, } @inproceedings{CTT100809253, author = {Takasi Itikawa and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100809252, author = {Sayaka Koga and Takasi Itikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100809254, author = {Takasi Itikawa and Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {3Dピラー型Au錘MEMS加速度センサ}, booktitle = {}, year = 2019, } @inproceedings{CTT100806472, author = {Tomoki Iriya and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electroplating of Au-Pd Alloy Films and the Mechanical Properties}, booktitle = {}, year = 2019, } @inproceedings{CTT100811731, author = {Hiroyuki Ito and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Noboru Ishihara and Yoshihiro Miyake and Katsuyuki Machida and Kazuya Masu}, title = {兆し計測のための高感度MEMS加速度センサ技術}, booktitle = {}, year = 2019, } @inproceedings{CTT100807194, author = {Takasi Itikawa and Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Masato Sone and Kazuya Masu}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)}, booktitle = {}, year = 2019, } @inproceedings{CTT100804032, author = {Tso-Fu Mark Chang and Yu-An Chien and Hao-Chun Tang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles}, booktitle = {}, year = 2019, } @inproceedings{CTT100802558, author = {Masato Sone and Hao-Chun Tang and Tso-Fu Mark Chang and Chun Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu}, title = {超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価}, booktitle = {電気鍍金研究会}, year = 2019, } @inproceedings{CTT100791879, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test}, booktitle = {}, year = 2019, } @inproceedings{CTT100794652, author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test}, booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics}, year = 2019, } @inproceedings{CTT100791878, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence}, booktitle = {}, year = 2019, } @inproceedings{CTT100790679, author = {Kyotaro Nitta and Tang Haochun and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製}, booktitle = {}, year = 2019, } @inproceedings{CTT100790678, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果}, booktitle = {}, year = 2019, } @inproceedings{CTT100790677, author = {Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790675, author = {Hitomi Watanabe and Takuma Suzuki and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響}, booktitle = {}, year = 2019, } @inproceedings{CTT100790674, author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790673, author = {Ken Atsumi and Shouta Otobe and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術によるピラー型容量検出電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100782446, author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS}, booktitle = {}, year = 2019, } @inproceedings{CTT100777398, author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes}, booktitle = {}, year = 2018, } @inproceedings{CTT100779594, author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu}, title = {Sub-1mG MEMS Inertial Sensor for Biomedical Applications}, booktitle = {}, year = 2018, } @inproceedings{CTT100775377, author = {Sayaka Koga and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100772111, author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.}, title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever}, booktitle = {IUMRS-ICA 2018}, year = 2018, } @inproceedings{CTT100772110, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.}, title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever}, booktitle = {IUMRS-ICA 2018}, year = 2018, } @inproceedings{CTT100786703, author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Solid Solution Strengthening of Gold Based Materials for MEMS Applications}, booktitle = {}, year = 2018, } @inproceedings{CTT100775380, author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ}, booktitle = {}, year = 2018, } @inproceedings{CTT100775374, author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Au単一錘平行平板型3軸MEMS加速度センサの検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100769740, author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769735, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769736, author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769737, author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100772182, author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device}, booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)}, year = 2018, } @inproceedings{CTT100772124, author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu}, title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER}, booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"}, year = 2018, } @inproceedings{CTT100769738, author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100771791, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating for MEMS Accelerometers}, booktitle = {第79回応用物理学会秋季学術講演会}, year = 2018, } @inproceedings{CTT100771219, author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu}, title = {High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology}, booktitle = {}, year = 2018, } @inproceedings{CTT100769739, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769742, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769741, author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100771220, author = {Kazuya Masu and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake}, title = {CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease}, booktitle = {}, year = 2018, } @inproceedings{CTT100760940, author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate}, booktitle = {}, year = 2018, } @inproceedings{CTT100769399, author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection}, booktitle = {}, year = 2018, } @inproceedings{CTT100768649, author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768387, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768386, author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768308, author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768307, author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100758671, author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices}, booktitle = {233rd ECS Meeting}, year = 2018, } @inproceedings{CTT100772038, author = {Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake and Kazuya Masu}, title = {MEMS加速度センサと生体計測への応用}, booktitle = {}, year = 2018, } @inproceedings{CTT100758271, author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film}, booktitle = {}, year = 2018, } @inproceedings{CTT100758521, author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys}, booktitle = {22nd Topical Meeting of the International Society of Electrochemistry}, year = 2018, } @inproceedings{CTT100760620, author = {Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake and Kazuya Masu}, title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100766637, author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers}, booktitle = {}, year = 2018, } @inproceedings{CTT100760808, author = {Tatsuya Koga and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)}, booktitle = {}, year = 2018, } @inproceedings{CTT100760807, author = {Katsuyuki Machida and Kazuya Masu}, title = {集積化CMOS-MEMS技術の課題と展望}, booktitle = {}, year = 2018, } @inproceedings{CTT100760805, author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100760803, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida}, title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性}, booktitle = {}, year = 2018, } @inproceedings{CTT100760802, author = {Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake and Kazuya Masu}, title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム}, booktitle = {}, year = 2018, } @inproceedings{CTT100760801, author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Teruaki Safu and Toshifumi Konishi and Shiro Dosho and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass}, booktitle = {}, year = 2018, } @inproceedings{CTT100760797, author = {Motohiro Takayasu and Tatsuya Koga and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Study on resolution evaluation using tilt for 1-mG MEMS accelerometer}, booktitle = {}, year = 2018, } @inproceedings{CTT100758969, author = {Hao-Chun Tang and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100758968, author = {Hideaki Nakajima and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone}, title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100758967, author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100758966, author = {Keisuke Asano and Hao-Chun Tang and Chun Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100755527, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100780789, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida}, title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating}, booktitle = {}, year = 2017, } @inproceedings{CTT100780791, author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes}, booktitle = {}, year = 2017, } @inproceedings{CTT100751726, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition}, booktitle = {}, year = 2017, } @inproceedings{CTT100751725, author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions}, booktitle = {}, year = 2017, } @inproceedings{CTT100751724, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components}, booktitle = {}, year = 2017, } @inproceedings{CTT100751723, author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever}, booktitle = {}, year = 2017, } @inproceedings{CTT100751721, author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strategies of Mechanical Strengthening in Electroplated Au Materials}, booktitle = {}, year = 2017, } @inproceedings{CTT100751720, author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers}, booktitle = {}, year = 2017, } @inproceedings{CTT100751718, author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2}, booktitle = {}, year = 2017, } @inproceedings{CTT100751442, author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100751440, author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests}, booktitle = {}, year = 2017, } @inproceedings{CTT100751439, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100755334, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {A capacitive sensor circuit based on relaxation oscillator for MEMS inertial sensors}, booktitle = {}, year = 2017, } @inproceedings{CTT100755388, author = {Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer}, booktitle = {}, year = 2017, } @inproceedings{CTT100755389, author = {Tatsuya Koga and Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100751717, author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components}, booktitle = {}, year = 2017, } @inproceedings{CTT100755518, author = {Kosuke Orihara and Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100755526, author = {大西 脩平 and 崔 容俊 and Makoto Ishida and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Kazuya Masu and 二階堂 靖彦 and Mitsumasa Saito and Shinichi Yoshida}, title = {フォトゲート型蛍光センサを用いたレジオネラの蛍光観測}, booktitle = {}, year = 2017, } @inproceedings{CTT100755522, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {積層メタルMEMS慣性センサの長期振動特性評価}, booktitle = {}, year = 2017, } @inproceedings{CTT100755521, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100755520, author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100755519, author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)}, booktitle = {}, year = 2017, } @inproceedings{CTT100754658, author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application}, booktitle = {}, year = 2017, } @inproceedings{CTT100753438, author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes}, booktitle = {}, year = 2017, } @inproceedings{CTT100753404, author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100753335, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors}, booktitle = {}, year = 2017, } @inproceedings{CTT100752534, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating}, booktitle = {}, year = 2017, } @inproceedings{CTT100752532, author = {Tatsuya Koga and Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100752531, author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100751941, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {A high-resolution capacitive sensor circuit for MEMS accelerometers}, booktitle = {}, year = 2017, } @inproceedings{CTT100745655, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test}, booktitle = {MNE2017}, year = 2017, } @inproceedings{CTT100745653, author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices}, booktitle = {MNE2017}, year = 2017, } @inproceedings{CTT100745654, author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End}, booktitle = {MNE2017}, year = 2017, } @inproceedings{CTT100742158, author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications}, booktitle = {}, year = 2017, } @inproceedings{CTT100748741, author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100748739, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {An evaluation of capacitive sensor circuit for MEMS accelerometers}, booktitle = {}, year = 2017, } @inproceedings{CTT100742055, author = {Hao-chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers}, booktitle = {SSI-21}, year = 2017, } @inproceedings{CTT100742056, author = {Chun-Yi Chen and Hao-chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components}, booktitle = {SSI-21}, year = 2017, } @inproceedings{CTT100743817, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices}, booktitle = {}, year = 2017, } @inproceedings{CTT100744945, author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価}, booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー}, year = 2017, } @inproceedings{CTT100745680, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100745676, author = {Motohiro Takayasu and Toshiaki Gonda and Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100735375, author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer}, booktitle = {}, year = 2017, } @inproceedings{CTT100738774, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {MEMS inertial sensors for biomedical applications}, booktitle = {}, year = 2017, } @inproceedings{CTT100735592, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, booktitle = {IEEE-NEMS 2017}, year = 2017, } @inproceedings{CTT100735887, author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735898, author = {Teruaki Safu and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735889, author = {Tso-Fu Mark Chang and Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100737042, author = {Tomoki Iizuka and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100737043, author = {Motohiro Takayasu and Toshiaki Gonda and Daisuke Yamane and Hiroyuki Ito and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A study of module using MEMS accelerometer by multi-layer metal technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100737044, author = {Toshiaki Gonda and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Measurement-System using Vehicle-Control for Inertial Sensors}, booktitle = {}, year = 2017, } @inproceedings{CTT100735897, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735890, author = {Katsuyuki Machida and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Tso-Fu Mark Chang and Kazuya Masu and Masato Sone}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735888, author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100806087, author = {Onishi, S. and Joon, C. Y. and Ishida, M. and Sawada, K. and Ishii, H. and Katsuyuki Machida and Kazuya Masu and Nikaido, Y. and Saito, M. and Yoshida, S.}, title = {Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing}, booktitle = {SEMICONDUCTOR PROCESS INTEGRATION 10}, year = 2017, } @inproceedings{CTT100711207, author = {Masato Sone and Mark Chang and Chun-Yi Chen and Daisuke Yamane and Kazuya Masu and Katsuyuki Machida}, title = {微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）}, booktitle = {第6回CSJ化学フェスタ}, year = 2016, } @inproceedings{CTT100723360, author = {Masaharu Yoshiba and Mark Chang and Chun Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone and Takashi Nagoshi}, title = {高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価}, booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100733967, author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida and Shinichi Yoshida}, title = {マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測}, booktitle = {}, year = 2016, } @inproceedings{CTT100733962, author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法}, booktitle = {}, year = 2016, } @inproceedings{CTT100733961, author = {Teruaki Safu and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法}, booktitle = {}, year = 2016, } @inproceedings{CTT100733960, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ}, booktitle = {}, year = 2016, } @inproceedings{CTT100733959, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {差動型積層メタルMEMS加速度センサの検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100733958, author = {Toshiaki Gonda and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Study of Inertial Sensor Module with MEMS Accelerometers by Multi-layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100733957, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Noboru Ishihara and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {A high-resolution capacitive sensor circuit using RC oscillator}, booktitle = {}, year = 2016, } @inproceedings{CTT100723391, author = {Keisuke Asano and Hao-Chun Tang and Mark Chang and Chun Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone and Takashi Nagoshi}, title = {微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価}, booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723362, author = {Sari Yanagida and Mark Chang and Chun Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone and Takashi Nagoshi}, title = {微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価}, booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723356, author = {Minami Teranishi and Mark Chang and Chun Yi Chen and Daisuke Yamane and Kazuya Masu and Masato Sone and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価}, booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100714942, author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating}, booktitle = {}, year = 2016, } @inproceedings{CTT100714886, author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 益一哉 and 町田克之}, title = {高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）}, booktitle = {日本学術振興会・第172委員会}, year = 2016, } @inproceedings{CTT100710914, author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100702798, author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers}, booktitle = {Separation Techniques 2016}, year = 2016, } @inproceedings{CTT100721709, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100716618, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications}, booktitle = {}, year = 2016, } @inproceedings{CTT100716615, author = {Teruaki Safu and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）}, booktitle = {}, year = 2016, } @inproceedings{CTT100716614, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ}, booktitle = {}, year = 2016, } @inproceedings{CTT100714940, author = {Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer}, booktitle = {}, year = 2016, } @inproceedings{CTT100710916, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710915, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100716613, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル差動型MEMS加速度センサの基礎検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100716612, author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法}, booktitle = {}, year = 2016, } @inproceedings{CTT100710913, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100702490, author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu}, title = {Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture)}, booktitle = {Integrative Biology-2016}, year = 2016, } @inproceedings{CTT100710653, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100710654, author = {Yusuke Nishimura and Onishi Shuhei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Mitsumasa Saito and Shinichi Yoshida}, title = {COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP}, booktitle = {}, year = 2016, } @inproceedings{CTT100708351, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 1-mG MEMS Sensor}, booktitle = {}, year = 2016, } @inproceedings{CTT100708852, author = {Motohiro Takayasu and Toshiaki Gonda and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {小型高感度MEMS慣性センサモジュールの試作評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100708851, author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Masakazu Sonobe and Takumi Kobayashi and Yamato Fukuta and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida}, title = {A study of railroad vehicle control by inertial sensors}, booktitle = {}, year = 2016, } @inproceedings{CTT100702072, author = {Chun-Yi Chen and Masaharu Yoshiba and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Au Films with Ultra High Strength}, booktitle = {}, year = 2016, } @inproceedings{CTT100700917, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700918, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700919, author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700920, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700921, author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100702917, author = {Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100700965, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {マイクロ曲げ試験による電析金薄膜の機械的特性評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700964, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700962, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700961, author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshihumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {マイクロ圧縮試験による金/チタン積層構造の機械的特性評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700959, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100702922, author = {Anky Liu and 小西敏文 and 山根大輔 and 伊藤浩之 and 道正志郎 and 石原昇 and 町田克之 and 益一哉}, title = {CMOS低雑音オペアンプ設計法の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702919, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702918, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702467, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100804415, author = {Daisuke Yamane and Konishi, T. and Safu, T. and Toshiyoshi, H. and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology}, booktitle = {2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016}, year = 2016, } @inproceedings{CTT100748046, author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida}, title = {Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip}, booktitle = {}, year = 2015, } @inproceedings{CTT100695299, author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Sub-1G CMOS-MEMS Accelerometer}, booktitle = {}, year = 2015, } @inproceedings{CTT100697691, author = {Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Properties of Electrodeposited Gold Thin Films}, booktitle = {TACT 2015 International Thin Films Conference}, year = 2015, } @inproceedings{CTT100698704, author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {Stress responses of bacteria confined in microfluidic chips}, booktitle = {}, year = 2015, } @inproceedings{CTT100695306, author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida and Katsuyuki Machida}, title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100695308, author = {Teruaki Safu and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {MEMS加速度センサのための金属構造体の密着力評価}, booktitle = {}, year = 2015, } @inproceedings{CTT100748045, author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida}, title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip}, booktitle = {}, year = 2015, } @inproceedings{CTT100695304, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1G?20G集積化MEMS慣性センサ}, booktitle = {}, year = 2015, } @inproceedings{CTT100695305, author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {移動体制御における慣性センサ適用性の検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100694933, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test}, booktitle = {MNE2015}, year = 2015, } @inproceedings{CTT100697111, author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -紫外光照射によるレジオネラの光応答の観測-}, booktitle = {}, year = 2015, } @inproceedings{CTT100695406, author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology}, booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials}, year = 2015, } @inproceedings{CTT100695311, author = {Teruaki Safu and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {MEMS加速度センサのための金属構造体の密着力評価}, booktitle = {}, year = 2015, } @inproceedings{CTT100695310, author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida and Katsuyuki Machida}, title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100695309, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Sub-1G?20G集積化MEMS加速度センサの基本評価}, booktitle = {}, year = 2015, } @inproceedings{CTT100695302, author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida}, title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology}, booktitle = {}, year = 2015, } @inproceedings{CTT100695301, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology}, booktitle = {}, year = 2015, } @inproceedings{CTT100695300, author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer}, booktitle = {}, year = 2015, } @inproceedings{CTT100694936, author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating}, booktitle = {MNE2015}, year = 2015, } @inproceedings{CTT100693804, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers}, booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering}, year = 2015, } @inproceedings{CTT100692512, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices}, booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials}, year = 2015, } @inproceedings{CTT100692510, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Mechanical Properties of Electrodeposited Gold for Application in MEMS}, booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials}, year = 2015, } @inproceedings{CTT100691819, author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida}, title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology}, booktitle = {AMC2015}, year = 2015, } @inproceedings{CTT100695295, author = {Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Nano-G metrology system and its biomedical applications by CMOS-MEMS technology}, booktitle = {Biological Systems: Open Access}, year = 2015, } @inproceedings{CTT100692702, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Compression deformation of micro-components fabricated by FIB from gold electrodeposited films}, booktitle = {ISAMR2015}, year = 2015, } @inproceedings{CTT100695303, author = {Daisuke Yamane and Kazuya Masu and Katsuyuki Machida}, title = {A Sub-1G MEMS Inertial Sensor}, booktitle = {}, year = 2015, } @inproceedings{CTT100692273, author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Shota Kamei and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {慣性センサを用いた移動体制御の基礎検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100692321, author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {マイクロ流路内でのレジオネラ属菌のストレス応答}, booktitle = {}, year = 2015, } @inproceedings{CTT100695298, author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性}, booktitle = {}, year = 2015, } @inproceedings{CTT100695297, author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {MEMS慣性センサを用いた移動体制御の検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100692272, author = {Minami Teranishi and Mark Chang and Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {電解金めっきで作製した微小カンチレバーの形状安定性評価}, booktitle = {}, year = 2015, } @inproceedings{CTT100682962, author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone}, title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices}, booktitle = {ICMAT2015 & IUMRS-ICA2015,}, year = 2015, } @inproceedings{CTT100690965, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Sub-1G MEMS Sensor}, booktitle = {}, year = 2015, } @inproceedings{CTT100686947, author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu}, title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-}, booktitle = {}, year = 2015, } @inproceedings{CTT100684706, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100684014, author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -各種細菌の蛍光強度特性の時間依存性-}, booktitle = {}, year = 2015, } @inproceedings{CTT100683810, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {エネルギーハーべスティングデバイスの検討（5）}, booktitle = {}, year = 2015, } @inproceedings{CTT100683809, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討}, booktitle = {}, year = 2015, } @inproceedings{CTT100678032, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 1mG-to-20G Integrated MEMS Inertial Sensor}, booktitle = {}, year = 2014, } @inproceedings{CTT100678033, author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology}, booktitle = {}, year = 2014, } @inproceedings{CTT100684016, author = {Daisuke Yamane and Katsuyuki Machida and Kazuya Masu}, title = {MEMS for sensing sub-1G}, booktitle = {}, year = 2014, } @inproceedings{CTT100677573, author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100677571, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Shota Kamei and Kazuya Masu and Katsuyuki Machida}, title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100677570, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100684013, author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100677572, author = {Takaaki Matsushima and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100676375, author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator}, booktitle = {}, year = 2014, } @inproceedings{CTT100684012, author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-}, booktitle = {}, year = 2014, } @inproceedings{CTT100676374, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers}, booktitle = {}, year = 2014, } @inproceedings{CTT100676378, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {エネルギーハーべスティングデバイスの検討（４）}, booktitle = {}, year = 2014, } @inproceedings{CTT100676377, author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタル構造による３軸加速度センサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100676376, author = {Shota Kamei and Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100684011, author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100674569, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida}, title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100674568, author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Shota Kamei and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {積層メタルによる静電容量型3軸加速度センサの基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100674567, author = {Daisuke Yamane and Shota Kamei and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ}, booktitle = {}, year = 2014, } @inproceedings{CTT100674565, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers}, booktitle = {}, year = 2014, } @inproceedings{CTT100748044, author = {R. Hayashi and Y. Nishimura and H. Nakazawa and M. Ishida and K. Sawada and H. Ishii and K. Machida and N. Ishihara and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida}, title = {PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads}, booktitle = {}, year = 2014, } @inproceedings{CTT100684704, author = {Yusuke Shiino and Hiroyuki Ito and Taku Fujiwara and Noboru Ishihara and Hisashi Yamanouchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter}, booktitle = {}, year = 2014, } @inproceedings{CTT100673061, author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100673063, author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Integrated CMOS-MEMS Technology and its Application}, booktitle = {}, year = 2014, } @inproceedings{CTT100673062, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer}, booktitle = {}, year = 2014, } @inproceedings{CTT100669023, author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer}, booktitle = {}, year = 2014, } @inproceedings{CTT100668508, author = {Hiroyuki Ito and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100668509, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Sub-1G MEMS加速度センサの検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100668510, author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-}, booktitle = {}, year = 2014, } @inproceedings{CTT100668511, author = {Toshifumi Konishi and Ken Kagaya and Daisuke Yamane and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {エネルギーハーベスティングデバイスの検討（３）}, booktitle = {}, year = 2014, } @inproceedings{CTT100668512, author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {エネルギーハーベスティングデバイスの検討（２）}, booktitle = {}, year = 2014, } @inproceedings{CTT100668513, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {MEMS加速度センサによるSub-1G検出の基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100663423, author = {Hiroyuki Ito and Toshifumi Konishi and Daisuke Yamane and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100663420, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Sub-1G MEMS Accelerometer}, booktitle = {}, year = 2013, } @inproceedings{CTT100663429, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100663428, author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Masafumi Tsukuda and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {エネルギーハーベストデバイスの小型化の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100663432, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Ken Kagaya and Masafumi Tsukuda and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサの特性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100661182, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi}, title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-}, booktitle = {}, year = 2013, } @inproceedings{CTT100660291, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {集積化CMOS-MEMS加速度センサ回路の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100660522, author = {Yusuke Shiino and Taku Fujiwara and Hiroyuki Ito and Noboru Ishihara and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Low-power wireless pH monitoring FM Transmitter IC with Ion Sensitive Field Effect Transistor}, booktitle = {}, year = 2013, } @inproceedings{CTT100660521, author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology}, booktitle = {}, year = 2013, } @inproceedings{CTT100660520, author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Masafumi Tsukuda and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {エネルギーハーベストデバイスの検討(1)}, booktitle = {}, year = 2013, } @inproceedings{CTT100660290, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Ken Kagaya and Masafumi Tsukuda and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100659144, author = {Masafumi Tsukuda and Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサの基礎検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100658941, author = {Toshifumi Konishi and Satoshi Maruyama and Daisuke Yamane and Takaaki Matsushima and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi}, title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築}, booktitle = {}, year = 2013, } @inproceedings{CTT100658940, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Ken Kagaya and Masafumi Tsukuda and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化}, booktitle = {}, year = 2013, } @inproceedings{CTT100658938, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION}, booktitle = {}, year = 2013, } @inproceedings{CTT100653238, author = {Yusuke Shiino and Taku Fujiwara and Hiroyuki Ito and Noboru Ishihara and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Kazuya Masu}, title = {ISFETを用いたpHモニタリング用低電力FM送信ICの検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100654652, author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu}, title = {集積化CMOS-MEMS技術の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100654655, author = {Toshifumi Konishi and Daisuke Yamane and gou motohashi and Ken Kagaya and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサの設計}, booktitle = {}, year = 2013, } @inproceedings{CTT100654654, author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and gou motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＭＥＭＳ加速度センサの検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100654653, author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and gou motohashi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100658939, author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL}, booktitle = {}, year = 2013, } @inproceedings{CTT100804623, author = {Maruyama, S. and Konishi, T. and Katsuyuki Machida and Ishihara, N. and Kazuya Masu and Fujita, H. and Toshiyoshi, H.}, title = {A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners}, booktitle = {International Conference on Optical MEMS and Nanophotonics}, year = 2013, } @inproceedings{CTT100804521, author = {Ishii, H. and Sawada, K. and Ishida, M. and Katsuyuki Machida and Iida, K. and Saito, M. and Yoshida, S.}, title = {Bio-MEMS chip for bacteria detection-a challenge of si technology to biomedical field}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100804442, author = {Kazuya Masu and Ishihara, N. and Konishi, T. and Katsuyuki Machida and Toshiyoshi, H.}, title = {Challenges in integration of diverse functionalities on CMOS}, booktitle = {Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC}, year = 2013, } @inproceedings{CTT100661262, author = {Kazuya Masu and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {How can we bridge the gap between photonics and Si CMOS LSI?}, booktitle = {}, year = 2012, } @inproceedings{CTT100646781, author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {A Multi-Physics Simulation Technique for Integrated MEMS}, booktitle = {}, year = 2012, } @inproceedings{CTT100645036, author = {Daisuke Yamane and gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100653224, author = {Youngshik Shin and Katsube Kyohei and Kazuaki Sawada and Makoto Ishida and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior}, booktitle = {}, year = 2012, } @inproceedings{CTT100645452, author = {Youngshik Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {Fabrication of Microfluidic Device for On-chip Observation of Bacterial Behavior}, booktitle = {}, year = 2012, } @inproceedings{CTT100645451, author = {Ryuhei Hayashi and Katsube Kyohei and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {MEMS型細菌捕獲チップの製作とレジオネラを用いた評価}, booktitle = {}, year = 2012, } @inproceedings{CTT100645434, author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers}, booktitle = {}, year = 2012, } @inproceedings{CTT100645037, author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi}, title = {Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators}, booktitle = {}, year = 2012, } @inproceedings{CTT100645035, author = {Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {RFミキサ回路のため高速MEMSスイッチの検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100645034, author = {Toshifumi Konishi and Tomofumi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術}, booktitle = {}, year = 2012, } @inproceedings{CTT100645032, author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {統合設計技術のためのMEMS加速度センサのモデルの検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100645029, author = {gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100644392, author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer}, booktitle = {}, year = 2012, } @inproceedings{CTT100644389, author = {Takaaki Matsushima and Toshifumi Konishi and gou motohashi and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS加速度センサの検討（3）}, booktitle = {}, year = 2012, } @inproceedings{CTT100644390, author = {gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS加速度センサの検討（4）}, booktitle = {}, year = 2012, } @inproceedings{CTT100644391, author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language}, booktitle = {}, year = 2012, } @inproceedings{CTT100645446, author = {Katsube Kyohei and Youngshik Shin and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップII‐蛍光強度の細菌濃度依存性‐}, booktitle = {}, year = 2012, } @inproceedings{CTT100645447, author = {Youngshik Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {Fabrication of microfluidic device for the bacteria observation}, booktitle = {}, year = 2012, } @inproceedings{CTT100645443, author = {Kyohei Katsube and Ryuhei Hayashi and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Yuta Takekawa and Changle Wang and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {Bio-MEMES Chip for Trapping Bacteria by Si-pillar Structure and Its Application to Legionella}, booktitle = {}, year = 2012, } @inproceedings{CTT100645444, author = {Katsube Kyohei and Ryuhei Hayashi and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Changle Wang and Yuta Takekawa and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {集積化ＭＥＭＳ技術による細菌迅速診断チップの開発}, booktitle = {}, year = 2012, } @inproceedings{CTT100640424, author = {Daisuke Yamane and gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {A Study on Arrayed CMOS-MEMS Accelerometers}, booktitle = {}, year = 2012, } @inproceedings{CTT100653249, author = {Daisuke Yamane and gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS加速度センサの検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100653250, author = {Katsube Kyohei and Ryuhei Hayashi and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Changle Wang and Yuta Takekawa and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {集積化ＭＥＭＳ技術による細菌迅速診断チップの開発}, booktitle = {}, year = 2012, } @inproceedings{CTT100645440, author = {Youngshik Shin and Kyohei Katsube and Kazuaki Sawada and Makoto Ishida and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida}, title = {Fabrication of Bio-MEMS Device for on-}, booktitle = {}, year = 2012, } @inproceedings{CTT100645448, author = {Youngshik Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {Fabrication of microfluidic device for the bacteria observation}, booktitle = {}, year = 2012, } @inproceedings{CTT100635244, author = {Toshifumi Konishi and gou motohashi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)}, booktitle = {第59 回応用物理学関係連合講演会 講演予稿集}, year = 2012, } @inproceedings{CTT100635241, author = {gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu}, title = {アレイ型CMOS-MEMS 加速度センサの検討(1)}, booktitle = {第59 回応用物理学関係連合講演会 講演予稿集}, year = 2012, } @inproceedings{CTT100645445, author = {Katsube Kyohei and Youngshik Shin and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップI‐細菌捕獲構造の製作‐}, booktitle = {}, year = 2012, } @inproceedings{CTT100645449, author = {Katsube Kyohei and Ryuhei Hayashi and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐}, booktitle = {}, year = 2012, } @inproceedings{CTT100635245, author = {Katsube Kyohei and Ryuhei Hayashi and Eishiki Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐}, booktitle = {第59 回応用物理学関係連合講演会 講演予稿集}, year = 2012, } @inproceedings{CTT100635249, author = {Ryuhei Hayashi and Katsube Kyohei and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐}, booktitle = {第59 回応用物理学関係連合講演会 講演予稿集}, year = 2012, } @inproceedings{CTT100645031, author = {gou motohashi and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Katsuyuki Machida}, title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100645450, author = {Ryuhei Hayashi and Katsube Kyohei and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐}, booktitle = {}, year = 2012, } @inproceedings{CTT100629998, author = {Katsube Kyohei and Eishiki Shin and Makoto Ishida and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida}, title = {細菌迅速検出用マイクロチップII ‐蛍光強度の細菌濃度依存性‐}, booktitle = {第72 回応用物理学会学術講演会 講演予稿集（2011 秋 山形大学）}, year = 2011, } @inproceedings{CTT100629997, author = {Toshifumi Konishi and Tomofumi Maruyama and Takaaki Matsushima and Makoto Mita and Katsuyuki Machida and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A Multi-physics Simulation Technique for Integrated CMOS-MEMS (2)}, booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14}, year = 2011, } @inproceedings{CTT100613068, author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamanouchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Low-power and small wireless pH sensing module with Ion-Sensitive FET}, booktitle = {応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010}, year = 2010, } @inproceedings{CTT100612617, author = {Toshifumi Konishi and Satoshi Maruyama and Takaaki Matsushima and Makoto Mita and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS}, booktitle = {Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials}, year = 2010, } @inproceedings{CTT100612097, author = {Taku Fujiwara Noboru Ishihara Shuhei Amakawa Hisashi Yamanouchi Hiroki Tanabe Satoshi Nomura Toshifumi Konishi Katsuyuki Machida Kazuya Masu Tokyo Institute of Technology NTT Advanced Technology Corporation and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Low-power wireless pH sensing FM transmitter IC with Ion Sensitive Field Effect Transistor}, booktitle = {2010 年電子情報通信学会エレクトロニクスソサイエティ大会}, year = 2010, } @inproceedings{CTT100608501, author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {A Wearably Small Low-Power Wireless pH Sensor Module Incorporating an lon-sensitive Field-Effect Transtor}, booktitle = {The 13th International Meeting on Chemical Sensors (IMCS-13)}, year = 2010, } @inproceedings{CTT100607461, author = {Taku Fujiwara and Noboru Ishihara and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {ISFETを用いた生体・環境モニタリング用ワイヤレスpHセンサモジュール}, booktitle = {LSIとシステムのワークショップ2010}, year = 2010, } @inproceedings{CTT100605007, author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Wireless pH sensor module with an ISFET}, booktitle = {2010 年 電子情報通信学会総合大会}, year = 2010, } @inproceedings{CTT100589787, author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {pHセンサ用ISFET特性のモデリング}, booktitle = {2009年（平成21年）秋季第70回応用物理学会学術講演会}, year = 2009, } @misc{CTT100835046, author = {Masato Sone and Tso-Fu Mark Chang and Chun Yi Chen and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu}, title = {貴金属またはその合金の微細結晶組織を有する金属材料}, howpublished = {PublishedPatent}, year = 2020, month = {}, note = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)} } @misc{CTT100820740, author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito}, title = {微細素子}, howpublished = {RegisteredPatent}, year = 2022, month = {}, note = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)} }