@article{CTT100911326, author = {Yosuke Shimada and Hiroshi Akatsuka}, title = {Evaluating plasma fluctuation by collisional-radiative model using Malliavin derivative}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @article{CTT100911345, author = {Hiroshi Akatsuka}, title = {Quantitative analysis of optical emission spectroscopy for plasma process monitoring}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @article{CTT100908567, author = {Kiyoyuki Yambe and Tomoya Izumida and Iwao Ohyama and Hiroshi Akatsuka}, title = {Comparison of Electron Densities and Temperatures in Helium and Argon Nonthermal Atmospheric-Pressure Plasmas by Continuum Spectral Analysis}, journal = {IEEE Transactions on Plasma Science}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {J. Vac. Sci. Technol. A}, year = 2024, } @inproceedings{CTT100911579, author = {HIROSHI AKATSUKA}, title = {発光分光および機械学習を用いたプラズマの電子温度・密度の実用的計測}, booktitle = {R052 DXプラズマプロセス委員会 第5 回研究会 要旨集}, year = 2024, } @inproceedings{CTT100909733, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma}, booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13}, year = 2024, } @inproceedings{CTT100910224, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Analysis of Atomospheric-pressure Non-equiribrium Ar Plasma Based on Continuum and Line spectra with Weighted Analysis}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100910225, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100908453, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908454, author = {Shuhei Watanabe and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Wataru Kikuchi and Kenta Ishi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908455, author = {Kohei Yamashita and Wataru Kikuchi and Kenta Ishi and Jun Enomoto and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopy Measurement of Vibrational and Rotational Temperatures in Ar/N2 Mixed Atmospheric-Pressure Non-Equilibrium Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908456, author = {Yosuke Shimada and Hiroshi Akatsuka}, title = {For control method of plasma fluctuation using Malliavin derivative}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908457, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kenta Ishi and Shuhei Watanabe and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, }