@article{CTT100911525, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100910937, author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  }, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909951, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909052, author = {Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki ; Ito and Yoshihiro Miyake and Masato Sone}, title = {Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications}, journal = {Journal of The Electrochemical Society}, year = 2024, } @article{CTT100908961, author = {Kisuke Miyado and Devi Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @inproceedings{CTT100908972, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908973, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun Yi Chen and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Tso-Fu Mark Chang and Masato Sone}, title = {Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908971, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, }