@article{CTT100907695,
  author = {Hiroyoshi Tanabe and Akira Jinguji and Atsushi Takahashi},
  title = {Accelerating extreme ultraviolet lithography simulation with weakly guiding approximation and source position dependent transmission cross coefficient formula},
  journal = {Journal of Micro/Nanopatterning, Materials, and Metrology},
  year = 2024,
}

@inproceedings{CTT100911340,
  author = {Hiroyoshi Tanabe and Akira Jinguji and Atsushi Takahashi},
  title = {Pre-training CNN for fast EUV lithography simulation including M3D effects},
  booktitle = {Proc. SPIE 12954, DTCO and Computational Patterning III, 129540I},
  year = 2024,
}