@article{CTT100908961,
  author = {Kisuke Miyado and Devi Srujana  Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}