@article{CTT100398103,
  author = {Tatsuro Watahiki and Katsuya Abe and Hajime Tamura and Shinsuke Miyajima and Akira Yamada and Makoto Konagai},
  title = {Low temperature epitaxial growth of Si and Si1－yCy films by hot wire cell method},
  journal = {Thin Solid Films},
  year = 2001,
}