@article{CTT100869425,
  author = {Yuki Taoka and Terumichi Hayashi and Pasomphone Hemthavy and Kunio Takahashi and Shigeki Saito},
  title = {Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling},
  journal = {Engineering Research Express},
  year = 2022,
}

@misc{CTT100880610,
  author = {Yuki Taoka and Kohei Kawabata and Pasomphone Hemthavy and Seungman Choi and Kunio Takahashi and Shigeki Saito},
  title = {Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography},
  year = 2022,
}