@article{CTT100625181, author = {Akihiro Matsutani and Ayako Takada}, title = {High-frequency single-cell isolation of bacteria using microenclosure array}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @article{CTT100641300, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Reactive Ion Etching of Si Using Ar/F2 Plasma}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @inproceedings{CTT100615612, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Dry Etching of Si by Solid Source I2 Inductively Coupled Plasma}, booktitle = {}, year = 2010, } @inproceedings{CTT100613932, author = {Ayumi Fuchida and Takeru Sakairi and Akihiro Matsutani and Fumio Koyama}, title = {Characterizations of Reflection-type Slow Light Optical Switches}, booktitle = {}, year = 2010, } @inproceedings{CTT100612963, author = {松谷 晃宏 and 大槻 秀夫 and 小山 二三夫}, title = {I2-ICP によるSi の反応性イオンエッチング}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100603700, author = {坂入健 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {スローライト光導波路デバイスのゲート動作とスポットサイズ分散特性}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100609250, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever}, booktitle = {}, year = 2010, } @inproceedings{CTT100609252, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer}, booktitle = {}, year = 2010, } @inproceedings{CTT100612967, author = {佐野勇人 and 中田紀彦 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長温度係数制御}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100612970, author = {今村明博 and 松谷晃宏 and 小山二三夫}, title = {多波長面発光レーザアレイと集積可能な小型光合波器の検討}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100612960, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure}, booktitle = {}, year = 2010, } @inproceedings{CTT100612959, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array}, booktitle = {}, year = 2010, } @inproceedings{CTT100608335, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Compact Reflection-type Optical Switch with Slowing Light}, booktitle = {}, year = 2010, } @inproceedings{CTT100607626, author = {Norihiko Nakata and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Proposal of Multi-Wavelength Integration of Athermal GAAS VCSEL Array with Thermally Actuated Cantilever Structure}, booktitle = {}, year = 2010, } @inproceedings{CTT100607625, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation}, booktitle = {}, year = 2010, } @inproceedings{CTT100603698, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {Ar/F2 を用いたSi の反応性イオンエッチングにおけるプラズマの特性}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100603699, author = {橋爪佑樹 and 松谷晃宏 and 小山二三夫}, title = {熱ナノインプリントを用いた高屈折率差サブ波長回折格子製作の検討}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100603704, author = {佐野勇人 and 中田紀彦 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長トリミング}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100603705, author = {中田紀彦 and 佐野勇人 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いたアサーマル面発光レーザの多波長集積化の検討Ⅱ}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100604524, author = {Hayato Sano and Norihiko Nakata and Matsutani Akihiro and Fumio Koyama}, title = {Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604525, author = {Norihiko Nakata and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Multi-Wavelength Integration of Athermal VCSELs with a Micromachined Cantilever}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604527, author = {Yuuki Hashidume and Akihiro Matsutani and Fumio Koyama}, title = {Fabrication of High Contrast Grating with Nanoimprint Process}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604530, author = {Ayumi Fuchida and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Optical Switch with Slowing Light in Bragg Reflector Waveguide}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604531, author = {Takayoshi Fujisawa and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {In-plane Optical Coupling to Bragg Reflector Slow Light Waveguide Devices}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100801903, author = {高梨裕 and 加藤 智行 and 松谷晃宏 and 坂口 孝弘 and 植之原裕行 and 小林 功郎}, title = {凹面鏡とVCSELを用いた二往復共振器モード同期レーザにおける位置ずれトレランス解析}, booktitle = {2010年電子情報通信学会総合大会, 仙台, 2010年3月}, year = 2010, } @misc{CTT100617680, author = {松谷晃宏 and 小山二三夫 and 大槻秀夫}, title = {固体ソースドライエッチング}, year = 2010, } @misc{CTT100613405, author = {淵田歩 and 松谷晃宏 and 小山二三夫}, title = {スローライトを利用した反射型光スイッチの小型化}, year = 2010, } @misc{CTT100631716, author = {松谷晃宏 and 高田綾子}, title = {単一細胞分離用プレート}, howpublished = {登録特許}, year = 2014, month = {}, note = {特願2010-017287(2010/01/28), 特開2011-152108(2011/08/11), 特許第5622189号(2014/10/03)} }