@article{CTT100785326,
  author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer},
  journal = {Sensors and Materials},
  year = 2018,
}

@article{CTT100766193,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100756750,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100759221,
  author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide},
  journal = {Surface and Coatings Technology},
  year = 2018,
}

@article{CTT100759250,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers},
  journal = {IEICE Electronics Express},
  year = 2018,
}

@article{CTT100758009,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2018,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772110,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.},
  title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100772182,
  author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device},
  booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100760940,
  author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768649,
  author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758671,
  author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices},
  booktitle = {233rd ECS Meeting},
  year = 2018,
}

@inproceedings{CTT100772038,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉},
  title = {MEMS加速度センサと生体計測への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758271,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758521,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760620,
  author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉},
  title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100760808,
  author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760802,
  author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉},
  title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758969,
  author = {TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758967,
  author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758966,
  author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100766637,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers},
  booktitle = {},
  year = 2018,
}