@misc{CTT100860435, author = {宮島晋介 and 滝口雄貴 and 湯田 洋平  and 綿引 達郎 }, title = {酸化物半導体装置及びその製造方法}, howpublished = {登録特許}, year = 2021, month = {}, note = {特願2020-538314(2019/08/08), 再表2020/039971(2021/04/08), 特許第6980116号(2021/11/18)} }