@book{CTT100885598, author = {松谷晃宏}, title = {「擦弦楽器」}, publisher = {コロナ社}, year = 2023, } @book{CTT100817412, author = {松谷晃宏}, title = {(分担)第9章2節 演奏の表現,評価解析 1.奏法}, publisher = {北大路書房}, year = 2020, } @book{CTT100702070, author = {松谷晃宏}, title = {(分担執筆)ヴァイオリン}, publisher = {コロナ社}, year = 2016, } @book{CTT100819424, author = {松谷晃宏}, title = {(分担執筆)第7章 化合物半導体のプラズマエッチング}, publisher = {技術情報協会}, year = 2007, } @book{CTT100819423, author = {松谷晃宏}, title = {(分担執筆)第4章 極微構造の形成とデバイス製作技術}, publisher = {共立出版}, year = 1999, } @article{CTT100911315, author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani}, title = {Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma}, journal = {Sensors and Materials}, year = 2024, } @article{CTT100911349, author = {Takumi MOCHIDA and Akihiro MATSUTANI and Wataru HIJIKATA}, title = {Development of implantable energy-harvesting system utilizing incomplete tetanus of skeletal muscle}, journal = {Journal of Biomechanical Science and Engineering}, year = 2024, } @article{CTT100890824, author = {Akihiro Matsutani}, title = {Measurement of frequency characteristics under various tuning conditions in violin performances}, journal = {Acoustical Science and Technology}, year = 2023, } @article{CTT100890768, author = {松谷晃宏}, title = {共用クリーンルームの管理運営と半導体マイクロプロセス技術の開発による研究支援}, journal = {TCカレッジ TC論文}, year = 2023, } @article{CTT100887414, author = {Mie Tohnishi and Mina Sato and Akihiro Matsutani and Takashi Ubukata and Sachiko Matsushita}, title = {Surface Treatment of Polyimide using Solid-source H2O Plasma for Fabrication of Ge Electrode}, journal = {Sensors and Materials}, year = 2023, } @article{CTT100885535, author = {Ryo Tsukui and Masaru Kino and Kodai Yamamoto and Mina Sato and Mie Tohnishi and Akihiro Matsutani and Mikio Kurita}, title = {Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor}, journal = {Optics Continuum}, year = 2023, } @article{CTT100877698, author = {Akihiro Matsutani}, title = {Observation of libration and change in apparent diameter of the Moon with a pinhole camera}, journal = {Physics Education}, year = 2022, } @article{CTT100865308, author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani}, title = {Microfabrication of Si by KOH Etchant Using Etching Mask Amorphized by Ar Ion Beam}, journal = {Sensors and Materials}, year = 2022, } @article{CTT100849004, author = {Akihiro Matsutani}, title = {Measurements of fundamental frequency shifts in the air cavity mode of a violin originating from changes in molecular weight and temperature}, journal = {Physics Education}, year = 2021, } @article{CTT100843499, author = {Mie Tohnishi and Akihiro Matsutani}, title = {Surface Treatment of Polydimethylsiloxane and Glass Using Solid-source H2O Plasma for Fabrication of Microfluidic Devices}, journal = {Sensors and Materials}, year = 2021, } @article{CTT100832032, author = {Akihiro Matsutani}, title = {Direct observation of spherical aberration under microscope using concave micromirrors}, journal = {Eur. J. Phys.}, year = 2020, } @article{CTT100843421, author = {Toshihiko Takeshima and Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {In-situ Temperature Measurement of Local Photothermal Conversion}, journal = {Chemistry Letters}, year = 2020, } @article{CTT100840199, author = {S. Hu and M. Takanohashi and X. Gu and A. Matsutani and F. Koyama}, title = {Lateral Integration of VCSEL and Amplifier with Resonant Wavelength Detuning Design}, journal = {IEICE Electronics Express}, year = 2020, } @article{CTT100794148, author = {Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Ayako Takada}, title = {Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Köhler Illumination by XeF2 Vapor Etching}, journal = {Sensors and Materials}, year = 2019, } @article{CTT100773088, author = {H. Takeda and K. Akimoto and T. Oshima and K. Takizawa and J. Kondoh and A. Matsutani and T. Hoshina and T. Tsurumi}, title = {Electro-acoustical constants and Rayleigh surface acoustic wave propagation characteristics of calcium aluminate silicate Ca2Al2SiO7 single crystals}, journal = {JPN. J. APPL. PHYS.}, year = 2018, } @article{CTT100771841, author = {前田幸平 and Van Nhu Hai and 西岡國生 and 松谷晃宏 and 立木隆 and 内田貴司}, title = {MOD 法により Si3N4/SiO2メンブレン上に製作したVOxマイクロボロメータの特性評価}, journal = {電気学会論文誌 A}, year = 2018, } @article{CTT100778577, author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation}, journal = {Surface Science}, year = 2018, } @article{CTT100761298, author = {Shunya Inoue and Shun Nishimura and Masanori Nakahama and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {High-speed wavelength switching of tunable MEMS vertical cavity surface emitting laser by ringing suppression}, journal = {Japanese Journal of Applied Physics}, year = 2018, } @article{CTT100758839, author = {Akihiro Matsutani}, title = {Experimental demonstration on air cavity mode of violin using holed sheets of paper}, journal = {Physics Education}, year = 2018, } @article{CTT100758679, author = {Akihiro Matsutani and Ayako Takada}, title = {Celluloid Microenclosure and Microlens Array Fabricated by Suzuki's Universal Microprinting Method and XeF2 Vapor Etching for Microbial Analysis}, journal = {Sensors and Materials}, year = 2018, } @article{CTT100754361, author = {松谷晃宏}, title = {バイオリン-身体間の相互作用と音色}, journal = {トライボロジスト}, year = 2017, } @article{CTT100754360, author = {松谷晃宏}, title = {バイオリンの駒の光弾性観察}, journal = {トライボロジスト}, year = 2017, } @article{CTT100756639, author = {Tsuyoshi Takahashi and Akihiro Matsutani and Dai Shoji and Kunio Nishioka and Mina Sato and Takayuki Okamoto and Tomotarou Ezaki and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer}, journal = {Colloids. Surf. A.}, year = 2017, } @article{CTT100727009, author = {Akihiro Matsutani and Ayako Takada}, title = {Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave}, journal = {Japanese Journal of Applied Physics}, year = 2016, } @article{CTT100705019, author = {Akihiro Matsutani and Fumitaka Ishiwari and Yoshiaki Shoji and Takashi Kajitani and Takuya Uehara and Masaru Nakagawa and Takanori Fukushima}, title = {Chlorine -based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask}, journal = {Japanese Journal of Applied Physics}, year = 2016, } @article{CTT100704496, author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato}, title = {Energy dispersive X-ray spectroscopy analysis of Si sidewall surface etched by deep-reactive ion etching}, journal = {Japanese Journal of Applied Physics}, year = 2016, } @article{CTT100722482, author = {Sachiko Matsushita and Akihiro Matsutani and Yasushi Morii and Daito Kobayashi and Kunio Nishioka and Dai Shoji and Mina Sato and Tetsu Tatsuma and Takumi Sannomiya and Toshihiro Isobe and Akira Nakajima}, title = {Calculation and Fabrication of Two-dimensional Complete Photonic Bandgap Structures composed of Rutile TiO2 Single Crystals in Air/Liquid}, journal = {J. MATER. SCI.}, year = 2015, } @article{CTT100695863, author = {Masanori Nakahama and Xiaodong Gu and Takahiro Sakaguchi and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {Sub-gigahertz beam switching of vertical-cavity surface-emitting laser with transverse coupled cavity}, journal = {Applied Physics Letters}, year = 2015, } @article{CTT100694082, author = {中濵 正統 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {マイクロマシン構造を用いた面発光レーザーの波長制御と波長温度無依存化}, journal = {レーザー研究 2015年7月}, year = 2015, } @article{CTT100694080, author = {Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {850nm transverse-coupled-cavity vertical-cavity surface-emitting laser with direct modulation bandwidth of over 30GHz}, journal = {Applied Physics Express}, year = 2015, } @article{CTT100687942, author = {Akihiro Matsutani and FUMIO KOYAMA}, title = {Dry etching of SiC using Ar/F2 plasma and XeF2 plasma}, journal = {Japanese Journal of Applied Physics}, year = 2015, } @article{CTT100691306, author = {Akihiro Matsutani and Ayako Takada}, title = {Single-Cell Isolation and Size Sieving Using Microenclosure Array for Microbial Analysis}, journal = {Sensors and Materials}, year = 2015, } @article{CTT100683433, author = {Xiaodong Gu and Kenya Suzuki and Yuichiro Ikuma and Kazunori Seno and Hiromasa Tanobe and Akihiro Matsutani and Fumio Koyama}, title = {Compact Wavelength Selective Switch Using a Bragg Reflector Waveguide Array with Ultra-Large Number (>100) of Output-Ports}, journal = {Journal of Lightwave Technology}, year = 2015, } @article{CTT100666246, author = {Chao Zhi and Tadahiko Shinshi and Minoru Uehara and Akihiro Matsutani and Isamu Yuito and Teruaki Takeuchi}, title = {A Polydimethylsiloxane diaphragm integrated with a sputtered thin film NdFeB magnet}, journal = {MICROSYST TECHNOL}, year = 2015, } @article{CTT100701828, author = {S. Sano and K. Nishioka and A. Matsutani and T. Isobe and A. Nakajima and S. Matsushita}, title = {Simple fabrication of micro-polygons and micro-honeycombs utilizing thermal deformation of monolayer colloidal crystals during reactive ion etching}, journal = {Colloid. Surf. A}, year = 2015, } @article{CTT100701826, author = {T. Takahashi and A. Matsutani and D. Shoji and K. Nishioka and M. Sato and T. Isobe and A. Nakajima and S. Matsushita}, title = {Microfabrication for a polystyrene quadrupole by template-assisted self-assembly}, journal = {Colloid. Surf.A}, year = 2015, } @article{CTT100679903, author = {S. Furuyama and K. Tahara and T. Iwasaki and A. Matsutani and M. Hatano}, title = {Fluorinated Graphene FETs Controlled by Ionic Liquid Gate}, journal = {IEEE J. Display Technolog}, year = 2014, } @article{CTT100677470, author = {Xiaodong Gu and Ayako Suzuki and Akihiro Matsutani and Fumio Koyama}, title = {20μm long slow-light Bragg reflector waveguide modulator with over 20GHz modulation bandwidth}, journal = {Applied Physics Express(APEX)}, year = 2014, } @article{CTT100677468, author = {Masanori Nakahama and Takahiro Sakaguchi and akihiro matsutani and Fumio Koyama}, title = {Athermalization and on-chip multi-wavelength integration of VCSELs employing thermally actuated micromachined mirrors}, journal = {Applied Physics Letters(APL)}, year = 2014, } @article{CTT100675911, author = {Shunya Inoue and Junichi Kashino and Akihiro Matsutani and Hideo Ohtsuki and Takahiro Miyashita and Fumio Koyama}, title = {Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs}, journal = {Japanese Journal of Applied Physics(JJAP)}, year = 2014, } @article{CTT100684994, author = {Masanori Nakahama and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Athermal and widely tunable VCSEL with bimorph micromachined mirror}, journal = {Optics Express}, year = 2014, } @article{CTT100692928, author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato and Dai Shoji and Daito Kobayashi and Toshihiro Isobe and Akira Nakajima and Tetsu Tatsuma and Sachiko Matsushita}, title = {Angled etching of (001) rutile Nb-TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching}, journal = {Japanese Journal of Applied Physics}, year = 2014, } @article{CTT100665217, author = {Hamed Dalir and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {High Frequency Modulation of Transverse-Coupled-Cavity VCSELs for Radio over Fiber Applications,” IEEE Photonics Technology Letter}, journal = {IEEE Photonics Technology Letters}, year = 2014, } @article{CTT100669754, author = {Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Lateral Integration of Vertical Cavity Surface Emitting Laser and Slow Light Bragg Reflector Waveguide Devices}, journal = {Applied Optics}, year = 2014, } @article{CTT100667061, author = {Shota Mochizuki and Xiaodong Gu and Kenji Tanabe and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {Generation of vortex beam using Bragg reflector waveguide}, journal = {Applied Physics Express(APEX)}, year = 2014, } @article{CTT100666293, author = {Kensuke Nakamura and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {Slow-light Bragg reflector waveguide array for two-dimensional beam steering}, journal = {Japanese Journal of Applied Physics}, year = 2014, } @article{CTT100694092, author = {A. Matsutani and K. Nishioka and M. Sato and D. Shoji and D. Kobayashi and T. Isobe and A. Nakajima and T. Tatsuma and S. Matsushita}, title = {Angled Etching of (001) Rutile Nb-TiO2 Substrate by SF6 Based Capacitive Coupled Plasma}, journal = {}, year = 2014, } @article{CTT100666933, author = {Ayumi Fuchida and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {Low-polarization dependent thermo-optic phase-shift in slow light Bragg reflector waveguide for beam steering and optical switching}, journal = {Jpn. J. Appl. Phys.}, year = 2013, } @article{CTT100666932, author = {Masanori Nakahama and Hayato Sano and Shunya Inoue and Takahiro Sakaguchi and Akihiro Matsutani and Moustafa Ahmed and Ahmed Bakry and Fumio Koyama}, title = {Wavelength tuning and controlled temperature dependence in vertical-cavity surface-emitting lasers with a thermally and electrostatically actuated cantilever structure}, journal = {Jpn. J. Appl. Phys.}, year = 2013, } @article{CTT100665118, author = {Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Compact beam deflector based on slow-light Bragg reflector waveguide monolithically integrated with VCSEL}, journal = {IEICE Electronics Express}, year = 2013, } @article{CTT100665433, author = {Tomohiro Akutsu and Takuya Usio and Akihiro Matsutani and Tomoyuki Miyamoto}, title = {Fabrication and characterization of VCSELs applying quantum well intermixing using spin-on-glass}, journal = {Physica Status Solidi}, year = 2013, } @article{CTT100665117, author = {Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Compact Slow-Light Electro-Absorption Modulator Laterally Integrated with 980nm Vertical-Cavity Surface-Emitting Laser}, journal = {Applied Physics Express, APEX}, year = 2013, } @article{CTT100664413, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Low polarization dependent beam deflector based on Bragg reflector waveguide for C-band wavelength demultiplexing}, journal = {J.Appl.Phys}, year = 2013, } @article{CTT100659695, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {35-μm Bragg Reflector Waveguide Modulator for High-Speed and Energy-Saving Operation}, journal = {IEEE Photonics Technology Letters}, year = 2013, } @article{CTT100660008, author = {Akihiro Matsutani}, title = {Observation of Motion of Bowed Strings and Resonant Strings in Violin Performances}, journal = {Japanese Journal of Applied Physics}, year = 2013, } @article{CTT100664019, author = {Masanori Nakahama and Hayato Sano and Shunya Inoue and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Tuning Characteristics of Monolithic MEMS VCSELs with Oxide Anti-reflection Layer}, journal = {IEEE Photonics Technology letters}, year = 2013, } @article{CTT100679625, author = {Akihiro Matsutani and Kosuke Tahara and Takayuki Iwasaki and Mutsuko Hatano}, title = {Fluorination of Graphene by Reactive Ion Etching System Using Ar/F2 Plasma}, journal = {Jpn. J. Appl. Phys.}, year = 2013, } @article{CTT100652976, author = {Akihiro matsutani and Ayako Takada}, title = {Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching Process}, journal = {Japanese Journal of Applied Physics}, year = 2013, } @article{CTT100647976, author = {Xiaodong Gu and Syouki Shimizu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Low-voltage electro-absorption optical modulator based on slow-light Bragg reflector waveguide}, journal = {Appl. Phys. Lett.}, year = 2013, } @article{CTT100646182, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Ultra-high channel-count wavelength demultiplexer based on a Bragg reflector waveguide with large angular dispersion}, journal = {OPTICS EXPRESS}, year = 2012, } @article{CTT100644704, author = {X. Gu and T. Shimada and A. Matsutani and F. Koyama}, title = {Miniature Non-mechanical Beam Deflector Based on Bragg Reflector Waveguide with a Number of Resolution-points Larger than 1,000}, journal = {IEEE Photon. J}, year = 2012, } @article{CTT100644945, author = {Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Athermal and tunable operations of 850nm vertical cavity surface emitting lasers with thermally actuated T-shape membrane structure}, journal = {Appl. Phys. Lett.}, year = 2012, } @article{CTT100640882, author = {Akihiro Matsutani and Ayako Takada}, title = {Microfabrication of Si and GaAs by Plasma Etching Process Using Bacterial Cells as an Etching Mask Material}, journal = {Japanese Journal of Applied Physics}, year = 2012, } @article{CTT100672802, author = {Akihiro Matsutani and Mikiro Hayashi and Yasushi Morii and Kunio Nishioka and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {SF6-Based Deep Reactive Ion Etching of (001) Rutile TiO2 Substrate for Photonic Crystal Structure with Wide Complete Photonic Band Gap}, journal = {Japanese Journal of Applied Physics}, year = 2012, } @article{CTT100641302, author = {Akihiro Matsutani and Yuuki Hashidume and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Microfabrication of Si-Based High-Index-Contrast-Grating Structure by Thermal Nanoimprint Lithography and Cl2/Xe-Inductively Coupled Plasma Etching}, journal = {Jpn. J. Appl. Phys.}, year = 2012, } @article{CTT100635639, author = {淵田 歩 and 松谷 晃宏 and 小山 二三夫}, title = {スローライトを利用した全反射型光スイッチ}, journal = {電子情報通信学会論文誌 C}, year = 2012, } @article{CTT100635632, author = {Masanori Nakahama and Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Giant wavelength-temperature dependence of a micro-machined VCSEL with a thermally actuated cantilever structure}, journal = {Jpn. J. Appl. Phys.}, year = 2012, } @article{CTT100635631, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Fabrication and Characterization of Bragg Reflector Slow Light Waveguide with Oxide Lateral Confinement}, journal = {Jpn. J. Appl. Phys.}, year = 2012, } @article{CTT100635623, author = {Masanori Nakahama and Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Electro-Thermal Tuning of MEMS VCSEL with Giant Wavelength-temperature dependence}, journal = {IEICE Electronics Express}, year = 2012, } @article{CTT100635627, author = {Xiaodong Gu and Toshikazu Shimada and Ayumi Fuchida and Akihiro Matsutani and Akihiro Imamura and Fumio Koyama}, title = {Ultra-compact beam-steering device based on Bragg reflector waveguide amplifier with number of resolution points over 100}, journal = {Electron. Lett.}, year = 2012, } @article{CTT100634004, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Trimming of Micro-Machined VCSELs}, journal = {IEICE Trans. Electron.}, year = 2012, } @article{CTT100633301, author = {Xiaodong Gu and Toshikazu Shimada and Ayumi Fuchida and Akihiro Matsutani and Akihiro Imamura and Fumio Koyama}, title = {Electro-Thermal Beam Steering Using Bragg Reflector Waveguide Amplifier}, journal = {Jpn. J. Appl. Phys.}, year = 2012, } @article{CTT100632176, author = {Xiaodong Gu and Toshikazu Shimada and Ayumi Fuchida and Akihiro Matsutani and Akihiro Imamura and Fumio Koyama}, title = {Beam steering in GalnAs/GaAs slow-light Bragg reflector waveguide amplifier}, journal = {Appl. Phys. Lett.}, year = 2011, } @article{CTT100625916, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Slow-light total-internal-reflection switch with bending angle of 30 deg}, journal = {Optics Letters}, year = 2011, } @article{CTT100625993, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Multiplexing of Multi-Wavelength 1060-nm-Band GaInAs/GaAs Vertical Cavity Surface Emitting Laser Array Using Tapered Hollow Waveguide}, journal = {Appl. Phys. Exp.}, year = 2011, } @article{CTT100641301, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Inductively Coupled Plasma Etching of Silicon Using Solid Iodine as an Etching Gas Source}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @article{CTT100625181, author = {Akihiro Matsutani and Ayako Takada}, title = {High-frequency single-cell isolation of bacteria using microenclosure array}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @article{CTT100641300, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Reactive Ion Etching of Si Using Ar/F2 Plasma}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @article{CTT100589317, author = {Padullaparthi Babu Dayal and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications}, journal = {Appl. Phys. Exp.}, year = 2009, } @article{CTT100585347, author = {Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure}, journal = {Appl. Phys. Exp}, year = 2009, } @article{CTT100672803, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Smooth and Vertical Profile Dry Etching of Si Using XeF2 Plasma}, journal = {Japanese Journal of Applied Physics}, year = 2009, } @article{CTT100641299, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF2}, journal = {Jpn. J. Appl. Phys.}, year = 2008, } @article{CTT100554698, author = {Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi}, title = {Sub-harmonic mode-locking of VCSEL with a concave external mirror}, journal = {IEICE Electronics Express}, year = 2008, } @article{CTT100641298, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Characterization of H2O-inductively coupled plasma for dry etching}, journal = {Journal of Physics: Conference Series}, year = 2008, } @article{CTT100555246, author = {Wiganes Janto* and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations}, journal = {OPTICAL REVIEW}, year = 2007, } @article{CTT100641297, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Solid Source Dry Etching Process for GaAs and InP}, journal = {Jpn. J. Appl. Phys.}, year = 2006, } @article{CTT100508468, author = {Wiganes Janto and Akihiro Matsutani and Fumio Koyama}, title = {Design, Fabrication, and Characterization of Tunable Micromachined Filter with Double-Cavity Structure}, journal = {Jpn. J. Appl. Phys.}, year = 2006, } @article{CTT100507287, author = {Kazutaka Takeda and Tomoyuki Miyamoto and Takashi Kondo and Yasuhiro Uchiyama and Naoto Kitabayashi and Takeshi Uchida and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength extension effect on lasing characteristics of highly-strained GaInAs/GaAs vertical-cavity surface-emitting lasers with cavity detuning}, journal = {Jpn. J. Appl. Phys.}, year = 2006, } @article{CTT100508358, author = {Yasuki Sakurai and Akihiro Matsutani and Fumio Koyama}, title = {Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation}, journal = {Appl. Phys. Lett.}, year = 2006, } @article{CTT100508465, author = {Yasuki Sakurai and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide}, journal = {Jpn. J. Appl. Phys}, year = 2006, } @article{CTT100570919, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Iodine solid source inductively coupled plasma etching of InP}, journal = {Jpn. J. Appl. Phys.}, year = 2005, } @article{CTT100672892, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Iodine Solid Source Inductively Coupled Plasma Etching of InP}, journal = {Japanese Journal of Applied Physics}, year = 2005, } @article{CTT100672891, author = {Akihiro Matsutani}, title = {Relationship Between Type of Bow Holding and Propagation of Performed Sound in Small Concert Hall in Violin Performances}, journal = {Japanese Journal of Applied Physics}, year = 2005, } @article{CTT100570913, author = {Yasuki Sakurai and Yasushi Yokota and Akihiro Matsutani and Fumio Koyama}, title = {Tunable hollow waveguide Bragg grating with low temperature dependence}, journal = {Appl. Phys. Lett.}, year = 2005, } @article{CTT100646532, author = {Yasuhiro Uchiyama and Takashi Kondo and Kuzutaka Takeda and Akihiro Matsutani and Takeshi Uchida and Tomoyuki Miyamoto and Fumio Koyama}, title = {1.2μm band GaInAs/GaAs high-density multiple-wavelength vertical cavity surface emitting laser array}, journal = {Jpn. J. Appl. Phys.}, year = 2005, } @article{CTT100646361, author = {Yasuhiro Uchiyama and Takashi Kondo and Kazutaka Takeda and Akihiro Matsutani and Takeshi Uchida and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Thermal cross-talk evaluation of densely integrated vertical cavity surface emitting laser array}, journal = {IEICE Electronics Express}, year = 2004, } @article{CTT100641182, author = {Akihiro Matsutani and Hideo Ohtsuki and Ken Ohashi and Tomonori Yokoyama and Hirokazu Yamakage and FUMIO KOYAMA}, title = {Vertical and Smooth Microfabrication of InP Using Simple High-Density Plasma System with SmCo Ring Magnet}, journal = {Jpn. J. Appl. Phys.}, year = 2004, } @article{CTT100639923, author = {Akihiro Matsutani}, title = {Comparison between Modern Violin Bridge and Baroque Violin Bridge by Photoelastic Observation and Frequency Analysis}, journal = {Japanese Journal of Applied Physics}, year = 2004, } @article{CTT100646384, author = {Takashi Kondo and Masakazu Arai and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1 μm GaInAs/GaAs vertical cavity surface emitting laser}, journal = {Electron. Lett.}, year = 2004, } @article{CTT100641178, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Low-Temperature Dry Etching of InP by Inductively Coupled Plasma Using HI/Cl2}, journal = {Jpn. J. Appl. Phys.}, year = 2003, } @article{CTT100641177, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {Cl2-based Inductively Coupled Plasma Etching of InP Using Internal Antenna}, journal = {Jpn. J. Appl. Phys.}, year = 2003, } @article{CTT100502634, author = {Masakazu Arai and Takashi Kondo and Akihiro Onomura and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with extended wavelength span}, journal = {IEEE J. Select. Top. Quantum Electron.}, year = 2003, } @article{CTT100639922, author = {Akihiro Matsutani}, title = {Study of Relationship between Performed Tones and Force of Bow Holding using Silent Violin}, journal = {Japanese Journal of Applied Physics}, year = 2003, } @article{CTT100692074, author = {Akihiro Onomura and Masakazu Arai and Takashi Kondo and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Densely integrated multiple-wavelength vertical-cavity surface-emitting laser array}, journal = {Jpn. J. Appl. Phys.}, year = 2003, } @article{CTT100641117, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA}, title = {In situ Observation of Etching Profile in Inductively Coupled Plasma Etching of GaAs and InP using Long Distance Microscope}, journal = {Jpn. J. Appl. Phys.}, year = 2003, } @article{CTT100639921, author = {Akihiro Matsutani}, title = {Study on Bridge of Violin by Photoelastic Observation}, journal = {Japanese Journal of Applied Physics}, year = 2002, } @article{CTT100645934, author = {Masakazu Arai and Takashi Kondo and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Growth of highly strained GaInAs-GaAs quantum wells on patterned substrate and its application for multiple-wavelength vertical-cavity surface-emitting laser array}, journal = {IEEE J. Select. Top. Quantum Electron.}, year = 2002, } @article{CTT100641116, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA and Kenichi Iga}, title = {Measurement of Plasma Density for Control of Etching Profile in Inductively Coupled Plasma Etching of InP}, journal = {Jpn. J. Appl. Phys.}, year = 2002, } @article{CTT100645937, author = {Takashi Kondo and Masakazu Arai and Munechika Azuchi and Takeshi Uchida and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Low threshold current density operation of 1.16 μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate}, journal = {Jpn. J. Appl. Phys.}, year = 2002, } @article{CTT100639920, author = {Akihiro Matsutani}, title = {Study of Rosin Particles on Bow Hair in Violin Performance}, journal = {Japanese Journal of Applied Physics}, year = 2002, } @article{CTT100639919, author = {Akihiro Matsutani}, title = {Measurement of Force of Bow Holding and Contact Force between Bow Hair and String in Violin Playing by Pressure Measuring Film}, journal = {Japanese Journal of Applied Physics}, year = 2001, } @article{CTT100459830, author = {Toru Miura and Fumio Koyama and Yasuhiko Aoki and Akihiro Matsutani and Kenichi Iga}, title = {Hollow optical waveguide for temperature-insensitive photonic integrated circuits}, journal = {Jpn. J. Appl. Phys.}, year = 2001, } @article{CTT100459831, author = {Masakazu Arai and Nobuhiko Nishiyama and Munechika Azuchi and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Monolithic formation of metal organic chemical vapor deposition grown multi-wavelength vertical cavities with highly strained GaInAs/GaAs quantum wells on GaAs (311)B}, journal = {Jpn. J. Appl. Phys}, year = 2001, } @article{CTT100565961, author = {Nobuhiko Nishiyama and Masakazu Arai and Satoshi Shinada and Munechika Azuchi and Akihiro Matsutani and Tomoyuki Miyamoto and Fumio Koyama and Kenichi Iga}, title = {1.12μm polarization controlled highly strained GaInAs vertical-cavity surface-emitting lasers on GaAs (311)B by metal organic chemical vapor deposition}, journal = {Jpn. J. Appl. Phys.}, year = 2001, } @article{CTT100640957, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA and Kenichi Iga}, title = {Mass Effect of Etching Gases in Vertical and Smooth Dry Etching of InP}, journal = {Jpn. J. Appl. Phys.}, year = 2001, } @article{CTT100460865, author = {Masakazu Arai and Nobuhiko Nishiyama and Munechika Azuchi and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Monolithic formation of metal organic chemical vapor deposition grown multi-wavelength vertical cavities with highly strained GaInAs/GaAs quantum wells on GaAs (311)B}, journal = {Jpn. J. Appl. Phys.}, year = 2001, } @article{CTT100603581, author = {Shunichi Sato and Nobuhiko Nishiyama and Tomoyuki Miyamoto and Takashi Takahashi and Naoto Jikutani and Masakazu Arai and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Continuous wave operation of 1.26μm GaInNAs/GaAs vertical-cavity surface-emitting lasers grown by metalorganic chemical vapour deposition}, journal = {Electron. Lett.}, year = 2000, } @article{CTT100640956, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA and Kenichi Iga}, title = {Emission Spectrochemical Analysis in Dry Etching Process of InP by Cl2 Inductively Coupled Plasma}, journal = {Jpn. J. Appl. Phys.}, year = 2000, } @article{CTT100565988, author = {Masakazu Arai and Nobuhiko Nishiyama and Satoshi Shinada and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Highly stable single polarization operation of GaInAs/GaAs vertical-cavity surface-emitting laser on GaAs (311)B substrate under high-speed modulation}, journal = {Jpn. J. Appl. Phys.}, year = 2000, } @article{CTT100447739, author = {Masakazu Arai and Nobuhiko Nishiyama and Satoshi Shinada and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Vertical-cavity surface-emitting laser array on GaAs(311)B substrate exhibiting single-transverse mode and stable-polarization operation}, journal = {Jpn. J. Appl. Phys.}, year = 2000, } @article{CTT100640892, author = {Akihiro Matsutani and Hideo Ohtsuki and FUMIO KOYAMA and Kenichi Iga}, title = {Plasma Diagnostics in Inductively Coupled Plasma Etching Using Cl2/Xe}, journal = {Jpn. J. Appl. Phys.}, year = 2000, } @article{CTT100476985, author = {FUMIO KOYAMA and Dietmar Schlenker and Tomoyuki Miyamoto and Zhibiao Chen and Akihiro Matsutani and Takahiro Sakaguchi and Kenichi Iga}, title = {Data transmission over single-mode fiber by using 1.2μm uncooled GaInAs-GaAs laser for Gbit/s local area network}, journal = {IEEE Photon. Technol. Lett.}, year = 2000, } @article{CTT100565989, author = {Takeru Amano and Fumio Koyama and Noriyoshi Furukawa and Nobuhiko Nishiyama and Akihiro Matsutani and Kenichi Iga}, title = {Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability}, journal = {Electron. Lett.}, year = 2000, } @article{CTT100476932, author = {Toshihiko Baba and Kyoji Inoshita and Hiroko Tanaka and Jun Yonekura and Maiko Ariga and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA and Kenichi Iga}, title = {Strong enhancement of light extraction efficiency in GaInAsP 2-D-arranged microcolumns}, journal = {IEEE J. Lightwave Tech.}, year = 1999, } @article{CTT100640890, author = {Akihiro Matsutani and FUMIO KOYAMA and Hideo Ohtsuki and Kenichi Iga}, title = {Vertical and Smooth Etching of InP by Cl2/Xe Inductively Coupled Plasma}, journal = {Jpn. J. Appl. Phys.}, year = 1999, } @article{CTT100476927, author = {FUMIO KOYAMA and Dietmar Schlenker and Tomoyuki Miyamoto and Zhibiao Chen and Akihiro Matsutani and Takahiro Sakaguchi and Kenichi Iga}, title = {1.2μm highly strained GaInAs/GaAs quantum well lasers for singlemode fibre datalink}, journal = {Electron. Lett.}, year = 1999, } @article{CTT100640887, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Low Bias Voltage Dry Etching of InP by Inductively Coupled Plasma Using SiCl4/Ar}, journal = {Jpn. J. Appl. Phys.}, year = 1998, } @article{CTT100640192, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {C60 Resist Mask of Electron Beam Lithography for Chlorine-Based Reactive Ion Beam Etching}, journal = {Jpn. J. Appl. Phys.}, year = 1998, } @article{CTT100640190, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Plasma Characterization in Chlorine-Based Reactive Ion Beam Etching and Chemically Assisted Ion Beam Etching}, journal = {Jpn. J. Appl. Phys.}, year = 1998, } @article{CTT100640189, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Surface Temperature Increase in Reactive Ion Beam Etch and Improvement of Profiles by Multistep Etching}, journal = {Jpn. J. Appl. Phys.}, year = 1995, } @article{CTT100640187, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Three-dimensional electron probe roughness analysis of InP sidewalls processed by reactive ion beam etching}, journal = {Applied Physics Letters}, year = 1995, } @article{CTT100640185, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Measurement of Sidewall Roughness of InP Etched by Reactive Ion Beam Etching}, journal = {Jpn. J. Appl. Phys.}, year = 1994, } @article{CTT100639983, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Characterization of Sidewall Damage Induced by Reactive Ion-Beam Etching}, journal = {Jpn. J. Appl. Phys.}, year = 1992, } @article{CTT100639982, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Reactive Ion Beam Etch of GaInAsP/InP Multilayer and Removal of Damaged Layer by Two-Step Etch}, journal = {Jpn. J. Appl. Phys.}, year = 1991, } @article{CTT100639981, author = {Akihiro Matsutani and FUMIO KOYAMA and Kenichi Iga}, title = {Microfabrication of Dielectric Multilayer Reflector by Reactive Ion Etching and Characterization of Induced Wafer Damage}, journal = {Jpn. J. Appl. Phys.}, year = 1991, } @inproceedings{CTT100911048, author = {佐藤美那 and 遠西美重 and 松谷晃宏}, title = {イオンビーム照射によりアモルファス化したSi表面のXRR測定}, booktitle = {}, year = 2024, } @inproceedings{CTT100911318, author = {藤本美穂 and 松谷晃宏}, title = {裏面露光によるサブミクロン直径のSU-8円柱構造の作製と蛍光観察}, booktitle = {}, year = 2024, } @inproceedings{CTT100911026, author = {松谷晃宏 and 遠西美重 and 吉田 桜子}, title = {OsコーティングによるSU-8膜の梁構造の機械的強度の向上}, booktitle = {}, year = 2024, } @inproceedings{CTT100911027, author = {松谷晃宏}, title = {擦弦によるヴィオラA弦の演奏音の周波数応答の測定}, booktitle = {}, year = 2024, } @inproceedings{CTT100911001, author = {遠西美重 and 松下祥子 and 松谷晃宏}, title = {Deep-RIEで作製したブラックGeの微細構造側壁のスキャロップ深さと反射率との関係}, booktitle = {}, year = 2024, } @inproceedings{CTT100908143, author = {Kazuki Shishikura and Hiroyuki Nabae and Akihiro Matsutani and Mina Sato and Koichi Suzumori}, title = {Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering}, booktitle = {Proceedings of the 2024 IEEE/SICE International Symposium on System Integration}, year = 2024, } @inproceedings{CTT100906526, author = {Mie Tohnishi and Sachiko Matsushita and Akihiro Matsutani}, title = {Fabrication of nonreflective black germanium in near-infrared region up to a wavelength of 2.5 µm by SF6+O2/C4F8-plasma-based deep reactive ion etching}, booktitle = {Proceedings of International Symposium on Dry Process}, year = 2023, } @inproceedings{CTT100903972, author = {松谷晃宏}, title = {Pizzicato によるヴィオラA 弦の演奏音の周波数応答の測定}, booktitle = {}, year = 2023, } @inproceedings{CTT100903971, author = {遠西美重 and 松谷晃宏 and 松下祥子}, title = {Deep-RIE により作製したブラックGe 微細構造側壁のEDX 分析}, booktitle = {}, year = 2023, } @inproceedings{CTT100903970, author = {松谷晃宏 and 遠西美重}, title = {デジタルカメラと回折格子によるSi のDeep-RIE プラズマの発光分光測定と EDX による高アスペクト比(HAR)エッチング側壁の分析の比較}, booktitle = {}, year = 2023, } @inproceedings{CTT100891401, author = {松谷晃宏}, title = {V字振り子を用いたインパクト加振によるヴァイオリンの周波数応答の計測}, booktitle = {日本音響学会音楽音響研究会資料}, year = 2023, } @inproceedings{CTT100887411, author = {遠西 美重 and 松谷晃宏 and 生方 俊 and 松下祥子}, title = {固体ソースH₂Oプラズマ処理したポリイミド樹脂の表面のXPS分析}, booktitle = {}, year = 2023, } @inproceedings{CTT100891318, author = {佐藤 美那 and 遠西美重 and 松谷晃宏}, title = {Ar+ビーム照射により作製したKOHエッチング用SiマスクのXPS解析}, booktitle = {}, year = 2023, } @inproceedings{CTT100887403, author = {松谷晃宏}, title = {ヴァイオリンの周波数応答の測定におけるタッピング位置依存性}, booktitle = {}, year = 2023, } @inproceedings{CTT100887404, author = {藤本美穂 and 松谷晃宏}, title = {酸素プラズマ照射した電子線レジストSML表面のXPS分析}, booktitle = {}, year = 2023, } @inproceedings{CTT100891231, author = {持田 匠 and 土方 亘 and 松谷 晃宏}, title = {骨格筋の不完全強縮を利用した体内エナジーハーベスティングデバイスの開発}, booktitle = {}, year = 2022, } @inproceedings{CTT100882365, author = {松谷晃宏 and 遠西美重 and 藤本美穂 and 松下祥子}, title = {ポジ型電子線レジストSML1000をマスクとして用いたSF6-RIEによるGeのドライエッチング}, booktitle = {}, year = 2022, } @inproceedings{CTT100882364, author = {松谷晃宏}, title = {V字振り子を用いたヴィオラの周波数応答の測定}, booktitle = {}, year = 2022, } @inproceedings{CTT100869307, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の重心と音色に関する測定}, booktitle = {}, year = 2022, } @inproceedings{CTT100867986, author = {藤本美穂 and 松谷晃宏}, title = {酸素プラズマ照射によるポジ型電子線レジストSMLの増感効果}, booktitle = {}, year = 2022, } @inproceedings{CTT100867923, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の重心位置の違いによる音色の変化の測定}, booktitle = {}, year = 2022, } @inproceedings{CTT100867900, author = {佐藤美那 and 遠西美重 and 松谷晃宏}, title = {Ar+ビーム照射によるSiアモルファスマスクを利用したKOHエッチングによる単一細胞分離プレートとマイクロ流路の作製}, booktitle = {}, year = 2022, } @inproceedings{CTT100867899, author = {遠西 美重 and 佐藤美那 and 松下祥子 and 松谷晃宏}, title = {ポリイミドシート上へスパッタ成膜したCr/Ge電極の固体ソースH₂Oプラズマを用いた前処理による低抵抗化}, booktitle = {}, year = 2022, } @inproceedings{CTT100861975, author = {津久井遼 and 木野勝 and 山本広大 and 栗田光樹夫 and 松谷晃宏}, title = {点回折干渉計方式を用いた補償光学用波面センサの開発}, booktitle = {}, year = 2021, } @inproceedings{CTT100864857, author = {持田匠 and 土方亘 and 松谷 晃宏}, title = {電気刺激による骨格筋の不完全強縮を利用した体内エナジーハーベスティングデバイスの開発}, booktitle = {2021年度精密工学会秋季大会学術講演会講演論文集}, year = 2021, } @inproceedings{CTT100861974, author = {松谷晃宏}, title = {ヴァイオリン演奏における顎当て装着時の振動特性}, booktitle = {}, year = 2021, } @inproceedings{CTT100862005, author = {遠西 美重 and 佐藤美那 and 松下祥子 and 松谷晃宏}, title = {固体ソースH₂O プラズマを用いて表面処理したポリイミドテープ上のCr/Cu電極の折り曲げ耐久性}, booktitle = {}, year = 2021, } @inproceedings{CTT100861980, author = {佐藤美那 and 遠西美重 and 松谷晃宏}, title = {エッチングマスクとしてAr+イオンビームを照射した 微細マスクパターンを用いたKOH エッチングによるSi の微細加工}, booktitle = {}, year = 2021, } @inproceedings{CTT100861973, author = {松谷晃宏}, title = {ヴァイオリン演奏における顎あてと音響特性の関係}, booktitle = {}, year = 2021, } @inproceedings{CTT100861972, author = {松谷晃宏}, title = {ヴァイオリンの裏板の光学および顕微鏡観察}, booktitle = {}, year = 2021, } @inproceedings{CTT100846099, author = {遠西 美重 and 松谷 晃宏}, title = {固体ソースH₂O プラズマ処理したポジ型フォトレジストの表面粗さの観察}, booktitle = {}, year = 2021, } @inproceedings{CTT100845800, author = {松谷晃宏}, title = {ヴァイオリンの裏板の観察}, booktitle = {}, year = 2021, } @inproceedings{CTT100845177, author = {佐藤美那 and 松谷晃宏 and 津久井遼 and 木野勝 and 山本広大 and 栗田光樹夫 and 長田 哲也}, title = {ドライエッチングにより作製したメンブレン構造のNbO薄膜の顕微分光透過率測定とEDX分析}, booktitle = {}, year = 2021, } @inproceedings{CTT100843196, author = {津久井 遼 and 木野 勝 and 山本 広大 and 栗田 光樹夫 and 松谷晃宏}, title = {せいめい望遠鏡での極限補償光学に向けた波面センサの開発}, booktitle = {}, year = 2021, } @inproceedings{CTT100840200, author = {松谷晃宏}, title = {共用クリーンルームにおける研究支援と微細加工プロセス技術の開発}, booktitle = {}, year = 2020, } @inproceedings{CTT100837919, author = {新井 真俊 and 松谷 晃宏 and 吉田 和弘 and 金 俊完}, title = {深掘り反応性イオンエッチング(DRIE)における開口パターンの高アスペクト比形状への影響}, booktitle = {山梨講演会 講演論文集}, year = 2020, } @inproceedings{CTT100846100, author = {遠西 美重 and 松谷 晃宏}, title = {固体ソースH₂O プラズマ処理によるガラスとPDMSの接合表面処理}, booktitle = {}, year = 2020, } @inproceedings{CTT100819617, author = {松谷晃宏}, title = {擦弦楽器に用いる弓毛のヤング率の測定}, booktitle = {}, year = 2020, } @inproceedings{CTT100819614, author = {松谷晃宏}, title = {ヴァイオリン演奏用の弓毛に関する超微小押し込み硬さ試験機によるヤング率測定}, booktitle = {}, year = 2020, } @inproceedings{CTT100821684, author = {遠西 美重 and 松谷 晃宏}, title = {固体ソースH₂O プラズマ処理によるPDMS とガラスの接合}, booktitle = {}, year = 2020, } @inproceedings{CTT100821023, author = {藤本美穂 and 松谷晃宏 and 栁田保子}, title = {微細加工した温度応答性感光樹脂薄膜における巨視的相転移の観察}, booktitle = {}, year = 2020, } @inproceedings{CTT100819637, author = {松谷晃宏 and 栁田保子}, title = {眼瞼圧推定のための渦電流式変位センサを用いた測定方法の提案}, booktitle = {}, year = 2020, } @inproceedings{CTT100819615, author = {松谷晃宏}, title = {スンプ法によるセルロイドマイクロ時計皿アレイ細胞集積チップの製作}, booktitle = {}, year = 2020, } @inproceedings{CTT100838974, author = {許 在旭 and 志村 京亮 and 松谷 晃宏 and 小山 二三夫}, title = {多点接触構造を有する長尺VCSEL 増幅器}, booktitle = {第67回応用物理学会春季学術講演会 講演予稿集}, year = 2020, } @inproceedings{CTT100816299, author = {Jeon Sungha and 宮田 啓夢 and 榛葉 健太 and 宮本 義孝 and 松谷 晃宏 and 八木 透}, title = {基板底面形状を工夫したマイクロチャネルによる神経突起の伸長方向制御}, booktitle = {}, year = 2019, } @inproceedings{CTT100808345, author = {Akihiro Matsutani and Ayako Takada}, title = {Optical Characterization of Concave Micromirror Array for Microbial Cell Trapping Fabricated by Laser Lithography and SUMP Method}, booktitle = {}, year = 2019, } @inproceedings{CTT100808348, author = {松谷晃宏 and 佐藤美那 and 遠西美重 and 藤本 美穂 and 平野 明子 and 西沢望 and 進士忠彦 and 初澤毅}, title = {東京工業大学におけるクリーンルーム統合共用化による 組織的研究支援の推進}, booktitle = {研究・イノベーション学会第34回年次学術大会講演要旨集}, year = 2019, } @inproceedings{CTT100831025, author = {鷹箸 雅司 and 志村 京亮 and 顧 暁冬 and 中濱 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {カットオフ波長制御構造を用いたVCSEL と光偏光器の横方向集積}, booktitle = {第80回応用物理学会秋季学術講演会 講演予稿集}, year = 2019, } @inproceedings{CTT100806725, author = {Jeon Sungha and 宮田 啓夢 and 榛葉 健太 and 宮本 義孝 and 松谷 晃宏 and 八木 透}, title = {神経ネットワークの構成における 神経突起の伸長制御のためのマイクロチャネルの開発}, booktitle = {}, year = 2019, } @inproceedings{CTT100806744, author = {松谷晃宏}, title = {ヴァイオリン演奏に使用される弓毛の引張試験}, booktitle = {}, year = 2019, } @inproceedings{CTT100806745, author = {松谷晃宏 and 高田綾子}, title = {スンプ法とレーザー描画により製作したマイクロ凹面鏡の集光特性}, booktitle = {}, year = 2019, } @inproceedings{CTT100830504, author = {志村 京亮 and 鷹箸 雅司 and 許 在旭 and 顧 暁冬 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {980nm 帯ヒータ駆動型の面発光レーザ集積ビームスキャナ}, booktitle = {第80回応用物理学会秋季学術講演会 講演予稿集 (2019 北海道大学 札幌キャンパス)}, year = 2019, } @inproceedings{CTT100808349, author = {松谷晃宏}, title = {ヴァイオリンなどの擦弦楽器の弓に使われる弓毛の顕微鏡観察}, booktitle = {日本音響学会音楽音響研究会資料}, year = 2019, } @inproceedings{CTT100799503, author = {松谷晃宏}, title = {ヴァイオリン演奏における擦弦時の弓の振動測定と弓の傾斜と擦弦速度による音色変化の観察}, booktitle = {日本音響学会音楽音響研究会資料}, year = 2019, } @inproceedings{CTT100799891, author = {Mizuki Morinaga and Xiaodong Gu and Keisuke Shimura and Akihiro Matsutani and Fumio Koyama}, title = {Compact Dot Projector based on Folded Path VCSEL Amplifier for Structured Light Sensing}, booktitle = {}, year = 2019, } @inproceedings{CTT100794814, author = {竹島 利彦 and 松谷 晃宏 and 佐藤 美那 and 長谷部 浩一 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {局所光熱変換部のin-situ温度測定の試み}, booktitle = {}, year = 2019, } @inproceedings{CTT100798249, author = {鷹箸 雅司 and 志村 京亮 and 顧 暁冬 and 中濱 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {カットオフ構造を用いた VCSEL と VCSEL 増幅器の横方向集積}, booktitle = {}, year = 2019, } @inproceedings{CTT100798254, author = {冨樫 良介 and 顧 暁冬 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {Cバンドにおける損失補償特性を持つInP系VCSEL分波器}, booktitle = {}, year = 2019, } @inproceedings{CTT100792944, author = {阿川 裕晃 and 松谷 晃宏 and 長谷部 浩一 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {熱プラズモニックマランゴニ対流を用いたマイクロ混合流の形成}, booktitle = {}, year = 2019, } @inproceedings{CTT100802422, author = {許 在旭 and 志村 京亮 and 顧 暁冬 and 松谷 晃宏 and 小山 二三夫}, title = {高出力面発光レーザ増幅器のビーム品質改善の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100802424, author = {森長 瑞 and 顧 暁冬 and 志村 京亮 and 松谷 晃宏 and 小山 二三夫}, title = {3D センシングのためのVCSEL 増幅器によるドットパターン生成}, booktitle = {}, year = 2019, } @inproceedings{CTT100794145, author = {長谷部浩一 and 佐藤美那 and 松谷晃宏 and 竹島利彦 and 磯部敏宏 and 中島章 and 松下祥子}, title = {カソード加熱型RIE装置により窒素プラズマ処理したTi薄膜およびバルクTiO2の透過率測定}, booktitle = {}, year = 2019, } @inproceedings{CTT100794147, author = {松谷晃宏}, title = {ヴァイオリン演奏における擦弦位置及び弓の傾斜と音色の関係について}, booktitle = {}, year = 2019, } @inproceedings{CTT100798248, author = {志村 京亮 and 鷹箸 雅司 and 許 在旭 and 顧 暁冬 and 中濵 正統 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {カットオフ波長離調構造によるビームスキャナ集積単一モード面発光レーザ}, booktitle = {}, year = 2019, } @inproceedings{CTT100799889, author = {Keisuke Kondo and Xiaodong Gu and Zeuku Ho and Akihiro Matsutani and Fumio Koyama}, title = {Two-Dimensional Beam Steering Device Based on VCSEL Slow-Light Waveguide Array with Amplifier Function}, booktitle = {}, year = 2019, } @inproceedings{CTT100794146, author = {松谷晃宏 and 佐藤美那 and 長谷部浩一 and 高田綾子}, title = {Siマイクロ凹面鏡とケーラー照明光による酵母細胞の捕獲}, booktitle = {}, year = 2019, } @inproceedings{CTT100778335, author = {Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Ayako Takada}, title = {Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching}, booktitle = {}, year = 2018, } @inproceedings{CTT100793931, author = {Xiaodong Gu and Ryosuke Togashi and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {First Demonstration of C-band Wavelength Demultiplexer Based on a Bragg Reflector Waveguide Amplifier Using InP Material}, booktitle = {}, year = 2018, } @inproceedings{CTT100793083, author = {Zeuku Ho and Keisuke Shimura and Keisuke Kondo and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {High Resolution Active Beam Scanner Based on VCSEL Amplifier}, booktitle = {}, year = 2018, } @inproceedings{CTT100772048, author = {冨樫良介 and Xiaodong Gu and 松谷晃宏 and 坂口孝浩 and 清水 淳一 and 小山二三夫}, title = {InP系ブラッグ反射鏡導波路を用いた1.5 μm帯スローライト分波器}, booktitle = {}, year = 2018, } @inproceedings{CTT100771450, author = {Zeuku Ho and Junichiro Hayakawa and Keisuke Shimura and Keisuke Kondo and Xiaodong Gu and Akihiro Matsutani and Akemi Murakami and Fumio Koyama}, title = {High Power and High Beam Quality VCSEL Amplifier}, booktitle = {}, year = 2018, } @inproceedings{CTT100771484, author = {Shunya Inoue and Shun Nishimura and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {High Speed Wavelength Tuning of MEMS VCSEL with Advanced Voltage Drive Technique}, booktitle = {}, year = 2018, } @inproceedings{CTT100771485, author = {Mizuki Morinaga and Xiaodong Gu and Keisuke Shimura and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {VCSEL Amplifier Dot Projector with Folded-Path Slow-light Waveguide for 3D Depth Sensing}, booktitle = {}, year = 2018, } @inproceedings{CTT100798276, author = {JEON SUNGHA and 榛葉 健太 and 宮本 義孝 and 松谷 晃宏 and 八木 透}, title = {マイクロチャネルによる神経突起の伸長制御}, booktitle = {電子情報システム部門大会}, year = 2018, } @inproceedings{CTT100771842, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の震え(顫動)に関する擦弦時の実験}, booktitle = {}, year = 2018, } @inproceedings{CTT100793927, author = {鷹箸 雅司 and 志村 京亮 and 顧 暁冬 and 中濱 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {面発光レーザとスローライト光増幅器の横方向高効率結合集積化}, booktitle = {}, year = 2018, } @inproceedings{CTT100793926, author = {志村 京亮 and 鷹箸 雅司 and 許 在旭 and 顧 暁冬 and 中濵 正統 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {カットオフ波長離調構造によるビームスキャナ集積面発光レーザ}, booktitle = {}, year = 2018, } @inproceedings{CTT100776666, author = {武田 博明 and 秋本 恭平 and 大島 拓人 and 近藤 淳 and 松谷 晃宏 and 保科 拓也 and 鶴見 敬章}, title = {ゲーレナイト Ca2Al2SiO7結晶の材料定数評価と弾性波特性}, booktitle = {}, year = 2018, } @inproceedings{CTT100771843, author = {松谷晃宏 and 佐藤美那 and 長谷部浩一 and 高田綾子}, title = {XeF2気相エッチングにより製作した 微生物細胞捕獲用Siマイクロ凹面鏡の集光実験}, booktitle = {}, year = 2018, } @inproceedings{CTT100770350, author = {Keisuke Shimura and Masashi Takanohashi and Zeuku Ho and Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Non-Mechanical Beam Scanner Integrated with Wavelength Detuned VCSEL for LiDAR Applications}, booktitle = {}, year = 2018, } @inproceedings{CTT100769443, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の震えに関する基礎実験}, booktitle = {日本音響学会音楽音響研究会資料}, year = 2018, } @inproceedings{CTT100776670, author = {T. Oshima and K. Akimoto and T. Hoshina and T. Tsurumi and J. Kohndoh and A. Matsutani and H. Takeda}, title = {Electro-Acoustical Constants and Rayleigh SAW Propagation Characteristics of Ca2Al2SiO7 Single Crystal}, booktitle = {}, year = 2018, } @inproceedings{CTT100767817, author = {Keisuke Kondo and Xiaodong Gu and Zeuku Ho and Akihiro Matsutani and Fumio Koyama}, title = {Two-Dimensional Beam Steering Using Slow-Light Waveguide Deflector Array with Optical Gain}, booktitle = {}, year = 2018, } @inproceedings{CTT100760777, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の震えと保持部分の振動に関する実験}, booktitle = {第65回応用物理学会春季学術講演会 講演予稿集}, year = 2018, } @inproceedings{CTT100766555, author = {井上 俊也 and 旭 利紘 and 西村 駿 and 中濵 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {MEMS VCSEL集積スローライト導波路ビームスキャナの作製}, booktitle = {}, year = 2018, } @inproceedings{CTT100766557, author = {旭 利紘 and 顧 暁冬 and 松谷 晃宏 and 小山 二三夫}, title = {3Dセンシングのための解像点数100点を超えるアクティビームスキャナ}, booktitle = {}, year = 2018, } @inproceedings{CTT100766560, author = {許在旭 and 志村京亮 and 顧暁冬 and 中濵正統 and 松谷晃宏 and 小山二三夫}, title = {長尺面発光レーザ増幅器による高出力・高ビーム品質動作}, booktitle = {}, year = 2018, } @inproceedings{CTT100760776, author = {松谷晃宏 and 西岡國生 and 佐藤美那}, title = {XeF2気相エッチングによるSi マイクロ凹面鏡構造の製作}, booktitle = {第65回応用物理学会春季学術講演会 講演予稿集}, year = 2018, } @inproceedings{CTT100776658, author = {秋本恭平 and 保科拓也 and 近藤淳 and 松谷晃宏 and 鶴見敬章 and 武田博明}, title = {SAWセンサ応用へ向けたゲーレナイト結晶の特性評価}, booktitle = {}, year = 2018, } @inproceedings{CTT100762784, author = {三田 真衣 and 松谷 晃宏 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {金属コーティングシリカ球ピラミッドアレイの作製とその光学特性}, booktitle = {}, year = 2018, } @inproceedings{CTT100759382, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の震えと弓の傾きについて}, booktitle = {音楽音響研究会資料}, year = 2018, } @inproceedings{CTT100756479, author = {Akihiro Matsutani and Ayako Takada}, title = {Profile Control in Si Etching by Two-step Etching Process Using XeF2 Vapor for Fabrication of Concave Micromirror}, booktitle = {Proceedings of 39th International Symposium on Dry Process}, year = 2017, } @inproceedings{CTT100758993, author = {井上 俊也 and 西村 駿 and 中濵 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {電圧波形制御によるMEMS VCSELのリンギング抑制}, booktitle = {}, year = 2017, } @inproceedings{CTT100843943, author = {西村駿 and 中濵正統 and 井上俊也 and 松谷晃宏 and 坂口孝浩 and 小山二三夫}, title = {機械的共振を用いた波長可変マイクロマシン面発光レーザの広帯域掃引・低駆動電圧動作}, booktitle = {}, year = 2017, } @inproceedings{CTT100791896, author = {陳政霖 and 松谷 晃宏 and 西岡 國生 and 朴 鍾淏 and 初澤 毅 and 栁田 保子}, title = {ヒドロゲルファイバー表面形状形成のためのマイクロノズル作製}, booktitle = {第78回応用物理学会秋季学術講演会集}, year = 2017, } @inproceedings{CTT100751946, author = {松谷晃宏}, title = {ヴァイオリン演奏における弓の震えに関する弓の傾きの実験}, booktitle = {第78回応用物理学会秋季学術講演会講演予稿集}, year = 2017, } @inproceedings{CTT100751947, author = {松谷晃宏}, title = {XeF2 気相エッチングとスンプ法により製作したセルロイドマイクロレンズによる酵母細胞の捕獲実験}, booktitle = {第78回応用物理学会秋季学術講演会講演予稿集}, year = 2017, } @inproceedings{CTT100758994, author = {西村 駿 and 中濵 正統 and 坂口 孝浩 and 松谷 晃宏 and 小山二三夫}, title = {マイクロマシン面発光レーザの波長掃引の高速化}, booktitle = {}, year = 2017, } @inproceedings{CTT100758999, author = {志村京亮 and 許在旭 and 顧暁冬 and 松谷晃宏 and 中濵正統 and 小山二三夫}, title = {一方向性統合を可能にするVCSEL集積型ビーム掃引デバイス}, booktitle = {}, year = 2017, } @inproceedings{CTT100759004, author = {許在旭 and 志村京亮 and 顧暁冬 and 中濵正統 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザ増幅器の統合効率の検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100759025, author = {西村 駿 and 中濵 正統 and 井上 俊也 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {機械的共振を用いた波長可変マイクロマシン面発光レーザの広帯域掃引・低駆動電圧動作}, booktitle = {信学技報}, year = 2017, } @inproceedings{CTT100755472, author = {Zeuku Ho and Keisuke Shimura and Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and FUMIO KOYAMA}, title = {VCSEL Optical Amplifier for High Power Operations}, booktitle = {}, year = 2017, } @inproceedings{CTT100755471, author = {Shanting Hu and Xiaodong Gu and Akihiro Matsutani and FUMIO KOYAMA}, title = {Electro-absorption Modulator Integrated with Transverse Coupled Cavity VCSELs}, booktitle = {}, year = 2017, } @inproceedings{CTT100749242, author = {Zeuku Ho and Keisuke Shimura and Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {High-resolution Beam Steering Of Slow Light VCSEL Amplifier}, booktitle = {}, year = 2017, } @inproceedings{CTT100749245, author = {Keisuke Shimura and Zeuku Ho and Masanori Nakahama and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {Non-mechanical Beam Scanner Integrated VCSEL For Solid State LiDAR}, booktitle = {}, year = 2017, } @inproceedings{CTT100749246, author = {Masanori Nakahama and Shunya Inoue and Shun Nishimura and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Sub-volt Wavelength Sweep Operation Of MEMS VCSEL Employing High-Q Mechanical Resonanc}, booktitle = {}, year = 2017, } @inproceedings{CTT100749249, author = {Shanting Hu and Akihiro Matsutani and Fumio Koyama}, title = {Unidirectional Coupling Of Laterally Coupled VCSEL And Slow Light Modulator/Amplifier}, booktitle = {}, year = 2017, } @inproceedings{CTT100749253, author = {Shanting Hu and Akihiro Matsutani and Fumio Koyama}, title = {VCSELs Laterally Coupled with a Slow Light Modulator/Amplifier Showing Unidirectional Coupling}, booktitle = {}, year = 2017, } @inproceedings{CTT100743654, author = {松谷晃宏}, title = {ヴァイオリンの弓の踊りを弓毛の弾力から考える}, booktitle = {音楽音響研究会資料}, year = 2017, } @inproceedings{CTT100742178, author = {前田 幸平 and 西岡國生 and ヴァン ニュハイ and 松谷晃宏 and 立木 隆 and 内田 貴司}, title = {Deep-RIEとXeF2気相エッチングによるVOx/Si3N4/SiO2メンブレンの製作}, booktitle = {第64回応用物理学会春季学術講演会講演予稿集}, year = 2017, } @inproceedings{CTT100737430, author = {松谷晃宏}, title = {ヴァイオリンの弓のはずみに関する振動測定}, booktitle = {}, year = 2017, } @inproceedings{CTT100741263, author = {西村駿 and 顧暁冬 and 中濵正統 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {熱光学効果による1060nm 帯面発光レーザの高速波長掃引特性}, booktitle = {}, year = 2017, } @inproceedings{CTT100741261, author = {中濱正統 and 井上俊也 and 松谷晃宏 and 坂口孝浩 and 小山二三夫}, title = {機械的共振を用いたMEMS波長可変VCSELの広帯域掃引・低駆動電圧動作}, booktitle = {}, year = 2017, } @inproceedings{CTT100741260, author = {志村京亮 and 顧暁冬 and 中濵正統 and 許在旭 and 松谷晃宏 and 小山二三夫}, title = {増幅機能を有する VCSEL ビーム掃引デバイス}, booktitle = {}, year = 2017, } @inproceedings{CTT100741258, author = {許在旭 and 志村京亮 and 顧暁冬 and 中濵正統 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザ高出力化のための長尺半導体光増幅器}, booktitle = {}, year = 2017, } @inproceedings{CTT100735789, author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {プラズモン共鳴により生じる金属ナノ構造体の表面電位差の測定}, booktitle = {}, year = 2017, } @inproceedings{CTT100737429, author = {松谷晃宏 and 高田綾子}, title = {XeF2気相エッチングとスンプ法によるセルロイドマイクロレンズ アレイの製作}, booktitle = {}, year = 2017, } @inproceedings{CTT100722498, author = {Tsuyoshi Takahashi and Akihiro Matsutani and Dai Shoji and Kunio Nishioka and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {Microfabrication of polystyrene quadrupole combined with top-down and bottom-up approach}, booktitle = {}, year = 2016, } @inproceedings{CTT100734150, author = {Akihiro Matsutani and Ayako Takada}, title = {Single-cell Isolation of S. Cerevisiae Using Celluloid Microenclosure Array Formed by the SUMP Method}, booktitle = {}, year = 2016, } @inproceedings{CTT100726818, author = {土子政貴 and 青木才子 and 松谷晃宏 and 西岡國生}, title = {脂肪酸を添加した溶液中におけるマイクロパターン表面の摩擦特性}, booktitle = {}, year = 2016, } @inproceedings{CTT100734300, author = {Misaki Shimizu and Kunio Nishioka and Akihiro Matsutani and Kazuhiro Yoshida and Joon-wan Kim}, title = {Study on Fabrication of High Aspect Ratio TPSE by using DRIE}, booktitle = {20th International Conference on Mechatronics Technology(ICMT2016)}, year = 2016, } @inproceedings{CTT100733949, author = {松谷晃宏}, title = {ヴァイオリンのf孔形状とA0モードに関する実験的考察}, booktitle = {}, year = 2016, } @inproceedings{CTT100733809, author = {清水美咲 and 西岡國生 and 松谷晃宏 and 吉田和弘 and 金俊完}, title = {DRIEによる高アスペクト比三角柱-スリット形電極対(TPSE)の製作に関する研究}, booktitle = {山梨講演会講演論文集}, year = 2016, } @inproceedings{CTT100727011, author = {松谷晃宏}, title = {ヴァイオリンにおける顎あての有無による周波数特性の変化}, booktitle = {}, year = 2016, } @inproceedings{CTT100734650, author = {Masanori Nakahama and Xiaodong Gu and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {VCSEL-Based High Resolution Wavelength Demultiplexer with Large Optical Gain}, booktitle = {}, year = 2016, } @inproceedings{CTT100734670, author = {顧 暁冬 and 許 在旭 and 中濵 正統 and 松谷 晃宏 and 小山 二三夫}, title = {面発光レーザと集積したブラッグ反射鏡導波路増幅器の高シングルモード出力動作}, booktitle = {}, year = 2016, } @inproceedings{CTT100734671, author = {中濵正統 and 顧暁冬 and 松谷晃宏 and 坂口孝浩 and 小山二三夫}, title = {面発光レーザ構造を用いた波長分波器の光増幅特性}, booktitle = {}, year = 2016, } @inproceedings{CTT100734672, author = {井上俊也 and 中濵正統 and 松谷晃宏 and 坂口孝浩 and 小山二三夫}, title = {HCG MEMS VCSELの製作と温度無依存化に向けた特性評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100735788, author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性}, booktitle = {}, year = 2016, } @inproceedings{CTT100727010, author = {松谷晃宏 and 高田綾子}, title = {スンプ法により形成したセルロイド製単一細胞分離用プレートによる 酵母細胞の分離}, booktitle = {}, year = 2016, } @inproceedings{CTT100726833, author = {Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {VCSEL-Integrated Bragg Reflector Waveguide Amplifier with Single-mode Output Power over 10 mW}, booktitle = {}, year = 2016, } @inproceedings{CTT100726829, author = {Shunya Inoue and Masanori Nakahama and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Fabrication of HCG MEMS VCSELs using nanoimprint lithography and consideration of athermal operation}, booktitle = {}, year = 2016, } @inproceedings{CTT100726834, author = {Shunya Inoue and Masanori Nakahama and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Consideration and Fabrication of athermal HCG MEMS VCSEL}, booktitle = {}, year = 2016, } @inproceedings{CTT100726827, author = {Masanori Nakahama and Xiaodong Gu and Akihiro Matsutan and Takahiro Sakaguchi and Fumio Koyama}, title = {Slow Light VCSEL Amplifier for High-resolution Beam Steering and High-power Operations}, booktitle = {}, year = 2016, } @inproceedings{CTT100703921, author = {井上 俊也 and 中濵 正統 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {サブ波長格子を用いたアサーマル波長可変面発光レーザの製作}, booktitle = {}, year = 2016, } @inproceedings{CTT100703598, author = {西岡國生 and 佐藤美那 and 松谷晃宏}, title = {Deep-RIEにより形成されたトレンチ側面の化学組成に関するプラズマ発光分光分析からの考察}, booktitle = {}, year = 2016, } @inproceedings{CTT100703599, author = {松谷晃宏 and 高田綾子}, title = {液体定在波を利用した微生物細胞の流路レス凝集法におけるマイクロ囲いアレイを用いた大きさによる篩い分けと単一分離}, booktitle = {}, year = 2016, } @inproceedings{CTT100703608, author = {松谷晃宏}, title = {ヴァイオリンのf孔開口部形状と空気共鳴A0モードの周波数シフトに関する実験的検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100703914, author = {中濵 正統 and 顧 暁冬 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {面発光レーザの単一モード出力増大に向けたスローライトSOA の増幅特性}, booktitle = {}, year = 2016, } @inproceedings{CTT100703918, author = {中濵 正統 and 顧 暁冬 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {VCSEL 構造を用いた高出力ソリッドステートビームスキャナ}, booktitle = {}, year = 2016, } @inproceedings{CTT100703925, author = {森 裕之 and 顧 暁冬 and 松谷 晃宏 and 小山 二三夫}, title = {スローライト導波路アレイを用いた二次元ビーム掃引}, booktitle = {}, year = 2016, } @inproceedings{CTT100704334, author = {大竹真理子 and 岸哲生 and 矢野哲司 and 松谷晃宏 and 西岡國生}, title = {一方向性光結合を示すテルライトガラス回折格子の作製}, booktitle = {}, year = 2016, } @inproceedings{CTT100812932, author = {古野 慶太 and 松谷晃宏 and 宮本 義孝 and 八木 透}, title = {1C23 メッシュフィルタへの人工細胞膜の形成に関する研究}, booktitle = {バイオエンジニアリング講演会講演論文集}, year = 2016, } @inproceedings{CTT100812135, author = {Nakahama, M. and Gu, X. and Akihiro Matsutani and Sakaguchi, T. and Koyama, F.}, title = {High power non-mechanical beam scanner based on VCSEL amplifier}, booktitle = {2016 21st OptoElectronics and Communications Conference, OECC 2016 - Held Jointly with 2016 International Conference on Photonics in Switching, PS 2016}, year = 2016, } @inproceedings{CTT100735790, author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita}, title = {Kelvin probe force microscopic images on gold nanodisks with and without light irradiation}, booktitle = {}, year = 2016, } @inproceedings{CTT100700449, author = {松谷晃宏}, title = {ヴァイオリンのf孔開口部面積と空気共鳴モードAOの周波数の関係}, booktitle = {音楽音響研究会資料 MA2015-43}, year = 2015, } @inproceedings{CTT100699542, author = {Akihiro Matsutani and Mina Sato and Kunio Nishioka and Dai Shoji}, title = {EDX analysis of Si sidewall surface etched by deep-RIE process}, booktitle = {}, year = 2015, } @inproceedings{CTT100698296, author = {Masanori Nakahama and Xiaodong Gu and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Sub-gigahertz beam switching with transverse-mode coupled cavity VCSELs}, booktitle = {}, year = 2015, } @inproceedings{CTT100698686, author = {Shunya Inoue and Akihiro Matsutani and Hideo Ohtsuki and Takahiro Miyashita and Fumio Koyama}, title = {Dual beam single-mode vertical cavity surface emitting lasers using high-index contrast grating}, booktitle = {}, year = 2015, } @inproceedings{CTT100699537, author = {松谷晃宏 and 高田綾子}, title = {タッピングによる酵母細胞の流路レス凝集パターン形成と 単一細胞分離}, booktitle = {}, year = 2015, } @inproceedings{CTT100697065, author = {中濵正統 and 顧暁冬 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {横方向複合共振器面発光レーザによる高速ビームスイッチング動作}, booktitle = {}, year = 2015, } @inproceedings{CTT100696487, author = {小山俊泰 and 顧暁冬 and 松谷晃宏 and 坂口孝浩 and 小山二三夫}, title = {ビーム掃引/波長選択スイッチのための1.5μm帯Si/SiO2ブラッグ反射鏡導波路}, booktitle = {}, year = 2015, } @inproceedings{CTT100696489, author = {Hiroyuki Mori and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {2次元ビーム掃引のためのスローライト分岐・ビーム掃引素子}, booktitle = {}, year = 2015, } @inproceedings{CTT100696490, author = {中濵正統 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {アサーマル波長可変面発光レーザ}, booktitle = {}, year = 2015, } @inproceedings{CTT100696491, author = {井上俊也 and 松谷晃宏 and 小山二三夫}, title = {サブ波長格子を用いたデュアルビーム面発光レーザーの作製}, booktitle = {}, year = 2015, } @inproceedings{CTT100697058, author = {Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Over 30 GHz Modulation of 850 nm Transverse Coupled Cavity Vertical-Cavity Surface-Emitting Laser}, booktitle = {}, year = 2015, } @inproceedings{CTT100697067, author = {Xiaodong Gu and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {First Demonstration of 850 nm Transverse Coupled Cavity Vertical Cavity Surface-Emitting Laser}, booktitle = {}, year = 2015, } @inproceedings{CTT100695347, author = {Masanori Nakahama and Xiaodong Gu and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Transverse-mode Coupled cavity VCSELs with High Speed Beam Switching}, booktitle = {}, year = 2015, } @inproceedings{CTT100695349, author = {Shunya Inoue and Akihiro Matsutani and Hideo Ohtsuki and Takahiro Miyashita and Fumio Koyama}, title = {Beam engineering of VCSELs using High-index Contrast sub-wavelength Grating}, booktitle = {}, year = 2015, } @inproceedings{CTT100695853, author = {Masanori Nakahama and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Precise Wavelength Tuning of MEMS VCSELs enabling 110-ch Operations}, booktitle = {}, year = 2015, } @inproceedings{CTT100695854, author = {Kenji Tanabe and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {Vortex Beam Emitter Laterally Integrated with Vertical Cavity Surface Emitting Laser}, booktitle = {}, year = 2015, } @inproceedings{CTT100694083, author = {Masanori Nakahama and Hiroki Kobayashi and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Transverse-mode Control of Transverse-coupled Cavity VCSELs using Vernier Effect for Boosting Single-mode Power}, booktitle = {}, year = 2015, } @inproceedings{CTT100690648, author = {Kenji Tanabe and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {Compact Vortex Beam Emitter Laterally Integrated with VCSEL Array}, booktitle = {}, year = 2015, } @inproceedings{CTT100686996, author = {高橋 毅 and 松谷 晃宏 and 庄司 大 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子}, title = {トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製}, booktitle = {}, year = 2015, } @inproceedings{CTT100683708, author = {菊池麻子 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザ集積フォトニクスのための混晶化を用いた面内バンドギャップ制御}, booktitle = {}, year = 2015, } @inproceedings{CTT100683707, author = {田辺賢司 and 顧 暁冬 and 松谷晃宏 and 小山二三夫}, title = {VCSELとの横方向集積によるVortexビームアレイ}, booktitle = {}, year = 2015, } @inproceedings{CTT100683705, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Ultra-compact and High-speed Electro-absorption Modulator Integrated VCSEL}, booktitle = {}, year = 2015, } @inproceedings{CTT100683819, author = {佐藤 美那 and 西岡國生 and 庄司大 and 松谷晃宏}, title = {Deep-RIEにより深掘りエッチングされたSiエッチング側面のEDX分析}, booktitle = {}, year = 2015, } @inproceedings{CTT100683811, author = {中濵正統 and 小林拓貴 and 丸山彰 and 松谷晃宏 and 小山 二三夫}, title = {横方向複合共振器面発光レーザのVernier 効果による横モード制御}, booktitle = {}, year = 2015, } @inproceedings{CTT100683783, author = {松谷晃宏 and 高田綾子}, title = {液体定在波を利用した酵母細胞の流路レス凝集パターンの振動周波数による制御}, booktitle = {}, year = 2015, } @inproceedings{CTT100683745, author = {松谷晃宏}, title = {小望遠鏡とデジタル一眼レフカメラによる太陽黒点の温度推定における観測波長領域の影響について}, booktitle = {}, year = 2015, } @inproceedings{CTT100687793, author = {角田健 and 松谷晃宏 and 宮本智之}, title = {励起準位を用いたVCSELの動作温度範囲拡大}, booktitle = {}, year = 2015, } @inproceedings{CTT100683744, author = {松谷晃宏}, title = {ヴァイオリンの胴体内の空気の温度変化による空気共鳴モードA0周波数のシフト}, booktitle = {}, year = 2015, } @inproceedings{CTT100682561, author = {岩崎 大和 and 西林 一彦 and 松谷 晃宏 and 佐藤 美那 and 久我 淳 and 宗片 比呂夫}, title = {光導波路とエバネッセント結合したGdFe薄膜の磁気光学応答}, booktitle = {予稿集}, year = 2015, } @inproceedings{CTT100683439, author = {Ying-Yu Lai and Akihiro Matsutani and Tien-Chang Lu and Shing-Chung Wang and Fumio Koyama}, title = {Fabrication of SiC Membrane HCG Blue Reflector Using Nanoimprint Lithography}, booktitle = {}, year = 2015, } @inproceedings{CTT100683425, author = {松谷晃宏}, title = {ヴァイオリンの胴体内部の気体の状態による 音色の変化について}, booktitle = {音楽音響研究会資料}, year = 2015, } @inproceedings{CTT100699534, author = {松谷晃宏}, title = {液体定在波を利用した酵母細胞の 流路レス凝集パターン形成における励振波形の効果}, booktitle = {}, year = 2015, } @inproceedings{CTT100696811, author = {松谷晃宏}, title = {ヴァイオリンのf孔開口部面積と空気共鳴モードA0周波数について}, booktitle = {}, year = 2015, } @inproceedings{CTT100694150, author = {K.Tahara and T.Iwasaki and A.Matsutani and M.Hatano}, title = {Characteristics of Fluorinated Graphene Field Effect Transistors}, booktitle = {}, year = 2014, } @inproceedings{CTT100681271, author = {中濵正統 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {熱応力・静電力駆動のマイクロマシンを用いたアサーマル波長可変面発光レーザ}, booktitle = {}, year = 2014, } @inproceedings{CTT100679651, author = {田原康佐 and 岩崎孝之 and 松谷晃宏 and 波多野睦子}, title = {フッ化グラフェン中のスピン緩和}, booktitle = {}, year = 2014, } @inproceedings{CTT100682330, author = {Akihiro matsutani and FUMIO KOYAMA}, title = {Microfabrication of 4H-SiC by Reactive Ion Etching Using XeF2 Plasma}, booktitle = {}, year = 2014, } @inproceedings{CTT100678746, author = {Akihiro Matsutani and Fumio Koyama}, title = {Dry Etching of 4H-SiC using Ar/F2 Plasma}, booktitle = {}, year = 2014, } @inproceedings{CTT100677466, author = {Xiaodong Gu and Kenya Suzuki and Yuichiro Ikuma and Akihiro Matsutani and Fumio Koyama}, title = {Improvement in Crosstalk of 200-Port Bragg Reflector Waveguides Array-based Wavelength Selective Switch}, booktitle = {}, year = 2014, } @inproceedings{CTT100680930, author = {Xiaodong Gu and Ayako Suzuki and Akihiro Matsutani and Fumio Koyama}, title = {Miniature Slow-Light Bragg Reflector Waveguide Modulator with over 20GHz Modulation Bandwidth}, booktitle = {}, year = 2014, } @inproceedings{CTT100682327, author = {松谷晃宏 and 高田綾子}, title = {低周波鉛直加振による液体定在波を利用した酵母細胞の流路レス凝集}, booktitle = {}, year = 2014, } @inproceedings{CTT100684996, author = {Toshikazu Shimada and Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Beam scanner integrated VCSEL with electro-thermal wavelength tuning}, booktitle = {}, year = 2014, } @inproceedings{CTT100676657, author = {松谷晃宏 and 石割文崇 and 庄子良晃 and 上原 卓也 and 中川 勝 and 福島孝典}, title = {Cl2-誘導結合型プラズマエッチングにおけるヤヌス型トリプチセンTripC12のエッチング特性の評価}, booktitle = {}, year = 2014, } @inproceedings{CTT100676654, author = {松谷 晃宏}, title = {ヴァイオリンの胴体へのHFC-134aガス注入による音色の変化}, booktitle = {}, year = 2014, } @inproceedings{CTT100687791, author = {角田健 and 松谷晃宏 and 宮本智之}, title = {励起準位を用いた高利得化VCSELに関する基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100684997, author = {Masanori Nakahama and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Athermal multi-wavelength VCSEL array employing thermally actuated micromachined mirrors}, booktitle = {}, year = 2014, } @inproceedings{CTT100680923, author = {中濵正統 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {熱応力・静電力駆動のマイクロマシンを用いたアサーマル波長可変面発光レーザ}, booktitle = {}, year = 2014, } @inproceedings{CTT100678749, author = {鈴木絢子 and 顧暁冬 and 松谷晃宏 and 小山二三夫}, title = {反射鏡導波路による多モード干渉スプリッター}, booktitle = {}, year = 2014, } @inproceedings{CTT100680489, author = {高橋雄太 and Dalir Hamed and 松谷晃宏 and 小山二三夫}, title = {面発光レーザ・変調器集積デバイスによる戻り光の制御}, booktitle = {}, year = 2014, } @inproceedings{CTT100679449, author = {Masanori Nakahama and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Athermal and Widely Tunable VCSEL with Bimorph Micromachined Mirror}, booktitle = {OECC 2014}, year = 2014, } @inproceedings{CTT100674577, author = {Xiaodong Gu and Ayako Suzuki and Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Large Enhancement in Modulation Bandwidth of Low-Voltage Slow Light Bragg Reflector Waveguide Modulator}, booktitle = {OECC 2014}, year = 2014, } @inproceedings{CTT100668639, author = {小林大斗 and 松谷晃宏 and 西岡國生 and 庄司 大 and 佐藤 美那 and 磯部敏宏 and 中島章 and 立間 徹 and 松下祥子}, title = {傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価}, booktitle = {}, year = 2014, } @inproceedings{CTT100672798, author = {松谷晃宏}, title = {ヴァイオリン演奏におけるピタゴラス音律と平均律で調弦した演奏音の音色の比較}, booktitle = {}, year = 2014, } @inproceedings{CTT100674837, author = {Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {Bragg Reflector Waveguide Modulator toward High-Speed Operations and Low Power Consumption}, booktitle = {}, year = 2014, } @inproceedings{CTT100674838, author = {田辺賢司 and 顧暁冬 and 松谷晃宏 and 小山二三夫}, title = {Bragg 反射鏡導波路からのVortex ビームの光ファイバ結合の基礎検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100674844, author = {高橋雄太 and Hamed Dalir and 島田 敏和 and 松谷晃宏 and 小山二三夫}, title = {くびれ酸化狭窄構造を用いた面発光レーザ・変調器集積デバイス}, booktitle = {}, year = 2014, } @inproceedings{CTT100674942, author = {中濵 正統 and 井上 俊也 and 住本 裕一 and 森脇 翔平 and 坂口 孝浩 and 松谷晃宏 and 小山 二三夫}, title = {波長可変アサーマル面発光レーザの低閾値化に関する検討}, booktitle = {}, year = 2014, } @inproceedings{CTT100675109, author = {成木 航 and 田原 康佐 and 岩崎孝之 and 古山聡子 and 松谷晃宏 and 波多野睦子}, title = {横型フッ化グラフェン‐グラフェンヘテロ構造の作製}, booktitle = {}, year = 2014, } @inproceedings{CTT100676684, author = {佐藤 美那 and 松谷 晃宏 and 曽根 正人}, title = {多層膜構造を用いたEDX分析におけるCu中のX線発生領域の測定}, booktitle = {}, year = 2014, } @inproceedings{CTT100678751, author = {田辺賢司 and 顧暁冬 and 松谷晃宏 and 小山二三夫}, title = {多重リングBragg反射鏡導波路からのVortexビームの生成}, booktitle = {}, year = 2014, } @inproceedings{CTT100669827, author = {阿久津友宏 and 牛尾拓也 and 菊池麻子 and 松谷晃宏 and 宮本智之}, title = {液体ガラスを用いた量子井戸混晶化とその面発光レーザ応用に関する研究}, booktitle = {技術研究報告}, year = 2013, } @inproceedings{CTT100805953, author = {中濱 正統 and 佐野 勇人 and 坂口孝浩 and 松谷晃宏 and 小山 二三夫}, title = {マイクロマシンを用いたアサーマル面発光レーザの波長掃引特性 (レーザ・量子エレクトロニクス)}, booktitle = {電子情報通信学会技術研究報告 = IEICE technical report : 信学技報}, year = 2013, } @inproceedings{CTT100663962, author = {Masanori Nakahama and Hayato Sano and Shunya Inoue and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength tuning and controlled temperature dependence of MEMS VCSELs with thermally and electrostatically actuated micromachined mirror}, booktitle = {}, year = 2013, } @inproceedings{CTT100661038, author = {Xiaodong Gu and Syoki Shimizu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {High-speed and low-voltage operation of compact Bragg reflector waveguide modulator}, booktitle = {}, year = 2013, } @inproceedings{CTT100660920, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Transverse Coupled Cavity VCSELs for Push-Pull Modulation}, booktitle = {}, year = 2013, } @inproceedings{CTT100659811, author = {清水翔貴 and 顧暁冬 and 島田敏和 and 松谷晃宏 and 小山二三夫}, title = {高速・低消費電力の光インターコネクトのための小型・低電圧スローライト光変調器の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100659814, author = {島田敏和 and 高橋雄太 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザとスローライトデバイスの結合効率改善の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100659819, author = {井上俊也 and 樫野純一 and 松谷晃宏 and 小山二三夫}, title = {高屈折率差サブ波長回折格子を用いたVCSEL の横モード制御}, booktitle = {}, year = 2013, } @inproceedings{CTT100660898, author = {松谷晃宏}, title = {ヴァイオリン演奏に関する実験的研究 - 弦の振動からコンサートホールでの響きまで -}, booktitle = {日本人間工学会聴覚コミュニケーション部会AEG研究会資料}, year = 2013, } @inproceedings{CTT100660899, author = {松谷晃宏}, title = {ヴァイオリン演奏における調弦の音律と音色の関係 ピタゴラス音律と平均律の比較}, booktitle = {}, year = 2013, } @inproceedings{CTT100660908, author = {Junichi Kashino and Shunya Inoue and Akihiro Matsutani and Hideo Ohtsuki and Takahiro Miyashita and Fumio Koyama}, title = {Transverse Mode Control of VCSELs Using Angular Dependent High-contrast Grating Mirror}, booktitle = {}, year = 2013, } @inproceedings{CTT100660913, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Modulation Bandwidth Enhancement of Laterally-coupled Cavity VCSELs for Radio over Fiber Applications}, booktitle = {}, year = 2013, } @inproceedings{CTT100660918, author = {中濵正統 and 佐野勇人 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {熱駆動のマイクロマシンを用いたアサーマル面発光レーザの波長掃引特性II}, booktitle = {}, year = 2013, } @inproceedings{CTT100660919, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Beyond 25GHz Directly Modulated 980nm VCSEL with Lateral Optical Feedback}, booktitle = {}, year = 2013, } @inproceedings{CTT100660921, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Ultra-compact Bragg Reflector Waveguide Modulator with Large Response Bandwidth and Low Power Consumption}, booktitle = {}, year = 2013, } @inproceedings{CTT100660922, author = {Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {1550nm-band Low Polarization Dependence Wavelength Demultiplexing Using Bragg Reflector Waveguide}, booktitle = {}, year = 2013, } @inproceedings{CTT100660924, author = {田辺 賢司 and 望月 翔太 and 顧 暁冬 and 松谷 晃宏 and 小山 二三夫}, title = {Bragg反射鏡導波路からのVortexビームの生成とその特性}, booktitle = {}, year = 2013, } @inproceedings{CTT100665394, author = {K. Tahara and T. Iwasaki and A. Matsutani and T.Yamaguchi and K.Ishibashi and M. Hatano}, title = {Magnetotransport properties of fluorinated graphene}, booktitle = {}, year = 2013, } @inproceedings{CTT100665403, author = {K. Tahara and T. Iwasaki and S.Furuyama and A. Matsutani and M. Hatano}, title = {Asymmetric transport properties in fluorinated graphene}, booktitle = {}, year = 2013, } @inproceedings{CTT100665406, author = {田原康佐 and 岩崎孝之 and 松谷晃宏 and 山口智弘 and 石橋幸治 and 波多野睦子}, title = {フッ化グラフェンの磁気抵抗効果}, booktitle = {}, year = 2013, } @inproceedings{CTT100680959, author = {S. Furuyama and K. Tahara and T. Iwasaki and A. Matsutani and M. Hatano}, title = {“Low Temperature Transport Properties of Fluorinated Graphene FET Controlled by Ionic Liquid Gating}, booktitle = {}, year = 2013, } @inproceedings{CTT100659700, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Super-high Resolution Beam Steering Using Bragg Reflector Waveguides}, booktitle = {}, year = 2013, } @inproceedings{CTT100658431, author = {Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Sub-50μm Long Slow-light Electro-absorption Modulator Laterally Integrated with VCSEL}, booktitle = {}, year = 2013, } @inproceedings{CTT100658428, author = {Xiaodong Gu and Syouki Shimizu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Sub-1V and Sub-100μm Electro-absorption Modulator Based on Bragg Reflector Waveguide}, booktitle = {}, year = 2013, } @inproceedings{CTT100658491, author = {Masanori Nakahama and Hayato Sano and Shunya Inoue and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Electro-thermally Tunable 850nm VCSELs with metal/semiconductor Thermally Actuated Mirror}, booktitle = {}, year = 2013, } @inproceedings{CTT100658432, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Modulation of Spatial Intensity Distribution of Laterally Coupled Twin VCSELs}, booktitle = {}, year = 2013, } @inproceedings{CTT100657900, author = {Shota Mochizuki and Xiaodong Gu and Akihiro Matsutani and Fumio Koyama}, title = {Creation of Vortex Beam based on Integrated Ring-shape Bragg Reflector Waveguide}, booktitle = {}, year = 2013, } @inproceedings{CTT100658403, author = {Xiaodong Gu and Kensuke Nakamura and Akihiro Matsutani and Fumio Koyama}, title = {Miniature Bragg Reflector Waveguide Beam Deflector for Full C-band Wavelength Demultiplexing with Low Polarization Dependence and High Resolution}, booktitle = {}, year = 2013, } @inproceedings{CTT100665391, author = {Kosuke Tahara and Takayuki Iwasaki and Satoko Furuyama and Akihiro matsutani and Mutsuko Hatano}, title = {Characteristics of Fluorinated Graphene Field Effect Transistors}, booktitle = {}, year = 2013, } @inproceedings{CTT100665436, author = {Tomohiro Akutsu and Takuya Ushio and Akihiro Matsutani and Tomoyuki Miyamoto}, title = {Fabrication and characterization of VCSELs applying quantum well intermixing using}, booktitle = {}, year = 2013, } @inproceedings{CTT100653229, author = {Xiaodong Gu and Syouki Shimizu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Demonstration of an Electro-absorption Optical Modulator based on Bragg Reflector Waveguide with Ultra-low Driving Voltage}, booktitle = {}, year = 2013, } @inproceedings{CTT100653227, author = {樫野純一 and 松谷 晃宏 and 小山 二三夫}, title = {サブ波長回折格子を用いた横モード制御面発光レーザの製作と特性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100653225, author = {中濵 正統 and 佐野 勇人 and 井上 俊也 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {AR 層を有した波長可変MEMS 面発光レーザの波長掃引特性}, booktitle = {}, year = 2013, } @inproceedings{CTT100653223, author = {佐野 勇人 and 中濵 正統 and 松谷 晃宏 and 小山 二三夫}, title = {T字型熱駆動マイクロマシンによる面発光レーザの波長温度係数の精密制御と波長可変動作}, booktitle = {}, year = 2013, } @inproceedings{CTT100653219, author = {中村 謙介 and 顧 暁冬 and 松谷 晃宏 and 小山 二三夫}, title = {ブラッグ反射鏡導波路を用いた2次元ビーム掃引の検討}, booktitle = {}, year = 2013, } @inproceedings{CTT100653218, author = {島田敏和 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザとスローライト変調器の横方向集積 -イオン注入プロセス導入によるアイソレーションの改善-}, booktitle = {}, year = 2013, } @inproceedings{CTT100653216, author = {望月翔太 and 島田敏和 and 顧暁冬 and 松谷晃宏 and 小山二三夫}, title = {ブラッグ反射鏡導波路によるボルテックスビーム生成}, booktitle = {}, year = 2013, } @inproceedings{CTT100648125, author = {田原康佐 and 岩崎孝之 and 古山聡子 and 松谷晃宏 and 波多野睦子}, title = {フッ化グラフェンFETの温度特性}, booktitle = {}, year = 2013, } @inproceedings{CTT100648124, author = {古山聡子 and 田原康佐 and 岩崎孝之 and 松谷晃宏 and 波多野睦子}, title = {イオン液体ゲートを用いたフッ化グラフェン電界効果トランジスタ}, booktitle = {}, year = 2013, } @inproceedings{CTT100648097, author = {Satoko Furuyama and Kosuke Tahara and Takayuki Iwasaki and akihiro matsutani and Mutsuko Hatano}, title = {Fluorinated Graphene FETs Controlled by Ionic Liquids Gate}, booktitle = {}, year = 2013, } @inproceedings{CTT100653312, author = {阿久津友宏 and 牛尾拓也 and 松谷晃宏 and 宮本智之}, title = {液体ガラスを用いた量子構造混晶化の面発光レーザへの適用性に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100657894, author = {Junichi Kashino and Hayato Sano and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Modeling and fabrication of angular dependent Si high-contrast grating mirror for transverse mode control of VCSELs}, booktitle = {}, year = 2013, } @inproceedings{CTT100649208, author = {Hamed Dalir and Akihiro Matsutani and Fumio Koyama}, title = {Push-pull modulation of lateral coupling of dual VCSEL cavities using a bow-tie shape}, booktitle = {}, year = 2013, } @inproceedings{CTT100663966, author = {Masanori Nakahama and Hayato Sano and Shunya Inoue and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror}, booktitle = {}, year = 2013, } @inproceedings{CTT100653971, author = {K. Tahara and T. Iwasaki and S. Furuyama and A. Matsutani and M. Hatano}, title = {Carrier Transport Properties of Fluorinated Graphene}, booktitle = {}, year = 2013, } @inproceedings{CTT100661898, author = {Chao Zhi and Tadahiko Shinshi and Minoru Uehara and Akihiro Matsutani and Isamu Yuito and Teruaki Takeuchi}, title = {A Micro Polydimenthylsiloxane Diaphragm Integrated with Sputtered Thin Film NdFeB Magnet}, booktitle = {Proceedings of the 17th International Conference On Mechatronic Technology}, year = 2013, } @inproceedings{CTT100646582, author = {Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Athermal and Tunable VCSELs with a Thermally Actuated Cantilever Structure for WDM Optical Interconnects}, booktitle = {}, year = 2012, } @inproceedings{CTT100646584, author = {Syouki Shimizu and Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {Modeling and Experiment on Low Voltage Slow-Light Electro-absorption Modulators for High-speed and Low Power Consumption Optical Interconnect}, booktitle = {}, year = 2012, } @inproceedings{CTT100664034, author = {Sachiko Matsushita and Takuya Hashimoto and Takuya Hashimoto and Akihiro Matsutani}, title = {Introduction of Photonic Crystal into Dye-sensitized Solar cells utilising a naturally-occurring dye}, booktitle = {}, year = 2012, } @inproceedings{CTT100645665, author = {松谷晃宏}, title = {ヴァイオリン演奏における擦弦振動と共鳴振動の観察}, booktitle = {音楽音響研究会資料,日本音楽知覚認知学会資料}, year = 2012, } @inproceedings{CTT100648104, author = {Kosuke Tahara and Takayuki Iwasaki and Akihiro Matsutani and Satoko Furuyama and Yasuhide Ohno and Kazuhiko Matsumono and Mutsuko Hatano}, title = {Fluorination of Mono- and Bi-layer Graphene by Ar/F2 Plasma}, booktitle = {}, year = 2012, } @inproceedings{CTT100645667, author = {Akihiro matsutani and Hideo Ohtsuki and Ayako Takada}, title = {Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching and Cl2 Inductively Coupled Plasma Etching}, booktitle = {}, year = 2012, } @inproceedings{CTT100645668, author = {Akihiro matsutani and Ayako Takada}, title = {Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure}, booktitle = {}, year = 2012, } @inproceedings{CTT100648094, author = {Akihiro Matsutani and Kosuke Tahara and Takayuki Iwasaki and Mutsuko Hatano}, title = {Fluorination Process of Graphene using Ar/F2 Plasma}, booktitle = {}, year = 2012, } @inproceedings{CTT100643529, author = {Xiaodong Gu and Toshikazu Shimada and Satoshi Shimizu and Akihiro Matsutani and Fumio Koyama}, title = {Compact Bragg Reflector Waveguide Modulator Based on VCSEL Structure with Low Driving Voltage below 0.5 V}, booktitle = {}, year = 2012, } @inproceedings{CTT100643733, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {High-resolution Wavelength Demultiplexer Based on a Bragg Reflector Waveguide}, booktitle = {}, year = 2012, } @inproceedings{CTT100643689, author = {佐野勇人 and 中田紀彦 and 中濵正統 and 松谷晃宏 and 小山二三夫}, title = {熱駆動のマイクロマシンを用いたアサーマル面発光レーザの波長掃引特性}, booktitle = {}, year = 2012, } @inproceedings{CTT100643687, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {CO2プラズマによるSiのドライエッチング}, booktitle = {}, year = 2012, } @inproceedings{CTT100648119, author = {田原康佐 and 岩崎孝之 and 松谷晃宏 and 古山聡子 and 大野恭秀 and 松本和彦 and 波多野睦子}, title = {フッ化グラフェンのキャリア輸送特性}, booktitle = {}, year = 2012, } @inproceedings{CTT100643484, author = {Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {On-Chip Electro-Thermal Beam Steering based on Slow-light Bragg Reflector Waveguide Laterally Integrated with VCSEL}, booktitle = {}, year = 2012, } @inproceedings{CTT100643497, author = {Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Electro-Thermal Tuning of Athermal 850nm VCSELs with Thermally Actuated T-shape Membrane Structure}, booktitle = {}, year = 2012, } @inproceedings{CTT100643508, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Giant Electro-thermal Phase-shift in Low-Polarization Dependent Slow Light Bragg Reflector Waveguide}, booktitle = {}, year = 2012, } @inproceedings{CTT100643471, author = {Xiaodong Gu and Toshikazu Shimada and Akihiro Matsutani and Fumio Koyama}, title = {High-resolution Wavelength Demultiplexer Based on a Bragg Reflector Waveguide Amplifier with Large Angular Dispersion}, booktitle = {}, year = 2012, } @inproceedings{CTT100645666, author = {Akihiro matsutani and Ayako Takada}, title = {Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications}, booktitle = {}, year = 2012, } @inproceedings{CTT100643760, author = {樫野純一 and 松谷晃宏 and 小山二三夫}, title = {サブ波長回折格子を用いた横モード制御面発光レーザの設計と製作}, booktitle = {}, year = 2012, } @inproceedings{CTT100643754, author = {清水翔貴 and 顧暁冬 and 島田敏和 and 松谷晃宏 and 小山二三夫}, title = {低消費電力の光インターコネクトのための低電圧スローライト光変調器の検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100643743, author = {中村謙介 and 淵田歩 and 松谷晃宏 and 小山二三夫}, title = {スローライト導波路によるビーム偏向とスイッチングの基礎検討}, booktitle = {}, year = 2012, } @inproceedings{CTT100643718, author = {中濵正統 and 佐野勇人 and 坂口孝浩 and 松谷晃宏 and 小山 二三夫}, title = {スティッキング抑制手法によるマイクロマシン面発光レーザの製作}, booktitle = {}, year = 2012, } @inproceedings{CTT100643715, author = {Xiaodong Gu and Toshikazu Shimada and Shouki Shimizu and Akihiro Matsutani and Fumio Koyama}, title = {Compact Bragg Reflector Waveguide Modulator with Ultra-low Driving Voltage below 0.5 V}, booktitle = {}, year = 2012, } @inproceedings{CTT100643711, author = {島田敏和 and 松谷晃宏 and 小山二三夫}, title = {VCSELとスローライト導波路の横方向集積によるオンチップビーム偏向}, booktitle = {}, year = 2012, } @inproceedings{CTT100641865, author = {Masanori Nakahama and Xiaodong Gu and Toshikazu Shimada and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Lateral Integration of MEMS VCSEL and Slow Light Amplifier for High Single-mode Output Power}, booktitle = {}, year = 2012, } @inproceedings{CTT100641867, author = {Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Athermal Operation and Wavelength Tuning of VCSELs with Thermally Actuated MEMS Structure}, booktitle = {}, year = 2012, } @inproceedings{CTT100646192, author = {中濵 正統 and 佐野 勇人 and 島田 敏和 and 顧 暁冬 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {波長可変面発光レーザとスローライト光増幅器の平面集積構造の検討}, booktitle = {電子情報通信学会技術研究報告}, year = 2012, } @inproceedings{CTT100635647, author = {Xiaodong Gu and Toshikazu Shimada and Ayumi Fuchida and Akihiro Matsutani and Akihiro Imamura and Fumio Koyama}, title = {Thermal and Electrical Beam Steering on a GaInAs/GaAs Slow-light Bragg Waveguide Amplifier}, booktitle = {}, year = 2012, } @inproceedings{CTT100636448, author = {宮毛泰光 and 松谷晃宏 and 小山二三夫}, title = {角度依存性を有するサブ波長解析格子ミラーの設計と製作}, booktitle = {}, year = 2012, } @inproceedings{CTT100636437, author = {淵田 歩 and 松谷 晃宏 and 小山 二三夫}, title = {スローライト導波路における挿入損失評価}, booktitle = {}, year = 2012, } @inproceedings{CTT100641303, author = {松谷晃宏}, title = {ヴァイオリン演奏と応用物理学}, booktitle = {}, year = 2012, } @inproceedings{CTT100635645, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Switching Characteristics of 30μm×30μm Compact Optical Switch with Slowing Light}, booktitle = {}, year = 2012, } @inproceedings{CTT100634000, author = {林未来郎 and 守井泰士 and 松谷晃宏 and 西岡國生 and 磯部敏宏 and 松下祥子 and 中島章}, title = {ドライエッチングによる(001)TiO2単結晶のマイクロ規則構造の作製}, booktitle = {}, year = 2012, } @inproceedings{CTT100648108, author = {田原康佐 and 岩崎孝之 and 松谷晃宏 and 波多野睦子}, title = {Ar/F2プラズマによるフッ化グラフェンの作製}, booktitle = {}, year = 2012, } @inproceedings{CTT100633303, author = {Yuuki Hashizume and Yasumitsu Miyake and Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Fabrication and characterization of Si/SiO2 high contrast grating using nanoimprint lithography}, booktitle = {}, year = 2012, } @inproceedings{CTT100812906, author = {松谷晃宏 and 高田 綾子}, title = {低圧プラズマプロセスによる細菌細胞の分解と細菌細胞を用いた半導体のドライエッチング}, booktitle = {電気学会研究会資料. PST, プラズマ研究会}, year = 2011, } @inproceedings{CTT100813022, author = {松谷晃宏 and 高田 綾子}, title = {低圧プラズマプロセスによる細菌細胞の分解と細菌細胞を用いた半導体のドライエッチング}, booktitle = {電気学会研究会資料. PPT, パルスパワー研究会}, year = 2011, } @inproceedings{CTT100630523, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Miniature Slow Light Total-Internal-Reflection Switch with Carrier Injection}, booktitle = {}, year = 2011, } @inproceedings{CTT100630524, author = {Yasutaka Higa and Mikio Sorimachi and Takuya Nishinome and Hajime Iwasaki and Akihiro Matsutani and Tomoyuki Miyamoto}, title = {The Reduction of Dumping Factor at Well-in-Well Quantum Well Lasers}, booktitle = {IEEE PHOTONICS 2011}, year = 2011, } @inproceedings{CTT100630525, author = {Masanori Nakahama and Norihiko Nakata and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Giant Wavelength-temperature Dependence and Electro-thermal Tuning of MEMS VCSEL}, booktitle = {}, year = 2011, } @inproceedings{CTT100630910, author = {Xiaodong Gu and Toshikazu Shimada and Ayumi Fuchida and Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {EXPERIMENTAL DEMONSTRATION OF BEAM-STEERING BASED ON SLOW-LIGHT WAVEGUIDE AMPLIFIER}, booktitle = {}, year = 2011, } @inproceedings{CTT100632563, author = {Akihiro Matsutani and Yuuki Hashidume and Hideo Ohtsuki and Fumio Koyama}, title = {Si based High-index-contrast-grating Structure fabricated by High Temperature Cl2 Inductively Coupled Plasma Etching using Thermal Nanoimprint Resist Mask}, booktitle = {}, year = 2011, } @inproceedings{CTT100641304, author = {松谷晃宏}, title = {ヴァイオリン演奏音におけるスコルダトゥーラによる音色変化の実験的考察}, booktitle = {}, year = 2011, } @inproceedings{CTT100630375, author = {淵田 歩 and 松谷 晃宏 and 小山 二三夫}, title = {スローライトを利用した小型光スイッチの動特性評価}, booktitle = {2011年電子情報通信学会エレクトロニクスソサイエティ大会}, year = 2011, } @inproceedings{CTT100630365, author = {中濵 正統 and 佐野 勇人 and 中田 紀彦 and 松谷 晃宏 and 小山 二三夫}, title = {MEMS 技術を用いた面発光レーザの波長温度係数の増大Ⅲ}, booktitle = {2011年秋季 第72回応用物理学会学術講演会}, year = 2011, } @inproceedings{CTT100629226, author = {佐野勇人 and 中田紀彦 and 中濵正統 and 松谷晃宏 and 小山二三夫}, title = {アサーマル面発光レーザの波長掃引特性}, booktitle = {第72回応用物理学会学術講演会}, year = 2011, } @inproceedings{CTT100630388, author = {松谷 晃宏 and 橋爪 佑樹 and Hideo Ohtsuki and 小山 二三夫}, title = {ナノインプリントプロセスとCl2-ICPエッチングによるSi-HCGの製作と光学特性の評価}, booktitle = {2011年秋季 第72回応用物理学会学術講演会}, year = 2011, } @inproceedings{CTT100636328, author = {比嘉康貴 and 反町幹夫 and 西野目卓弥 and 岩崎 創 and 松谷晃宏 and 宮本智之}, title = {Well-in-Well量子井戸レーザの相対雑音強度特性}, booktitle = {}, year = 2011, } @inproceedings{CTT100628241, author = {Akihiro Matsutani and Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Athermal Operations and Giant Temperature Dependence of Micromachined VCSELs}, booktitle = {International Nano-Optoelectronics Workshop, iNOW2011}, year = 2011, } @inproceedings{CTT100621186, author = {Hiroshi Takanashi and Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi and Hiroyuki Uenohara}, title = {Investigation of Optimized Condition of a Passively Mode-Locked VCSEL with Double-Path Resonance Configuration}, booktitle = {}, year = 2011, } @inproceedings{CTT100620127, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Reflection-type Slow Light Optical Switches Using Current Injection}, booktitle = {}, year = 2011, } @inproceedings{CTT100620123, author = {Hayato Sano and Norihiko Nakata and Masanori Nakahama and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM}, booktitle = {}, year = 2011, } @inproceedings{CTT100620126, author = {Masanori Nakahama and Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure}, booktitle = {}, year = 2011, } @inproceedings{CTT100629023, author = {林未来郎 and 松谷晃宏 and 磯部敏宏 and 松下祥子 and 中島章}, title = {酸化チタン-電解液系によるワイドフルフォトニックバンドギャップ}, booktitle = {}, year = 2011, } @inproceedings{CTT100620283, author = {佐野 勇人 and 中田 紀彦 and 中濵 正統 and 松谷 晃宏 and 小山 二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長可変動作とアサーマル動作の両立}, booktitle = {春季第58回応用物理学関係連合講演会}, year = 2011, } @inproceedings{CTT100620289, author = {松谷晃宏 and 橋爪佑樹 and 大槻秀夫 and 小山二三夫}, title = {ナノインプリントレジストをマスクに用いたCl2-ICP エッチングによるSi-HCG 構造の形成}, booktitle = {春季第58回応用物理学関係連合講演会}, year = 2011, } @inproceedings{CTT100621193, author = {高梨 裕 and 加藤 智行 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎 and 植之原裕行}, title = {凹面鏡を用いた二往復共振器受動モード同期VCSELの動作特性}, booktitle = {}, year = 2011, } @inproceedings{CTT100620275, author = {中濵 正統 and 佐野 勇人 and 中田 紀彦 and 松谷 晃宏 and 小山 二三夫}, title = {M E M S 技術を用いた面発光レーザの波長温度係数の増大Ⅱ}, booktitle = {春季 第58回応用物理学関係連合講演会}, year = 2011, } @inproceedings{CTT100620132, author = {淵田 歩 and 松谷 晃宏 and 小山 二三夫}, title = {スローライトを利用した交差角 30 度の小型光スイッチ}, booktitle = {2011年電子情報通信学会総合大会}, year = 2011, } @inproceedings{CTT100615612, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Dry Etching of Si by Solid Source I2 Inductively Coupled Plasma}, booktitle = {}, year = 2010, } @inproceedings{CTT100613932, author = {Ayumi Fuchida and Takeru Sakairi and Akihiro Matsutani and Fumio Koyama}, title = {Characterizations of Reflection-type Slow Light Optical Switches}, booktitle = {}, year = 2010, } @inproceedings{CTT100612970, author = {今村明博 and 松谷晃宏 and 小山二三夫}, title = {多波長面発光レーザアレイと集積可能な小型光合波器の検討}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100612967, author = {佐野勇人 and 中田紀彦 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長温度係数制御}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100612963, author = {松谷 晃宏 and 大槻 秀夫 and 小山 二三夫}, title = {I2-ICP によるSi の反応性イオンエッチング}, booktitle = {第71 回応用物理学会学術講演会}, year = 2010, } @inproceedings{CTT100603700, author = {坂入健 and 坂口孝浩 and 松谷晃宏 and 小山二三夫}, title = {スローライト光導波路デバイスのゲート動作とスポットサイズ分散特性}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100609252, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer}, booktitle = {}, year = 2010, } @inproceedings{CTT100609250, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever}, booktitle = {}, year = 2010, } @inproceedings{CTT100612960, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure}, booktitle = {}, year = 2010, } @inproceedings{CTT100612959, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array}, booktitle = {}, year = 2010, } @inproceedings{CTT100608335, author = {Ayumi Fuchida and Akihiro Matsutani and Fumio Koyama}, title = {Compact Reflection-type Optical Switch with Slowing Light}, booktitle = {}, year = 2010, } @inproceedings{CTT100607625, author = {Hayato Sano and Norihiko Nakata and Akihiro Matsutani and Fumio Koyama}, title = {Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation}, booktitle = {}, year = 2010, } @inproceedings{CTT100607626, author = {Norihiko Nakata and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Proposal of Multi-Wavelength Integration of Athermal GAAS VCSEL Array with Thermally Actuated Cantilever Structure}, booktitle = {}, year = 2010, } @inproceedings{CTT100603698, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {Ar/F2 を用いたSi の反応性イオンエッチングにおけるプラズマの特性}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100604531, author = {Takayoshi Fujisawa and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {In-plane Optical Coupling to Bragg Reflector Slow Light Waveguide Devices}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604530, author = {Ayumi Fuchida and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Optical Switch with Slowing Light in Bragg Reflector Waveguide}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604527, author = {Yuuki Hashidume and Akihiro Matsutani and Fumio Koyama}, title = {Fabrication of High Contrast Grating with Nanoimprint Process}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604525, author = {Norihiko Nakata and Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Multi-Wavelength Integration of Athermal VCSELs with a Micromachined Cantilever}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100604524, author = {Hayato Sano and Norihiko Nakata and Matsutani Akihiro and Fumio Koyama}, title = {Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure}, booktitle = {G-COE International Symposium}, year = 2010, } @inproceedings{CTT100603705, author = {中田紀彦 and 佐野勇人 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いたアサーマル面発光レーザの多波長集積化の検討Ⅱ}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100603704, author = {佐野勇人 and 中田紀彦 and 松谷晃宏 and 小山二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長トリミング}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100603699, author = {橋爪佑樹 and 松谷晃宏 and 小山二三夫}, title = {熱ナノインプリントを用いた高屈折率差サブ波長回折格子製作の検討}, booktitle = {第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100801903, author = {高梨裕 and 加藤 智行 and 松谷晃宏 and 坂口 孝弘 and 植之原裕行 and 小林 功郎}, title = {凹面鏡とVCSELを用いた二往復共振器モード同期レーザにおける位置ずれトレランス解析}, booktitle = {2010年電子情報通信学会総合大会, 仙台, 2010年3月}, year = 2010, } @inproceedings{CTT100593338, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Dry Etching of Si using Ar/F2 Plasma}, booktitle = {}, year = 2009, } @inproceedings{CTT100591587, author = {佐野勇人 and 松谷晃宏 and 小山二三夫}, title = {熱駆動マイクロマシンを用いたGaAs系面発光レーザのアサーマル動作}, booktitle = {第70回応用物理学会学術講演会}, year = 2009, } @inproceedings{CTT100590182, author = {Hayato Sano and Akihiro Matsutani and Fumio Koyama}, title = {Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure}, booktitle = {}, year = 2009, } @inproceedings{CTT100588914, author = {Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array}, booktitle = {}, year = 2009, } @inproceedings{CTT100586604, author = {Hiroshi Takanashi and Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Takashi Miyaguchi and Kohroh Kobayashi}, title = {Actively mode-locked VCSEL module with double-path resonance configuration}, booktitle = {}, year = 2009, } @inproceedings{CTT100661910, author = {FUMIO KOYAMA and Koichi Hasebe and Yusuke Mada and Takeru Sakairi and Akihiro Matsutachi}, title = {High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters}, booktitle = {2009 International Conference on Indium Phosphide and Related Materials}, year = 2009, } @inproceedings{CTT100661912, author = {FUMIO KOYAMA and Padullaparthi Babu Dayal and Akihiro Imamura and Takahiro Sakaguchi and Akihiro Matsutani}, title = {Multiple-Wavelength GaInAs/GaAs VCSELs with Grading a Spacer Layer for Short Reach WDM Applications}, booktitle = {2009 International Conference on Indium Phosphide and Related Materials}, year = 2009, } @inproceedings{CTT100576441, author = {佐野 勇人 and 松谷 晃宏 and 小山 二三夫}, title = {マイクロマシン構造を用いた面発光レーザの波長温度係数制御}, booktitle = {信学技報}, year = 2009, } @inproceedings{CTT100576410, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {XeF2プラズマによるSiのドライエッチングにおける発光分光観測}, booktitle = {第56回応用物理学関係連合講演会}, year = 2009, } @inproceedings{CTT100586603, author = {高梨 裕 and 加藤 智行 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {二つのVCSELメサを用いた受動モード同期レーザ}, booktitle = {}, year = 2009, } @inproceedings{CTT100586602, author = {加藤 智行 and 高梨 裕 and 宮口 孝司 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {VCSELを用いた小型アクティブモード同期レーザモジュール}, booktitle = {}, year = 2009, } @inproceedings{CTT100576405, author = {BABU DAYAL and 今村 明博 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {波長制御層によるGaInAs/GaAs多波長面発光レーザアレイの製作}, booktitle = {第56回応用物理学関係連合講演会}, year = 2009, } @inproceedings{CTT100576401, author = {馬田 祐輔 and 長谷部浩一 and 坂入 健 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {光フィルタリングによる直接変調面発光レーザの変調帯域拡大}, booktitle = {第56回応用物理学関係連合講演会}, year = 2009, } @inproceedings{CTT100576397, author = {菅原雄大 and 松谷晃宏 and 小山二三夫 and 宮本智之}, title = {量子構造混晶化を用いた微小化面発光レーザ(II)}, booktitle = {}, year = 2009, } @inproceedings{CTT100576394, author = {菅原雄大 and 松谷晃宏 and 小山二三夫 and 宮本智之}, title = {横方向量子構造混晶化による面発光レーザの特性向上}, booktitle = {}, year = 2009, } @inproceedings{CTT100576392, author = {今村 明博 and 長谷部 浩一 and 松谷 晃宏 and 小山 二三夫}, title = {多波長面発光レーザアレイと集積可能な小型光合波器の検討}, booktitle = {電子情報通信学会2009総合大会}, year = 2009, } @inproceedings{CTT100570843, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {XeF2プラズマによるSiの垂直平滑ドライエッチング}, booktitle = {第26回プラズマプロセシング研究会}, year = 2009, } @inproceedings{CTT100570432, author = {Akihiro Imamura and Koichi Hasebe and Akihiro Matsutani and Fumio Koyama}, title = {Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array}, booktitle = {}, year = 2009, } @inproceedings{CTT100566595, author = {P. Babu Dayal and Jun Nakajima and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications}, booktitle = {21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008}, year = 2008, } @inproceedings{CTT100566594, author = {Ayumi Fuchida and P. Babu Dayal and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Low Polarization Dependence of Bragg Reflector Slow Light Waveguides}, booktitle = {}, year = 2008, } @inproceedings{CTT100569672, author = {加藤 智行 and 高梨 裕 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {外部凹面鏡を用いた能動モード同期VCSEL の高繰り返し周波数・低閾値電流動作}, booktitle = {}, year = 2008, } @inproceedings{CTT100591037, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma}, booktitle = {}, year = 2008, } @inproceedings{CTT100569665, author = {Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi}, title = {31 GHz SUB-HARMONIC ACTIVE MODE-LOCKED VCSEL WITH LOW THRESHOLD CURRENT}, booktitle = {}, year = 2008, } @inproceedings{CTT100569663, author = {Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi}, title = {24GHz Mode-Locking of VCSEL with External Concave Mirror}, booktitle = {}, year = 2008, } @inproceedings{CTT100569677, author = {加藤 智行 and 高梨 裕 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {VCSELと凹面鏡を用いた31GHzアクティブモード同期}, booktitle = {}, year = 2008, } @inproceedings{CTT100570315, author = {淵田 歩 and P. Babu Dayal and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫}, title = {スローライト光導波路における挿入損失の偏光依存性}, booktitle = {2008年度電子情報通信学会通信ソサイエティ大会}, year = 2008, } @inproceedings{CTT100570319, author = {淵田 歩 and P. Babu Dayal and 坂口 孝浩 and 黒木 圭介 and 松谷 晃宏 and 小山 二三夫}, title = {スローライトを利用した小型光ゲート素子の検討}, booktitle = {第69回応用物理学会学術講演会}, year = 2008, } @inproceedings{CTT100570324, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {XoF2プラズマによるSiの垂直平滑ドライエッチング}, booktitle = {第69回応用物理学会学術講演会}, year = 2008, } @inproceedings{CTT100570325, author = {松谷晃宏 and 大槻秀夫 and 小山二三夫}, title = {固体ソースH₂Oプラズマの生成とCaF₂のドライエッチングへの応用}, booktitle = {第55回応用物理学関係連合講演会}, year = 2008, } @inproceedings{CTT100588773, author = {Keisuke Kuroki and Ayumi Fuchida and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama}, title = {Miniature Optical Gate with VCSEL-based Slow Light Bragg Reflector Waveguide}, booktitle = {}, year = 2008, } @inproceedings{CTT100569662, author = {Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi}, title = {Double-path resonance of a mode-locked VCSEL using a concave mirror}, booktitle = {}, year = 2008, } @inproceedings{CTT100555413, author = {吉岡孝兼 and 松谷 晃宏 and 加藤 智行 and 小林 功郎}, title = {小コア光導波路によるLSI間高密度光接続の研究}, booktitle = {}, year = 2008, } @inproceedings{CTT100555417, author = {加藤 智行 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {凹面鏡による二重共振経路を用いたモード同期VCSEL}, booktitle = {}, year = 2008, } @inproceedings{CTT100555231, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Dry Etching of CaF₂by Solid Source H₂O(ice) Plasma}, booktitle = {}, year = 2007, } @inproceedings{CTT100548035, author = {Tomoyuki Kato and Akihiro Matsutani and Takahiro Sakaguchi and Kohroh Kobayashi}, title = {Model-Locked VCSEL with External Cavity Formed by Concave Mirror}, booktitle = {}, year = 2007, } @inproceedings{CTT100555415, author = {加藤 智行 and 松谷 晃宏 and 坂口 孝浩 and 小林 功郎}, title = {凹面鏡を用いた複合共振器 VCSEL による 10GHz モード同期}, booktitle = {}, year = 2007, } @inproceedings{CTT100555358, author = {長谷部 浩一 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫 and 西山 伸彦 and 香野 花沙鈴 and 石 鍾恩}, title = {1.55μm帯MEMS構造面発光レーザの横モード・偏光特性}, booktitle = {第68回応用物理学会秋季講演会}, year = 2007, } @inproceedings{CTT100555321, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Decreasing of Residual Oxygen by using Si Solid Source in Cl2 -ICP Etching of Al}, booktitle = {18th International Symposium on Plasma Chemistry, ISPC18}, year = 2007, } @inproceedings{CTT100555274, author = {Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama}, title = {Plasma characterization of H2O-inductively coupled plasma for dry etching}, booktitle = {17th International Vacuum Congress, IVC-17}, year = 2007, } @inproceedings{CTT100548006, author = {Koichi Hasebe and Wiganes Janto and Nobuhiko Nishiyama and Catherine Caneau and Takahiro Sakaguchi and Akihiro Matsutani and Fumio Koyama and Chung-En Zah}, title = {Transverse-mode and Polarization Characteristics of 1.55 μm Micromachined VCSELs}, booktitle = {12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007}, year = 2007, } @inproceedings{CTT100555279, author = {Akihiro Matsutani and Naoki Jogan and Fumio Koyama and Kohroh Kobayashi}, title = {Etching Chracteristics of Low-k Polymer for Wide Modulation Bandwidth VCSELs}, booktitle = {12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007}, year = 2007, } @inproceedings{CTT100555281, author = {Naoto Kitabayashi and Akihiro Imamura and Akihiro Matsutani and Fumio Koyama}, title = {Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array}, booktitle = {12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007}, year = 2007, } @inproceedings{CTT100555336, author = {ジャント ウィガネス and 長谷部 浩一 and 西山 伸彦 and 香野 花沙鈴 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫 and 石 鐘恩}, title = {バイモルフ効果によるマイクロマシン面発光レーザの波長温度無依存動作}, booktitle = {}, year = 2007, } @inproceedings{CTT100555335, author = {Naoto Kitabayashi and Akihiro Matsutani and Fumio Koyama}, title = {Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array}, booktitle = {The 54th Spring Meeting of Japan Society of Applied Physics and Related Societie}, year = 2007, } @inproceedings{CTT100555331, author = {Akihiro Matsutani and Hideo Ohtsuki and Fuimio Koyam}, title = {Plasma Characterization by Optical Emission Analysi}, booktitle = {The 54th Spring Meeting of Japan Society of Applied Physics and Related Societies}, year = 2007, } @inproceedings{CTT100547863, author = {Naoki Jogan and Takeshi Uchida and Akihiro Matsutani and Tomoyuki Miyamoto and Kohroh Kobayashi}, title = {Wide modulation bandwidth VCSELs with side current injection and copper-plated heatsink}, booktitle = {}, year = 2007, } @inproceedings{CTT100547938, author = {城岸直輝 and 田中紳公 and 内田武志 and 松谷晃宏 and 宮本智之 and 小林功郎}, title = {金属埋め込み微小メサ構造を用いた面発光レーザの発振特性}, booktitle = {}, year = 2007, } @inproceedings{CTT100555627, author = {松谷 晃宏 and Hideo Ohtsuki and 小山 二三夫}, title = {水蒸気導入によるエッチング用H2O-ICPのプラズマ観測}, booktitle = {}, year = 2007, } @inproceedings{CTT100555264, author = {Naoto Kitabayashi and Akihiro Matsutani and Fumio Koyama}, title = {Multi-Wavelength Vertical Cavity Surface Emitting Laser Array and Tapered Coupler On Patterned Substrate}, booktitle = {International Symposium Contemporary Photonics Technology, CPT 2007}, year = 2007, } @inproceedings{CTT100508009, author = {ジャント ウィガネス and 長谷部 浩一 and 西山 伸彦 and 香野花 沙鈴 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫 and 石 鐘恩}, title = {マイクロマシン構造を用いた温度無依存共振型フォトディテクタ}, booktitle = {}, year = 2006, } @inproceedings{CTT100507339, author = {城岸直輝 and 内田武志 and 松谷晃宏 and 宮本智之 and 小林功郎}, title = {微小メサ構造を用いた面発光レーザの直接変調特性改善}, booktitle = {}, year = 2006, } @inproceedings{CTT100508001, author = {Wiganes Janto and Koichi Hasebe and Nobuhiko Nishiyama and Catherine Caneau and Takahiro Sakaguchi and Akihiro Matsutani and P. Babu Dayal and Fumio Koyama and Chung-En Zah}, title = {Athermal operation of 1.55 μm InP-based VCSEL with thermally-actuated cantilever structure}, booktitle = {20th International Semiconductor Laser Conference}, year = 2006, } @inproceedings{CTT100508478, author = {Wiganes Janto and Akihiko Matsutani and Fumio Koyama}, title = {Double-Cavity Micromachined Filter With Electrical Actuation}, booktitle = {The 11th Opticalelectoronics and Communications Conference, OECC 2006}, year = 2006, } @inproceedings{CTT100508006, author = {ジャントウィガネス and 西山 伸彦 and 香野花 沙鈴 and 坂口 孝浩 and 松谷 晃宏 and 小山 二三夫 and 石 鐘恩}, title = {InP系温度無依存面発光レーザのためのバイモルフ効果を用いた片持ち梁の製作・評価}, booktitle = {2006年春季第53回応用物理学関連連合講演会}, year = 2006, } @inproceedings{CTT100508007, author = {桜井 康樹 and 横田 康 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {アクチュエータ集積型可変中空光導波路の可変特性と温度無依存化}, booktitle = {}, year = 2006, } @inproceedings{CTT100508008, author = {桜井 康樹 and 松谷 晃宏 and 坂口 孝浩 and 小山 二三夫}, title = {中空光導波路Bragg反射鏡を用いたの可変波長フィルター}, booktitle = {}, year = 2006, } @inproceedings{CTT100508368, author = {Yasuki Sakurai and Hideaki Yamakawa and Yasushi Yokota and Akihiro Matsutani and Takahiro Sakaguchi and Fumio Koyama}, title = {Hollow Waveguide Distributed Bragg Reflector for Widely Tunable Optical Devices}, booktitle = {Optical Fiber Communications Conference 2006}, year = 2006, } @inproceedings{CTT100507331, author = {内山泰宏 and 武田 一隆 and 松谷晃宏 and 内田武志 and 宮本智之 and 小山二三夫}, title = {3電極構造を有する波長可変面発光レーザアレイの波長掃引速度の評価}, booktitle = {}, year = 2006, } @inproceedings{CTT100508367, author = {Akihiro Matsutani and Shigeo Ohtsuki and Fumio Koyama}, title = {Solid Source Dry Etching Process for Ⅲ-V Compound Semiconductors}, booktitle = {6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing}, year = 2006, } @inproceedings{CTT100398782, author = {Kazutaka Takeda and Tomoyuki Miyamoto and Takashi Kondo and Yasuhiro Uchiyama and Akihiro Matsutani and Takeshi Uchiyama and FUMIO KOYAMA}, title = {Wavelength Extension with Cavity Detuning in Vertical Cavity Surface Emitting Lasers}, booktitle = {}, year = 2005, } @inproceedings{CTT100398780, author = {Yasuhiro Uchiyama and Takashi Kondo and Kazutaka Takeda and Akihiro Matsutani and Takeshi Uchida and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Electro-thermal wavelength tuning of 1.2µm GaInAs/GaAs vertical cavity surface emitting laser array}, booktitle = {}, year = 2005, } @inproceedings{CTT100398798, author = {内山泰宏 and 近藤崇 and 武田 一隆 and 松谷晃宏 and 内田武志 and 宮本智之 and 小山二三夫}, title = {3電源極構造による面発光レーザの高精度波長チューニング}, booktitle = {}, year = 2005, } @inproceedings{CTT100398797, author = {武田 一隆 and 宮本智之 and 近藤崇 and 内山泰宏 and 松谷晃宏 and 小山二三夫}, title = {面発光レーザ特性の波長オフセット量依存性に関する検討}, booktitle = {}, year = 2005, } @inproceedings{CTT100398794, author = {金澤慈 and 近藤崇 and 松谷晃宏 and 宮本智之 and 小山二三夫}, title = {1.2µm帯高歪GaInAs/GaAs量子井戸レーザの高温動作時の動特性評価}, booktitle = {}, year = 2005, } @inproceedings{CTT100591092, author = {Wiganes Janto and Fumio Koyama and Akihiro Matsutani}, title = {Tunable Narrowband Optical Micromachined Filter with Double-Cavity Structure}, booktitle = {10th Optoelectronics and Communications Conference, OECC2005}, year = 2005, } @inproceedings{CTT100591061, author = {Yasuki Sakurai and Akihiro Matsutani and Fumio Koyama}, title = {Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation}, booktitle = {Conference on Lasers and Electro-Optics, CLEO2005}, year = 2005, } @inproceedings{CTT100398783, author = {近藤崇 and 内山泰宏 and 武田 一隆 and 松谷晃宏 and 宮本智之 and 小山二三夫}, title = {波長1.2µm高歪GaInAs/GaAs量子井戸面発光レーザとその高速光伝送への応用}, booktitle = {}, year = 2005, } @inproceedings{CTT100398786, author = {内山泰宏 and 近藤崇 and 武田 一隆 and 松谷晃宏 and 内田武志 and 宮本智之 and 小山二三夫}, title = {高密度レーザアレイにおける熱のクロストーク評価}, booktitle = {}, year = 2005, } @inproceedings{CTT100398787, author = {武田 一隆 and 近藤崇 and 内山泰宏 and 松谷晃宏 and 宮本智之 and 小山二三夫}, title = {波長オフセット長波長高歪GaInAs/GaAs面発光レーザの温度特性}, booktitle = {}, year = 2005, } @inproceedings{CTT100398790, author = {金澤慈 and 近藤崇 and 松谷晃宏 and 宮本智之 and 小山二三夫}, title = {1.2µm帯横モード制御高歪GaInAs/GaAs量子井戸レーザの高温動作}, booktitle = {}, year = 2005, } @inproceedings{CTT100591053, author = {Yasuki Sakurai and Yasushi Yokota and Akihiro Matsutani and Fumio Koyama}, title = {Temperature Insensitive Operation of Widely Tunable Hollow Waveguide Grating}, booktitle = {Conference on Optical Fiber Communications, OFC2005}, year = 2005, } @inproceedings{CTT100592130, author = {FUMIO KOYAMA and Kazutaka Takeda and Tomoyuki Miyamoto and Takashi Kondo and Yasuhiro Uchiyama and Akihiro Matsutani and Fumio Koyama}, title = {Lasing characteristics of 1.26µm wavelength highly-strained GaInAs/GaAs vertical cavity surface emitting laser by cavity detuning}, booktitle = {}, year = 2005, } @inproceedings{CTT100502657, author = {Takashi Kondo and Yasuhiro Uchiyama and Kazutaka Takeda and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Highly strained GaInAs/GaAs 1.21µm vertical cavity surface emitting laser with single-mode output power of 3mW}, booktitle = {}, year = 2004, } @inproceedings{CTT100505359, author = {Yasuhiro Uchiyama and Takashi Kondo and Kazutaka Takeda and Akihiro Matsutani and Jiro Hashizume and Uchida Takeshi and Tomoyuki Miyamoto and Fumio Koyama}, title = {1.2 μm band high-density multiple-wavelength vertical cavity surface emitting laser array}, booktitle = {}, year = 2004, } @inproceedings{CTT100505358, author = {Takashi Kondo and Yasuhiro Uchiyama and Kazutaka Takeda and Akihiro Matsutani and Tomoyuki Miyamoto and Fumio Koyama}, title = {Highly strained GaInAs/GaAs 1.21 μm vertical cavity surface emitting laser with single-mode output power of 3mW}, booktitle = {}, year = 2004, } @inproceedings{CTT100691995, author = {武田一隆 and 近藤崇 and 内山泰宏 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {波長オフセットによる高歪GaInAs/GaAs量子井戸面発光レーザの長波長化}, booktitle = {}, year = 2004, } @inproceedings{CTT100502672, author = {近藤崇 and 内山泰宏 and 武田一隆 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {波長1.2µm高歪GaInAs/GaAs量子井戸面発光レーザの特性改善}, booktitle = {}, year = 2004, } @inproceedings{CTT100502674, author = {内山泰宏 and 近藤崇 and 武田一隆 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {1.2µm帯GaInAs/GaAs 面発光レーザアレイの高密度集積化}, booktitle = {}, year = 2004, } @inproceedings{CTT100661930, author = {W. Janto and F. Koyama and A. Matsutan}, title = {GaAs/GaAiAs Micromachined Double-Cavity Structure for Tunable Filter and Dispersion Compensator}, booktitle = {OptoElectronics and Communications Conference/International Conference on Optical Internet}, year = 2004, } @inproceedings{CTT100661935, author = {Y. Yokota and T. Miura and M. Ishikawa and A. Matsutani and F. Koyama}, title = {Fabrication of Hollow Optical Waveguide with Wafer Bonding}, booktitle = {OptoElectronics and Communications Conference/International Conference on Optical Internet}, year = 2004, } @inproceedings{CTT100539619, author = {荒井昌和 and 近藤崇 and 尾野村章弘 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {多波長面発光レーザアレイのための凸凹パターン基板の設計}, booktitle = {}, year = 2004, } @inproceedings{CTT100692126, author = {尾野村章弘 and 荒井昌和 and 近藤崇 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {トレンチ構造を導入した面発光レーザアレイの高密度集積化}, booktitle = {}, year = 2004, } @inproceedings{CTT100639925, author = {Akihiro Matsutani}, title = {Relationship between Force Distributions of Fingers for Bow Holding and Tones in Violin Performance}, booktitle = {}, year = 2004, } @inproceedings{CTT100692163, author = {近藤崇 and 荒井昌和 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {高歪GaInAs/GaAs量子井戸面発光レーザを用いた10Gb/s, 10km SMF伝送}, booktitle = {}, year = 2004, } @inproceedings{CTT100691947, author = {Masakazu Arai and Takashi Kondo and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Muitiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with record wide wavelength span}, booktitle = {61th Annual Device Research Conference}, year = 2003, } @inproceedings{CTT100692066, author = {荒井昌和 and 近藤崇 and 尾野村章弘 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {成長圧力を変化させて製作したパターン基板上多波長面発光レーザアレイの広波長域化}, booktitle = {}, year = 2003, } @inproceedings{CTT100477105, author = {Akihiro Onomura and Masakazu Arai and Takashi Kondo and Akihiro Matsutani and Yasuyuki Miyamoto and FUMIO KOYAMA}, title = {Densely integrated multiple wavelength vertical surface emitting laser array}, booktitle = {}, year = 2002, } @inproceedings{CTT100691893, author = {荒井昌和 and 近藤崇 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {GaInAs/GaAs多波長面発光レーザアレーの発振波長の広帯域化}, booktitle = {第63回応用物理学会学術講演会}, year = 2002, } @inproceedings{CTT100477100, author = {Masakazu Arai and Takashi Kondo and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with wavelength span of over 100 nm}, booktitle = {}, year = 2002, } @inproceedings{CTT100692134, author = {尾野村章弘 and 荒井昌和 and 近藤崇 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {高密度多波長面発光レーザ}, booktitle = {第63回応用物理学会学術講演会}, year = 2002, } @inproceedings{CTT100477091, author = {Masakazu Arai and Takashi Kondo and Munechika Azuchi and Takeshi Uchida and Akihiro Matsutani and Tomoyuki Miyamoto and FUMIO KOYAMA}, title = {1.2µm band multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array on patterned substrate}, booktitle = {}, year = 2002, } @inproceedings{CTT100476772, author = {荒井昌和 and 近藤崇 and 安土宗近 and 内田武志 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {1.2 µm帯多波長面発光レーザアレーの単一モード光ファイバ伝送特性}, booktitle = {}, year = 2002, } @inproceedings{CTT100476314, author = {近藤崇 and 荒井昌和 and 安土宗近 and 内田武志 and 松谷 晃宏 and 宮本智之 and 小山二三夫}, title = {波長1.1µm帯面発光レーザを用いた単一モード光ファイバ伝送}, booktitle = {}, year = 2002, } @inproceedings{CTT100477078, author = {Shigeki Makino and Tomoyuki Miyamoto and Takeo Kageyama Yoshihiko Ikenaga and Nobuhiko Nishiyama and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Room temperature continuous-wave operation of GaInNAs/GaAs VCSELs grown by chemical beam epitaxy with output power exceeding 1mW}, booktitle = {}, year = 2001, } @inproceedings{CTT100599162, author = {Takeo Kageyama and Tomoyuki Miyamoto and Shigeki Makino and Yoshihiko Ikenaga and Nobuhiko Nishiyama and Akihiro Matsutani and Fumio Koyama and Kenichi Iga}, title = {Room temperature continuous-wave operation of GaInNAs/GaAs VCSELs grown by chemical beam epitaxy with output power exceeding 1mW}, booktitle = {Electron. Lett.}, year = 2001, } @inproceedings{CTT100447745, author = {Satoshi Shinada and Fumio Koyama and Nobuhiko Nishiyama and Masakazu Arai and Akihiro Matsutani and Kenya Goto and Kenichi Iga}, title = {Optical near field by vertical cavity surface emitting laser}, booktitle = {Trans. IEICE}, year = 2000, } @inproceedings{CTT100664242, author = {Zhibiao Chen and Dietmar Schlenker and FUMIO KOYAMA and Tomoyuki Miyamoto and Akihiro Matsutani and K. Iga}, title = {High temperature characteristics of highly strained 1.2 µm InGaAs/GaAs quantum well lasers}, booktitle = {}, year = 1999, } @inproceedings{CTT100477171, author = {陳志標 and シュレンカーディトマー and 小山二三夫 and 宮本智之 and 松谷 晃宏 and 伊賀健一}, title = {高特性温度高歪1.2µm帯InGaAs/GaAs量子井戸レーザ}, booktitle = {}, year = 1999, } @inproceedings{CTT100662424, author = {F. Koyama and D. Schlenker and T. Miyamoto and Z. Chen and A. Matsutani and T. Sakaguchi and K. Iga}, title = {2 Gbit/s single-mode fiber data transmission using 1.2 μm heatsink-free GaInAs/GaAs laser for Gbit/s-LAN}, booktitle = {}, year = 1999, } @inproceedings{CTT100662428, author = {F. Koyama and T. Miyamoto and Z. Chen and A. Matsutani and T. Sakaguchi and K. Iga}, title = {Highly strained GaInAs/GaAs QW for 1.2 μm surface emitting lasers}, booktitle = {}, year = 1999, } @inproceedings{CTT100477177, author = {小山二三夫 and シュレンカーディトマー and 宮本智之 and 陳志標 and 松谷 晃宏 and 伊賀健一}, title = {1.2µm帯GaInAs/GaAsレーザを用いた単一モード光ファイバ伝送}, booktitle = {}, year = 1999, } @inproceedings{CTT100661497, author = {M. Fujita and T. Baba and A. Matsutani and F. Koyama and K. Iga}, title = {A novel GaInAsP microcylinder laser with AlInAs(Ox) cladding}, booktitle = {}, year = 1999, } @inproceedings{CTT100661715, author = {松谷晃宏 and 大槻 秀夫 and 小山二三夫 and 伊賀健一}, title = {Cl2/Xe誘導結合型プラズマ(ICP)によるInPの垂直平滑ドライエッチング}, booktitle = {}, year = 1999, } @inproceedings{CTT100661159, author = {S. Mitsugi and F. Koyama and A. Matsutani and K. Iga}, title = {Fabrication of InP vertical facets by reactive ion etching and sidewall roughness evaluation for semiconductor microvcavities}, booktitle = {CLEO Pacific Rim'99}, year = 1999, } @inproceedings{CTT100661900, author = {A. Matsutani and F. Koyama and K. Iga}, title = {Low bias voltage dry etchinG.f InP by inductively coupled plasma (ICP) using SiCl4/A}, booktitle = {}, year = 1998, } @inproceedings{CTT100477030, author = {Satoshi Mitsugi and FUMIO KOYAMA and Akihiro Matsutani and Tomoyuki Miyamoto and Kenichi Iga}, title = {A design of polygonal micro-ring cavities for photonic integrated circuits}, booktitle = {}, year = 1996, } @inproceedings{CTT100477138, author = {三木聡 and 小山二三夫 and 松谷 晃宏 and 宮本智之 and 伊賀健一}, title = {半導体多角形マイクロリング光共振器の微小化のための設計}, booktitle = {}, year = 1996, } @inproceedings{CTT100477133, author = {三木聡 and 松谷 晃宏 and 宮本智之 and 高田剛 and 小山二三夫 and 伊賀健一}, title = {CH4/H2系RIEによる1.55µm帯GaInAsP/InPマイクロアークリングレーザの製作}, booktitle = {}, year = 1996, } @inproceedings{CTT100477130, author = {三木聡 and 松谷 晃宏 and 宮本智之 and 栗田洋一郎 and 高田剛 and 小山二三夫 and 伊賀健一}, title = {1.55µm帯GaInAsP/InPマイクロアークリングレーザ}, booktitle = {}, year = 1995, } @inproceedings{CTT100661161, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661163, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661164, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661166, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661167, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661168, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661173, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661169, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661170, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100661160, author = {T. Baba and M. Hamasaki and N. Watanabe and A. Matsutani and T. Mukaihara and F. Koyama and K.Iga}, title = {A novel short cavity laser with deep grating DBRs}, booktitle = {}, year = 1995, } @inproceedings{CTT100660947, author = {Y. Hayashi and T. Mukaihara and N. Hatori and N. Ohnoki and A. Matsutani and F. Koyama and K. Iga}, title = {A record low threshold InGaAs/GaAlAs vertical-cavity surface-emitting laser}, booktitle = {}, year = 1995, } @inproceedings{CTT100660996, author = {T. Mukaihara and Y. Hayashi and N. Hatori and N. Ohnoki and A. Matsutani and F. Koyama and K. Iga}, title = {0.33 mA threshold InGaAs/GaAs vertical-cavity surface-emitting lasers grown by MOCVD}, booktitle = {}, year = 1995, } @inproceedings{CTT100660998, author = {F. Koyama and K. Suzuki and A.Matsutani and J. Kato and T. Mukaihara and K. Iga}, title = {Active semiconductor power splitters with sub-micron wide input aperture}, booktitle = {}, year = 1995, } @inproceedings{CTT100648448, author = {F. Koyama and S. Mitsugi and J. Kato and A. Matsutani and K. Suzuki and T. Mukaihara and K. Iga}, title = {RIBE micro-fabrication of semiconductor photonic devices for micro-photonic integrated circuit}, booktitle = {}, year = 1994, } @inproceedings{CTT100647643, author = {S.Mitsugi and J. Kato and F. Koyama and A.Matsutani and T. Mukaihara and K. Iga}, title = {GaInAs/GaAs micro-arc ring semiconductor lasers}, booktitle = {}, year = 1994, } @inproceedings{CTT100647640, author = {A. Matsutani and F. Koyama and K. Iga}, title = {Measurement of sidewall roughness of InP etched by RIBE}, booktitle = {}, year = 1994, } @inproceedings{CTT100477124, author = {三木聡 and 加藤淳一 and 松谷 晃宏 and 宮本智之 and 向原智一 and 小山二三夫 and 伊賀健一}, title = {マイクロアークリングレーザの微小化に関する検討}, booktitle = {}, year = 1994, } @inproceedings{CTT100647215, author = {K. Iga and F. Koyama and A. Matsutani}, title = {RIBE and RIE for micro cavity surface emitting lasers-technology and damage characterization}, booktitle = {}, year = 1991, } @inproceedings{CTT100647502, author = {A. Matsutani and F. Koyama and K. Iga}, title = {Micro dry etching process for vertical cavity surface emitting lasers}, booktitle = {}, year = 1991, } @misc{CTT100885534, author = {松谷晃宏}, title = {花と風}, year = 2023, } @misc{CTT100867191, author = {松谷晃宏}, title = {科学・技術と研究}, year = 2022, } @misc{CTT100865070, author = {松谷晃宏}, title = {雲棚引くマイクロ富士}, year = 2022, } @misc{CTT100863523, author = {松谷晃宏}, title = {タンポポの綿毛}, year = 2021, } @misc{CTT100849005, author = {松谷晃宏}, title = {ミクロの世界の石畳}, year = 2021, } @misc{CTT100843191, author = {松谷晃宏}, title = {大気の揺動}, year = 2021, } @misc{CTT100833033, author = {松谷晃宏}, title = {楽器・写真と応用物理 ━ 芸術と科学の懸け橋 ━}, year = 2020, } @misc{CTT100786977, author = {松谷晃宏}, title = {不可視光線}, year = 2019, } @misc{CTT100770217, author = {松谷晃宏}, title = {微滴の美}, year = 2018, } @misc{CTT100770216, author = {松谷晃宏}, title = {回折格子}, year = 2018, } @misc{CTT100758838, author = {松谷晃宏}, title = {ピンホールカメラ}, year = 2018, } @misc{CTT100749197, author = {松谷晃宏}, title = {丸と四角の不思議空間}, year = 2017, } @misc{CTT100743492, author = {松谷晃宏}, title = {屈折望遠鏡の色収差}, year = 2017, } @misc{CTT100734660, author = {松谷晃宏}, title = {蜘蛛の糸}, year = 2016, } @misc{CTT100710623, author = {松谷晃宏}, title = {三日月の七色変化}, year = 2016, } @misc{CTT100709197, author = {松谷晃宏}, title = {夜の月と昼の月}, year = 2016, } @misc{CTT100701011, author = {松谷晃宏}, title = {ヴァイオリン弦の舞踏}, year = 2016, } @misc{CTT100700451, author = {松谷晃宏}, title = {演奏中のヴァイオリン弦の振動}, year = 2016, } @misc{CTT100630431, author = {中濵 正統 and 佐野 勇人 and 中田 紀彦 and 松谷 晃宏 and 小山 二三夫}, title = {MEMS 技術を用いた面発光レーザの波長温度係数の増大と波長可変動作}, year = 2011, } @misc{CTT100617680, author = {松谷晃宏 and 小山二三夫 and 大槻秀夫}, title = {固体ソースドライエッチング}, year = 2010, } @misc{CTT100613405, author = {淵田歩 and 松谷晃宏 and 小山二三夫}, title = {スローライトを利用した反射型光スイッチの小型化}, year = 2010, } @misc{CTT100640040, author = {akihiro matsutani}, title = {A Study of Reactive Ion Beam Etching Process for Optoelectronic Micro-Devices}, year = 1999, } @misc{CTT100865162, author = {栁田保子 and 松谷晃宏 and 藤本美穂}, title = {温度応答性レンズ}, howpublished = {公開特許}, year = 2021, month = {}, note = {特願2020-023379(2020/02/14), 特開2021-128278(2021/09/02)} } @misc{CTT100631716, author = {松谷晃宏 and 高田綾子}, title = {単一細胞分離用プレート}, howpublished = {登録特許}, year = 2014, month = {}, note = {特願2010-017287(2010/01/28), 特開2011-152108(2011/08/11), 特許第5622189号(2014/10/03)} } @phdthesis{CTT100640040, author = {akihiro matsutani}, title = {A Study of Reactive Ion Beam Etching Process for Optoelectronic Micro-Devices}, school = {東京工業大学}, year = 1999, }