@article{CTT100654550,
  author = {Mariam Md Ghazaly and Kaiji Sato},
  title = {Characteristic switching of a multilayer thin electrostatic actuator by a driving signal for an ultra-precision motion stage},
  journal = {Precision Engineering},
  year = 2013,
}

@article{CTT100635410,
  author = {Mariam Md Ghazaly and Kaiji Sato},
  title = {Basic Characteristics of a Multilayer Thin Electrostatic Actuator Supported by Lubricating Oil for a Fine-motion Stage},
  journal = {Precision Engineering},
  year = 2012,
}

@inproceedings{CTT100654559,
  author = {Kaiji Sato and Mariam Md Ghazaly},
  title = {Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid},
  booktitle = {Proceedings of the 5th International Conference on Positioning Technology},
  year = 2012,
}

@inproceedings{CTT100654553,
  author = {Kaiji Sato and Mariam Md Ghazaly},
  title = {Driving Mode Control of a Multilayered Thin Electrostatic Actuator Supported by Lubricating Oil for Ultra-Precision Positioning},
  booktitle = {Proc. of ASPE2012},
  year = 2012,
}

@inproceedings{CTT100654568,
  author = {佐藤海二 and Mariam Md Ghazaly},
  title = {潤滑液で支持された多層構造静電アクチュエータを用いた精密垂直微動ステージ},
  booktitle = {2012年度精密工学会秋季大会学術講演会講演論文集},
  year = 2012,
}

@inproceedings{CTT100635423,
  author = {佐藤海二 and Mariam Md Ghazaly},
  title = {多層構造静電アクチュエータの摩擦特性切換え機能と超精密位置決め},
  booktitle = {2012年度精密工学会春季大会学術講演会講演論文集},
  year = 2012,
}

@inproceedings{CTT100635422,
  author = {佐藤海二 and Mariam Md Ghazaly},
  title = {潤滑油で支持された多層構造静電アクチュエータの基礎特性と制御},
  booktitle = {2011年度精密工学会秋季大会学術講演会講演論文集},
  year = 2011,
}

@inproceedings{CTT100635414,
  author = {Mariam Md Ghazaly and Kaiji Sato},
  title = {Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication},
  booktitle = {Proceedings of the 6th International Conference on Micromanufacturing (ICOMM2011)},
  year = 2011,
}

@inproceedings{CTT100618973,
  author = {Mariam Md Ghazaly and Kaiji Sato},
  title = {Open-loop Characteristics of a Multilayer Electrostatic Actuator for a Fine Motion Stage},
  booktitle = {Proceedings of the 4th International Conference on Mechatronics Technology},
  year = 2010,
}

@inproceedings{CTT100618974,
  author = {Mariam Md Ghazaly and Kaiji Sato},
  title = {Control Performances of a Fine Motion Stage using a Multilayer Electrostatic Actuator without Precise Balls for Lubrication},
  booktitle = {Proceedings of the 4th International Conference on Mechatronics Technology},
  year = 2010,
}