@article{CTT100635410, author = {Mariam Md Ghazaly and Kaiji Sato}, title = {Basic Characteristics of a Multilayer Thin Electrostatic Actuator Supported by Lubricating Oil for a Fine-motion Stage}, journal = {Precision Engineering}, year = 2012, } @inproceedings{CTT100654559, author = {Kaiji Sato and Mariam Md Ghazaly}, title = {Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid}, booktitle = {Proceedings of the 5th International Conference on Positioning Technology}, year = 2012, } @inproceedings{CTT100654553, author = {Kaiji Sato and Mariam Md Ghazaly}, title = {Driving Mode Control of a Multilayered Thin Electrostatic Actuator Supported by Lubricating Oil for Ultra-Precision Positioning}, booktitle = {Proc. of ASPE2012}, year = 2012, } @inproceedings{CTT100654568, author = {佐藤海二 and Mariam Md Ghazaly}, title = {潤滑液で支持された多層構造静電アクチュエータを用いた精密垂直微動ステージ}, booktitle = {2012年度精密工学会秋季大会学術講演会講演論文集}, year = 2012, } @inproceedings{CTT100635423, author = {佐藤海二 and Mariam Md Ghazaly}, title = {多層構造静電アクチュエータの摩擦特性切換え機能と超精密位置決め}, booktitle = {2012年度精密工学会春季大会学術講演会講演論文集}, year = 2012, }