@inproceedings{CTT100766273, author = {小平行秀 and 児玉親亮 and 松井知己 and 高橋篤司 and 野嶋茂樹 and 田中聡}, title = {マスク位置ずれに対する耐性を持つLELECUTトリプルパターニングのためのマスク割り当て手法}, booktitle = {次世代リソグラフィワークショップ予稿集 (NGL2015)}, year = 2015, } @inproceedings{CTT100684777, author = {Yukihide Kohira and Chikaaki Kodama and Tomomi Matsui and Atsushi Takahashi and Shigeki Nojima and Satoshi Tanaka}, title = {Yield-aware mask assignment using positive semidefinite relaxation in LELECUT triple patterning}, booktitle = {Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 94270B}, year = 2015, } @inproceedings{CTT100684776, author = {Yukihide Kohira and Tomomi Matsui and Yoko Yokoyama and Chikaaki Kodama and Atsushi Takahashi and Shigeki Nojima and Satoshi Tanaka}, title = {Fast Mask Assignment using Positive Semidefinite Relaxation in LELECUT Triple Patterning Lithography}, booktitle = {Proc. Asia and South Pacific Design Automation Conference 2015 (ASP-DAC 2015)}, year = 2015, }