@article{CTT100721712, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer}, journal = {Microelectronics Reliability}, year = 2016, } @article{CTT100733964, author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology}, journal = {IEEE Proceeding}, year = 2016, } @article{CTT100716349, author = {Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100722024, author = {Kazuya Masu and Daisuke Yamane and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake}, title = {Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease}, journal = {the 46th European Solid-State Device Research Conference (ESSDERC)}, year = 2016, } @article{CTT100704360, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression}, journal = {Materials Transactions}, year = 2016, } @article{CTT100708352, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 1-mG MEMS Sensor}, journal = {ECS Transactions}, year = 2016, } @article{CTT100702128, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers}, journal = {Microelectronics Engineering}, year = 2016, } @article{CTT100703226, author = {Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100704502, author = {Kouhei Ohba and Yoshihiro Yoneda and Koji Kurihara and takashi suganuma and Hiroyuki Ito and Noboru Ishihara and Kunihiko Gotoh and Koichiro Yamashita and Kazuya Masu}, title = {Polynomial Regression Techniques for Environmental Data Recovery in Wireless Sensor Networks}, journal = {Sensors & Transducers}, year = 2016, } @article{CTT100821498, author = {Shintani, M. and Uezono, T. and Hatayama, K. and Kazuya Masu and Sato, T.}, title = {Path Clustering for Test Pattern Reduction of Variation-Aware Adaptive Path Delay Testing}, journal = {Journal of Electronic Testing: Theory and Applications (JETTA)}, year = 2016, } @inproceedings{CTT100737689, author = {Hiroyuki Ito and Sho Ikeda and Akifumi Kasamatsu and Yosuke Ishikawa and Shiro Dosho and Noboru Ishihara and Kazuya Masu}, title = {Piezoelectric Resonator-Based Fractional-N PLL Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100734205, author = {Daisuke Yamane and Kazuya Masu and Cheng-Yao Lo}, title = {A Study on Flexible Tactile Sensor for Assistance Robots}, booktitle = {}, year = 2016, } @inproceedings{CTT100734201, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices}, booktitle = {}, year = 2016, } @inproceedings{CTT100711207, author = {曽根正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根大輔 and 益一哉 and 町田克之}, title = {微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 (招待講演)}, booktitle = {第6回CSJ化学フェスタ}, year = 2016, } @inproceedings{CTT100733962, author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法}, booktitle = {}, year = 2016, } @inproceedings{CTT100733961, author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之}, title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法}, booktitle = {}, year = 2016, } @inproceedings{CTT100733960, author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ}, booktitle = {}, year = 2016, } @inproceedings{CTT100733959, author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {差動型積層メタルMEMS加速度センサの検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100733958, author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉}, title = {積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100733957, author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉}, title = {RC発振器型高感度容量検出回路}, booktitle = {}, year = 2016, } @inproceedings{CTT100723391, author = {浅野 啓介 and TangHao-Chun and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723362, author = {柳田佐理 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723360, author = {葭葉将治 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723356, author = {寺西美波 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 益一哉 and 曽根正人 and 小西敏文 and 町田克之 and 年吉洋}, title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100714886, author = {曽根 正人 and Chang Tso-Fu Mark and 陳 君怡 and 山根 大輔 and 益 一哉 and 町田 克之}, title = {高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 (招待講演)}, booktitle = {日本学術振興会・第172委員会}, year = 2016, } @inproceedings{CTT100714942, author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating}, booktitle = {}, year = 2016, } @inproceedings{CTT100737682, author = {Chindanai Ratanaporncharoen and Miyuki Tabata and Noboru Ishihara and Kazuya Masu and Mana Sriyudthsak and Tatsuro Goda and Akira Matsumoto and Yuji Miyahara}, title = {Miniaturized Ir/IrOx wireless pH sensor for bio-sensing system}, booktitle = {第33回センサ・マイクロマシンと応用シンポジウム}, year = 2016, } @inproceedings{CTT100737679, author = {Y. Oshima and N. Ishihara and K. Masu and H. Oguma}, title = {Simulation and Evaluation of PV Power Generation for Energy Management System using SPICE}, booktitle = {The 7th International Conference on ICT Convergence 2016}, year = 2016, } @inproceedings{CTT100733967, author = {大西 脩平 and 西村 祐典 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一}, title = {マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測}, booktitle = {}, year = 2016, } @inproceedings{CTT100716613, author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {積層メタル差動型MEMS加速度センサの基礎検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702798, author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers}, booktitle = {Separation Techniques 2016}, year = 2016, } @inproceedings{CTT100703075, author = {大島 佑太 and 石原昇 and 益一哉 and 小熊 博}, title = {富山県射水地区における太陽光発電量の実測評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100710913, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710914, author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710915, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710916, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100714940, author = {Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer}, booktitle = {}, year = 2016, } @inproceedings{CTT100715204, author = {伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {IoT時代に向けた低電力無線通信回路技術}, booktitle = {}, year = 2016, } @inproceedings{CTT100715286, author = {小原 崇義 and 石川 洋介 and 紙透 航志 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {発振器型低消費電力センサ技術の研究}, booktitle = {アナログRF研究会}, year = 2016, } @inproceedings{CTT100715333, author = {紙透 航志 and 石川 洋介 and 小原 崇義 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {高分解能静電容量式水位センサの研究}, booktitle = {}, year = 2016, } @inproceedings{CTT100716612, author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法}, booktitle = {}, year = 2016, } @inproceedings{CTT100716614, author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ}, booktitle = {}, year = 2016, } @inproceedings{CTT100716615, author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之}, title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法(I)}, booktitle = {}, year = 2016, } @inproceedings{CTT100716618, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications}, booktitle = {}, year = 2016, } @inproceedings{CTT100719878, author = {石川洋介 and 池田 翔 and 伊藤浩之 and 笠松章史 and 小原崇義 and 野口直記 and 紙透航志 and ヨ ジヨン and 原 紳介 and 董 鋭冰 and 道正志郎 and 石原 昇 and 益 一哉}, title = {高周波信号を基準とする8.865-GHz PLLの低消費電力化技術の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100719884, author = {池田 翔 and 伊藤浩之 and 笠松章史 and 石川洋介 and 小原崇義 and 野口直記 and 紙透航志 and ヨ ジヨン and 原 紳介 and 董 鋭冰 and 道正志郎 and 石原 昇 and 益 一哉}, title = {高周波圧電振動子とサブppb オーダーのチャンネル調整技術を用いたカスケードPLL}, booktitle = {}, year = 2016, } @inproceedings{CTT100719966, author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 益 一哉}, title = {RC発振器型容量検出回路の高感度化の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100721707, author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu}, title = {A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System}, booktitle = {}, year = 2016, } @inproceedings{CTT100721709, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100702490, author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu}, title = {Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture)}, booktitle = {Integrative Biology-2016}, year = 2016, } @inproceedings{CTT100737677, author = {Noboru ISHIHARA and Tomonobu ITAGAKI and Takashi SUGANUMA and Toyonari SHIMAKAGE and Taku Ishibashi and Norikazu TAKEUCHI and Nobuhiko YAMASHITA and Kenji YOKOYAMA and Kazuya MASU}, title = {Energy Management System Modeling and Simulation Techniques with SPICE}, booktitle = {}, year = 2016, } @inproceedings{CTT100737678, author = {Y. Oshima and N. Ishihara and K. Masu and H. Oguma}, title = {SPICE Modeling of Si-Bifacial PV Modules for EMS at Hokuriku Region}, booktitle = {}, year = 2016, } @inproceedings{CTT100708450, author = {Takayoshi Obara and Yosuke Ishikawa and Sho Ikeda and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu}, title = {An ultra-low-power RF-impulse transmitter with robustness to supply-voltage variation}, booktitle = {}, year = 2016, } @inproceedings{CTT100709219, author = {池田 翔 and 伊藤 浩之 and 笠松 章史 and 石川 洋介 and 小原 崇義 and 野口 直記 and 紙透 航志 and Yao Jiyang and 原 紳介 and 董 鋭冰 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {An 8.865-GHz -244dB-FOM High-Frequency Piezoelectric Resonator-Based Cascaded Fractional-N PLL with Sub-ppb-Order Channel Adjusting Technique}, booktitle = {}, year = 2016, } @inproceedings{CTT100710654, author = {Yusuke Nishimura and Onishi Shuhei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Mitsumasa Saito and Shinichi Yoshida}, title = {COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP}, booktitle = {}, year = 2016, } @inproceedings{CTT100709218, author = {Sho Ikeda and Hiroyuki Ito and Akifumi Kasamatsu and Yosuke Ishikawa and Takayoshi Obara and Naoki Noguchi and Koji Kamisuki and Yao Jiyang and Shinsuke Hara and Ruibing Dong and Shiro Dosho and Noboru Ishihara and Kazuya Masu}, title = {An 8.865-GHz -244dB-FOM High-Frequency Piezoelectric Resonator-Based Cascaded Fractional-N PLL with Sub-ppb-Order Channel Adjusting Technique}, booktitle = {}, year = 2016, } @inproceedings{CTT100710653, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100702072, author = {Chun-Yi Chen and Masaharu Yoshiba and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Au Films with Ultra High Strength}, booktitle = {}, year = 2016, } @inproceedings{CTT100708351, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A 1-mG MEMS Sensor}, booktitle = {}, year = 2016, } @inproceedings{CTT100708852, author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉}, title = {小型高感度MEMS慣性センサモジュールの試作評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100708851, author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Masakazu Sonobe and Takumi Kobayashi and Yamato Fukuta and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida}, title = {A study of railroad vehicle control by inertial sensors}, booktitle = {}, year = 2016, } @inproceedings{CTT100737680, author = {石原 昇 and 伊藤 浩之 and 益 一哉}, title = {家庭菜園における収穫量と有効積算温度}, booktitle = {農業情報学会2016年度年次大会}, year = 2016, } @inproceedings{CTT100700917, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700921, author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700920, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700919, author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700918, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100702917, author = {山根大輔 and 小西敏文 and 伊藤浩之 and 年吉 洋 and 益 一哉 and 町田克之}, title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702920, author = {高安 基大 and 權田 惇晟 and 石川 洋介 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {SSOP表面実装部品対応型RFユニバーサル基板}, booktitle = {}, year = 2016, } @inproceedings{CTT100702921, author = {石川洋介 and 李 尚曄 and 米澤 慎 and 池田 翔 and 方 一鳴 and 濱田泰輔 and 伊藤浩之 and 石原 昇 and 益 一哉}, title = {J型折り畳みモノポールアンテナを用いた0.5V 1.56mW OOK トランシーバモジュール}, booktitle = {}, year = 2016, } @inproceedings{CTT100702922, author = {リュウ アンキ and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉}, title = {CMOS低雑音オペアンプ設計法の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702918, author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之}, title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702926, author = {大場 康平 and 米田 嘉浩 and 菅沼 隆史 and 伊藤 浩之 and 石原昇 and 後藤 邦彦 and 益 一哉}, title = {無線センサネットワークにおける環境情報再生手法を用いたサンプリング周波数評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100702598, author = {小原 崇義 and 石川 洋介 and 池田 翔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {環境発電型センサネットワーク用低消費電力インパルス無線送信機}, booktitle = {アナログRF研究会}, year = 2016, } @inproceedings{CTT100703077, author = {大島佑太 and 石原昇 and 益一哉 and 小熊博}, title = {SPICE による実測データに基づいた太陽電池モデルの開発}, booktitle = {}, year = 2016, } @inproceedings{CTT100703091, author = {大橋諒太郎 and 伊藤 浩之 and 石原 昇 and 甲斐 学 and 中本 裕之 and 桝井 昇一 and 益 一哉}, title = {ベジェ曲線を用いたパッチアンテナの形状最適化手法の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100702919, author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之}, title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100700959, author = {葭葉 将治 and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人}, title = {マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700961, author = {石塚 陽大 and 柳田 佐理 and TSO-FU MARK CHANG and 陳 君怡 and 町田 克之 and 山根 大輔 and 益 一哉 and 曽根 正人 and 益 一哉 and 曽根 正人}, title = {マイクロ圧縮試験による金/チタン積層構造の機械的特性評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700962, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700964, author = {寺西 美波 and TSO-FU MARK CHANG and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人}, title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700965, author = {浅野 啓介 and Tang Hao-Chun and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人}, title = {マイクロ曲げ試験による電析金薄膜の機械的特性評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100702947, author = {Kouhei Ohba and Yoshihiro Yoneda and Koji Kurihara and Takashi Suganuma and Hiroyuki Ito and Noboru Ishihara and Kunihiko Gotoh and Koichiro Yamashita and Kazuya Masu}, title = {Environmental data recovery using polynomial regression for large-scale wireless sensor networks}, booktitle = {Proceedings of SENSORNETS 2016}, year = 2016, } @inproceedings{CTT100702467, author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida}, title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology}, booktitle = {}, year = 2016, } @inproceedings{CTT100702466, author = {富樫 祐太 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益 一哉}, title = {伝送線路を用いた土壌水分量測定技術の検討}, booktitle = {}, year = 2016, } @inproceedings{CTT100804415, author = {Daisuke Yamane and Konishi, T. and Safu, T. and Toshiyoshi, H. and Masato Sone and Kazuya Masu and Katsuyuki Machida}, title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology}, booktitle = {2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016}, year = 2016, }