@article{CTT100751408, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year = 2017, } @inproceedings{CTT100751726, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition}, booktitle = {}, year = 2017, } @inproceedings{CTT100735592, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, booktitle = {IEEE-NEMS 2017}, year = 2017, } @inproceedings{CTT100735889, author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価(1)}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735890, author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価(2)}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, }