@book{CTT100748622,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2017,
}

@book{CTT100737687,
  author = {Noboru Ishihara and 大場 康平 and Yoshihiro Yoneda and Koji Kurihara and Takashi Suganuma and Hiroyuki Ito and Kunihiko Gotoh and Koichiro Yamashita and Kazuya Masu},
  title = {Environmental Data Recovery Techniques and its Applications using Polynomial Regression in the Sensor Network Systems},
  publisher = {},
  year = 2017,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100742124,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2017,
}

@article{CTT100742125,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures},
  journal = {Materials Letters},
  year = 2017,
}

@article{CTT100734738,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@article{CTT100736023,
  author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@article{CTT100737536,
  author = {Sho Ikeda and Sang_yeop Lee and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu},
  title = {A 0.5 V 5.96-GHz PLL With Amplitude-Regulated Current-Reuse VCO},
  journal = {IEEE Microwave and Wireless Components Letters},
  year = 2017,
}

@article{CTT100737537,
  author = {Sho Ikeda and Hiroyuki Ito and Akifumi Kasamatsu and Yosuke Ishikawa and Takayoshi Obara and Naoki Noguchi and Koji Kamisuki and Yao Jiyang and Shinsuke Hara and Dong Ruibing and Shiro Dosho and Noboru Ishihara and Kazuya Masu},
  title = {A -244-dB FOM High-Frequency Piezoelectric Resonator-Based Cascaded Fractional-N PLL With Sub-ppb-Order Channel-Adjusting Technique},
  journal = {IEEE Journal of Solid-State Circuits},
  year = 2017,
}

@inproceedings{CTT100767808,
  author = {小栗 豪 and 伊藤 浩之 and 石原 昇 and 道正 志郎 and 益 一哉},
  title = {FDR法による土壌水分量測定に適した周波数帯の検討},
  booktitle = {信学技報},
  year = 2017,
}

@inproceedings{CTT100767807,
  author = {宮内 楓 and 伊藤 浩之 and 石原 昇 and 道正 志郎 and 益 一哉},
  title = {直交バックスキャッタリング回路技術の高スペクトラム効率化に関する研究},
  booktitle = {信学技報},
  year = 2017,
}

@inproceedings{CTT100767805,
  author = {山口 琢矢 and 道正 志郎 and 石原 昇 and 伊藤 浩之 and 中本 裕之 and 益 一哉},
  title = {遺伝的アルゴリズムを用いた逆Fアンテナの設計手法に関する研究},
  booktitle = {信学技報},
  year = 2017,
}

@inproceedings{CTT100767811,
  author = {今中 有介 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 益一哉},
  title = {低消費電力発振器型センサ回路におけるゲートリークの影響},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100767810,
  author = {石川洋介 and 伊藤浩之 and 道正志郎 and 石原昇 and 益一哉},
  title = {実装条件によるチップ素子の周波数特性変化},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751440,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100758163,
  author = {Hiroyuki Ito and Yosuke Ishikawa and Nobuhiro Yoda and Shiro Dosho and Noboru Ishihara and Kazuya Masu},
  title = {An Ultra-Low Power Wireless Sensor Node for Intraoral Measurement},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100758124,
  author = {Moeto Nagai and Musashi Kakugawa and Daisuke Yamane and Kazuya Masu},
  title = {Vibration Testing of Microfluidic Devices for Cell Analysis: Toward a Chip in Everyday Life},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100758122,
  author = {Cheng-Yao Lo and Daisuke Yamane and Kazuya Masu},
  title = {Force Response and Vibration Characteristics of Flexible Capacitive Sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755518,
  author = {折原 恒祐 and 高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755526,
  author = {大西  脩平 and 崔  容俊 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田克之 and 益 一哉 and 二階堂 靖彦 and 齋藤 光正 and 吉田 眞一},
  title = {フォトゲート型蛍光センサを用いたレジオネラの蛍光観測},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755520,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755389,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755334,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS慣性センサ用弛張発振型容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754658,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754350,
  author = {伊藤浩之 and 石原昇 and 鹿島光司 and 深水克郎 and 道正志郎 and 大場隆之 and 益一哉},
  title = {東京工業大学における農業プロジェクトの紹介},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754349,
  author = {伊藤 浩之 and 廣部祐樹 and 道正志郎 and 石原昇 and 益一哉},
  title = {加速度センサを用いた顎・身体傾斜測定技術},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752531,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745651,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-yi Chen and Takashi Nagoshi and Tso-fu Mark Chang and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745653,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745655,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100751941,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752532,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753335,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753404,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754351,
  author = {伊藤浩之 and 石原昇 and 鹿島光司 and 深水克郎 and 大場隆之 and 益一哉},
  title = {植物のキモチセンシングを目指したアグリエレクトロニクスの研究},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742158,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748741,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS傾斜計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748739,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路の評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745678,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu},
  title = {A high-resolution capacitive-sensor interface based on a relaxation oscillator},
  booktitle = {Proceedings of The 2017 Vietnam-Japan Microwave},
  year = 2017,
}

@inproceedings{CTT100744945,
  author = {曽根 正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価},
  booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742056,
  author = {Chun-Yi Chen and Hao-chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100742055,
  author = {Hao-chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100745950,
  author = {Takuya Yamaguchi and Shiro Dosho and Noboru Ishihara and Hiroyuki Ito and Kazuya Masu and 中本 裕之},
  title = {A topology exploration and an optimization of planar inverted "F" antenna (PIFA) with Generic Algorithm},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745679,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu},
  title = {A high-resolution capacitive-sensor interface based on a relaxation oscillator},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745676,
  author = {高安 基大 and 權田 惇晟 and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100735375,
  author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737688,
  author = {Daisuke Yamane and Kazuya Masu and Cheng-Yao Lo},
  title = {Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots},
  booktitle = {平成28年度生体医歯工学共同研究拠点成果報告会},
  year = 2017,
}

@inproceedings{CTT100737686,
  author = {Chindanai Ratanaporncharoen and Miyuki Tabata and Tatsuro Goda and Akira Matsumoto and Yuji Miyahara and Noboru ISHIHARA and Kazuya MASU},
  title = {Miniaturized wireless pH sensor for on-site monitoring},
  booktitle = {平成28年度生体医歯工学共同研究拠点成果報告会},
  year = 2017,
}

@inproceedings{CTT100737685,
  author = {石原 昇 and Ratanaporncharoen Chindanai and 伊藤浩之 and 道正志郎 and 田畑美幸 and 宮原裕二 and 益一哉},
  title = {オープンソースハードウエアによるワイヤレスpHセンサモジュール設計},
  booktitle = {平成28年度生体医歯工学共同研究拠点成果報告会},
  year = 2017,
}

@inproceedings{CTT100737684,
  author = {大島 佑太 and 石原 昇 and 益 一哉 and 小熊 博},
  title = {SPICE を用いたEMS モデルによる太陽光発電の電力自給率評価},
  booktitle = {2017年 電子情報通信学会総合大会},
  year = 2017,
}

@inproceedings{CTT100737683,
  author = {佐藤 裕樹 and 瀬志本 明 and 山崎 王義 and 藤原 宗 and 益 一哉 and 石原 昇},
  title = {圧電素子によるマイクロフォンの特性シミュレーションモデル},
  booktitle = {平成29年電気学会全国大会},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737044,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {移動体制御による慣性センサ評価系の構築},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737043,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737042,
  author = {飯塚知希 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737538,
  author = {Yosuke Ishikawa and Sho Ikeda and Hiroyuki Ito and Akifumi Kasamatsu and Takayoshi Obara and Naoki Noguchi and Koji Kamisuki and Yao Jiyang and Shinsuke Hara and Dong Ruibing and Shiro Dosho and Noboru Ishihara and Kazuya Masu},
  title = {Design of high-frequency piezoelectric resonator-based cascaded fractional-N PLL with sub-ppb-order channel adjusting technique},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100806087,
  author = {Onishi, S. and Joon, C. Y. and Ishida, M. and Sawada, K. and Ishii, H. and Katsuyuki Machida and Kazuya Masu and Nikaido, Y. and Saito, M. and Yoshida, S.},
  title = {Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing},
  booktitle = {SEMICONDUCTOR PROCESS INTEGRATION 10},
  year = 2017,
}

@inproceedings{CTT100821511,
  author = {Oshima Y. and Mizumoto I. and Oguma H. and Ishihara N. and Kazuya Masu},
  title = {Estimation of energy self-sufficiency rate by EMS simulation using SPICE},
  booktitle = {International Conference on Information and Communication Technology Convergence: ICT Convergence Technologies Leading the Fourth Industrial Revolution, ICTC 2017},
  year = 2017,
}

@misc{CTT100787100,
  author = {益一哉 and 山根大輔 and 小西　敏文 and 佐布　晃昭 and 町田　克之},
  title = {微細素子の製造方法},
  howpublished = {登録特許},
  year = 2021,
  month  = {},
  note   = {特願2017-055732(2017/03/22), 特開2018-159573(2018/10/11), 特許第6840339号(2021/02/19)}
}


@misc{CTT100787104,
  author = {益一哉 and 曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 小西　敏文 and 佐布　晃昭　 and 町田　克之},
  title = {微細素子およびその製造方法},
  howpublished = {登録特許},
  year = 2021,
  month  = {},
  note   = {特願2017-055730(2017/03/22), 特開2018-158394(2018/10/11), 特許第6818299号(2021/01/05)}
}


@misc{CTT100754484,
  author = {益一哉 and 伊藤浩之 and 山根大輔 and 小西　敏文　 and 佐布　晃昭　 and 町田　克之},
  title = {微細素子およびその製造方法},
  howpublished = {登録特許},
  year = 2019,
  month  = {},
  note   = {特願2015-256285(2015/12/28), 特開2017-120205(2017/07/06), 特許第6519021号(2019/05/10)}
}


@misc{CTT100744890,
  author = {益一哉 and 山根大輔 and 小西　敏文　 and 佐布　晃昭　 and 町田　克之　},
  title = {解析装置},
  howpublished = {登録特許},
  year = 2019,
  month  = {},
  note   = {特願2015-186382(2015/09/24), 特開2017-062544(2017/03/30), 特許第6555663号(2019/07/19)}
}