@inproceedings{CTT100756479, author = {Akihiro Matsutani and Ayako Takada}, title = {Profile Control in Si Etching by Two-step Etching Process Using XeF2 Vapor for Fabrication of Concave Micromirror}, booktitle = {Proceedings of 39th International Symposium on Dry Process}, year = 2017, } @inproceedings{CTT100748967, author = {Takada A and Wachi M}, title = {A new screening system for compounds targeting Hfq-mediated RNA metabolism}, booktitle = {}, year = 2017, } @inproceedings{CTT100737429, author = {松谷晃宏 and 高田綾子}, title = {XeF2気相エッチングとスンプ法によるセルロイドマイクロレンズ アレイの製作}, booktitle = {}, year = 2017, }