@article{CTT100758983,
  author = {Yuta Shiratori and Faris Akira Bin Mohd Zulkifly and Kazuyoshi Nakada and Shinsuke Miyajima},
  title = {Effect of RF power on the properties of intrinsic hydrogenated amorphous silicon passivation layer deposited by facing target sputtering},
  journal = {Applied Physics Express},
  year = 2018,
}

@inproceedings{CTT100771891,
  author = {金 珍雨 and 白取 優大 and 中田 和吉 and 宮島 晋介},
  title = {[20p-133-13] スパッタ法によるp型エミッタ層を有するシリコンヘテロ接合太陽電池},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771890,
  author = {白取 優大 and 安田 洋司 and 星 陽一 and 金 珍雨 and 中田 和吉 and 宮島 晋介},
  title = {[20p-133-14] シリコンヘテロ接合太陽電池正孔選択層応用へ向けた酸化タングステンの低ダメージ形成},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771889,
  author = {安田 洋司 and 宮島 晋介 and 白取 優大 and 星 陽一},
  title = {[19p-PA5-6] シリコン系太陽電池正孔選択層向け酸化タングステンの低ダメージ堆積時における酸素分圧の影響},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769870,
  author = {白取 優大 and 金 珍雨 and 中田 和吉 and 宮島 晋介},
  title = {(PA-03) 対向ターゲットスパッタ法により作製されたi-a-Si:Hパッシベーション層のシリコンヘテロ接合太陽電池への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769864,
  author = {Yuta Shiratori and Jinwoo Kim and Kazuyoshi Nakada and Shinsuke Miyajima},
  title = {(E20) Silicon Heterojunction Solar Cell with Intrinsic Hydrogenated Amorphous Silicon Layer Deposited by Facing Target Sputtering},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100762763,
  author = {Yuta Shiratori and Kazuyoshi Nakada and Shinsuke Miyajima},
  title = {(8.2)INTERFACE ANALYSIS OF HYDROGENATED AMORPHOUS SILICON PASSIVATION LAYER DEPOSITED BY FACING TARGET SPUTTERING},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760792,
  author = {Faris Akira Bin Mohd Zulkifly and 白取 優大 and 中田 和吉 and 宮島 晋介},
  title = {[19a-D101-7] 2段階製膜を用いたFTS法によるi-a-Si:Hパッシベーション膜},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760791,
  author = {白取 優大 and ファリス アキラ and 中田 和吉 and 宮島 晋介},
  title = {[19a-D101-6] DC重畳RF対向ターゲットスパッタ法によるi-a-Si:Hパッシベーション膜の特性},
  booktitle = {},
  year = 2018,
}