@article{CTT100776718, author = {Seungman Choi and Kazuki Wakabayashi and KUNIO TAKAHASHI and Shigeki SAITO}, title = {Development of a Bipolar Electrostatic Chuck Module having a Beam-array Assembly using a Multiple-Etching Process}, journal = {Journal of Micromechanics and Microengineering}, year = 2018, } @article{CTT100776716, author = {Ryo Fujiwara and Yoji Iguchi and KUNIO TAKAHASHI and Shigeki SAITO}, title = {Humidity dependence of electrostatic pick-and-place operation of a micro dielectric particle considering surface conductivity and capillary condensation}, journal = {Journal of Applied Physics}, year = 2018, } @article{CTT100776715, author = {Dooyoung Baek and Shigeki SAITO and KUNIO TAKAHASHI}, title = {Estimating work of adhesion using spherical contact between a glass lens and a PDMS block}, journal = {Journal of Adhesion Science and Technology}, year = 2018, } @inproceedings{CTT100796016, author = {Kenta KUDO and Shigeki SAITO}, title = {A 3D-Printed-Layered Module of Compliant Electrostatic Gripper Consisting of Elastically Deformable Bipolar Micro-probes for Manipulation of Thin Film/Textile Objects}, booktitle = {}, year = 2018, } @inproceedings{CTT100795166, author = {河鰭 康平 and HEMTHAVYPASOMPHONE and 高橋邦夫 and 齋藤滋規}, title = {微細毛構造を有するシリコン双極型静電チャックの接触面の平滑さと微細毛長が静電力に与える影響}, booktitle = {日本機械学会第9回マイクロ・ナノシンポジウム講演論文集}, year = 2018, } @inproceedings{CTT100773077, author = {Kaho Kagohashi and Yuki Taoka and Celine Mougenot and Shigeki Saito}, title = {Exploring New Tools for Ideation Workshop in Japan}, booktitle = {}, year = 2018, } @inproceedings{CTT100772550, author = {齋藤滋規}, title = {微細毛構造を用いた静電チャック}, booktitle = {静電気学会講演論文集2018}, year = 2018, } @inproceedings{CTT100772554, author = {齋藤滋規}, title = {企業・大学に於けるイノベーション教育の実践}, booktitle = {}, year = 2018, } @inproceedings{CTT100772555, author = {Yuki Taoka and Kaho Kagohashi and Shigeki SAITO and Celine Mougenot}, title = {Culturally-sensitive tools for design group ideation in a Japanese context}, booktitle = {Diversity & Conformity}, year = 2018, } @inproceedings{CTT100772556, author = {Emi Fuse and Kazuki Wakabayashi and Shigeki SAITO}, title = {Effect of members' professional diversity in group on creative thinking}, booktitle = {Diversity & Confornity}, year = 2018, } @inproceedings{CTT100772553, author = {齋藤滋規}, title = {異分野協創エンジニアリングデザインプロジェクト}, booktitle = {}, year = 2018, } @inproceedings{CTT100766050, author = {田岡祐樹 and 籠橋香歩 and 江頭悠郎 and 齋藤滋規 and MOUGENOTCELINE}, title = {文化に配慮した共創デザイン手法に関する研究}, booktitle = {}, year = 2018, } @inproceedings{CTT100772532, author = {工藤健太 and 若林一貴 and HEMTHAVYPASOMPHONE and 高橋邦夫 and 齋藤滋規}, title = {集合梁構造を持つ双極型静電吸着装置による対象物離脱のための手先軌道の実験的検討}, booktitle = {精密工学会学術講演会講演論文集}, year = 2018, } @inproceedings{CTT100772533, author = {児玉理央 and 若林一貴 and HEMTHAVYPASOMPHONE and 高橋邦夫 and 齋藤滋規}, title = {表面に凹凸形状を有する誘電体の把持・離脱を目的とした微細毛構造を持つ双極型静電吸着装置の配列密度に関する実験的検討}, booktitle = {精密工学会学術講演会講演論文集}, year = 2018, } @inproceedings{CTT100766854, author = {サリユコフミハイル and 井口洋二 and HEMTHAVYPASOMPHONE and 齋藤滋規 and 高橋邦夫}, title = {くし状構造の積層による側面接触型弾性梁集合体の試作}, booktitle = {24rd Symposium on “Microjoining and Assembly Technology in Electronics”}, year = 2018, } @misc{CTT100808479, author = {齋藤滋規 and 河野健人 and 田尻陽亮 and 高橋邦夫 and Radon DHELIKA}, title = {双極型静電チャックモジュールおよびその製造方法}, howpublished = {登録特許}, year = 2021, month = {}, note = {特願2018-503354(2017/02/28), 再表2017/150574(2018/12/27), 特許第6846821号(2021/03/04)} }