@article{CTT100758983,
  author = {Yuta Shiratori and Faris Akira Bin Mohd Zulkifly and Kazuyoshi Nakada and Shinsuke Miyajima},
  title = {Effect of RF power on the properties of intrinsic hydrogenated amorphous silicon passivation layer deposited by facing target sputtering},
  journal = {Applied Physics Express},
  year = 2018,
}

@inproceedings{CTT100760791,
  author = {白取 優大 and ファリス アキラ and 中田 和吉 and 宮島 晋介},
  title = {[19a-D101-6] DC重畳RF対向ターゲットスパッタ法によるi-a-Si:Hパッシベーション膜の特性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760792,
  author = {Faris Akira Bin Mohd Zulkifly and 白取 優大 and 中田 和吉 and 宮島 晋介},
  title = {[19a-D101-7] 2段階製膜を用いたFTS法によるi-a-Si:Hパッシベーション膜},
  booktitle = {},
  year = 2018,
}