@book{CTT100790825, author = {Masato Sone and Kazuya Masu}, title = {Novel Metal Electrodeposition and the Recent Application}, publisher = {INTECH}, year = 2019, } @book{CTT100770100, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2019, } @article{CTT100807192, author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100803948, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, journal = {Metals}, year = 2019, } @article{CTT100807019, author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu}, title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology}, journal = {ECS Transactions}, year = 2019, } @article{CTT100800512, author = {Keisuke Asano and Tso-Fu Mark Chang and Hao-Chun Tang and Takashi Nagoshi and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components}, journal = {ECS Journal of Solid State Science and Technology}, year = 2019, } @article{CTT100800956, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu}, title = {A MEMS Accelerometer for Sub-mG Sensing}, journal = {Sensors and Materials}, year = 2019, } @article{CTT100795920, author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100796028, author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100793648, author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100795137, author = {Ludovico Minati and Mattia Frasca and Natsue Yoshimura and Leonardo Ricci and Paweł Oświecimka and Yasuharu Koike and Kazuya Masu and Hiroyuki Ito}, title = {Current-starved cross-coupled CMOS inverter rings as versatile generators of chaotic and neural-like dynamics over multiple frequency decades}, journal = {IEEE Access}, year = 2019, } @article{CTT100786193, author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @inproceedings{CTT100806470, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film}, booktitle = {}, year = 2019, } @inproceedings{CTT100806469, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method}, booktitle = {}, year = 2019, } @inproceedings{CTT100806472, author = {Tomoki Iriya and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electroplating of Au-Pd Alloy Films and the Mechanical Properties}, booktitle = {}, year = 2019, } @inproceedings{CTT100809253, author = {市川 崇志 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 石原 昇 and 伊藤 浩之 and Chang Tso-Fu Mark and 曽根 正人 and 町田 克之 and 益 一哉}, title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100811731, author = {伊藤浩之 and 古賀達也 and 市川崇志 and 山根大輔 and 石原昇 and 三宅美博 and 町田克之 and 益一哉}, title = {兆し計測のための高感度MEMS加速度センサ技術}, booktitle = {}, year = 2019, } @inproceedings{CTT100809252, author = {古賀 達也 and 市川 崇志 and 田中 直登 and 緒方 大樹 and 大良 宏樹 and 山根 大輔 and 石原 昇 and 伊藤 浩之 and 曽根 正人 and 町田 克之 and 三宅 美博 and 益 一哉}, title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100809254, author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3Dピラー型Au錘MEMS加速度センサ}, booktitle = {}, year = 2019, } @inproceedings{CTT100804032, author = {Tso-Fu Mark Chang and Yu-An Chien and Hao-Chun Tang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles}, booktitle = {}, year = 2019, } @inproceedings{CTT100807194, author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)}, booktitle = {}, year = 2019, } @inproceedings{CTT100802632, author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components}, booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)}, year = 2019, } @inproceedings{CTT100802634, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test}, booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)}, year = 2019, } @inproceedings{CTT100802635, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications}, booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)}, year = 2019, } @inproceedings{CTT100802676, author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications}, booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)}, year = 2019, } @inproceedings{CTT100803938, author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers}, booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials}, year = 2019, } @inproceedings{CTT100803939, author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components}, booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials}, year = 2019, } @inproceedings{CTT100800103, author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3軸Au錘MEMS加速度センサにおける検出電極構造の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100802558, author = {曽根正人 and タン ハオチュン and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 町田克之 and 益一哉}, title = {超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価}, booktitle = {電気鍍金研究会}, year = 2019, } @inproceedings{CTT100794652, author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test}, booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics}, year = 2019, } @inproceedings{CTT100791878, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence}, booktitle = {}, year = 2019, } @inproceedings{CTT100791879, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test}, booktitle = {}, year = 2019, } @inproceedings{CTT100790679, author = {新田 京太朗 and Tang Haochun and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人}, title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製}, booktitle = {}, year = 2019, } @inproceedings{CTT100790673, author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {積層メタル技術によるピラー型容量検出電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790674, author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790675, author = {渡邊 瞳 and 鈴木 拓真 and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人}, title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響}, booktitle = {}, year = 2019, } @inproceedings{CTT100790677, author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790678, author = {鈴木 康介 and Ken Hashigata and 浅野 啓介 and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人}, title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果}, booktitle = {}, year = 2019, } @inproceedings{CTT100782446, author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS}, booktitle = {}, year = 2019, } @inproceedings{CTT100845991, author = {Shuhei Amakawa and Atsushi Takeshige and Shinsuke Hara and Ruibing Dong and Sangyeop Lee and Takeshi Yoshida and Minoru Fujishima and Kazuya Masu and Hiroyuki Ito}, title = {Causal characteristic impedance determination using calibration comparison and propagation constant}, booktitle = {}, year = 2019, } @misc{CTT100806610, author = {山根大輔 and 益一哉}, title = {発電装置、エネルギーハーベストデバイス}, howpublished = {登録特許}, year = 2023, month = {}, note = {特願2018-217331(2018/11/20), 特開2019-097381(2019/06/20), 特許第7217507号(2023/01/26)} } @misc{CTT100820740, author = {益一哉 and 町田克之 and 山根大輔 and 伊藤浩之 and 佐布 晃昭  and 小西 敏文  and 飯田 慎一 }, title = {微細素子}, howpublished = {登録特許}, year = 2022, month = {}, note = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)} } @misc{CTT100814171, author = {石原昇 and 伊藤浩之 and 道正志郎 and 益一哉}, title = {無線センサおよびセンサネットワークシステム}, howpublished = {公開特許}, year = 2019, month = {}, note = {特願2018-034546(2018/02/28), 特開2019-149090(2019/09/05)} } @misc{CTT100754484, author = {益一哉 and 伊藤浩之 and 山根大輔 and 小西 敏文  and 佐布 晃昭  and 町田 克之}, title = {微細素子およびその製造方法}, howpublished = {登録特許}, year = 2019, month = {}, note = {特願2015-256285(2015/12/28), 特開2017-120205(2017/07/06), 特許第6519021号(2019/05/10)} } @misc{CTT100744890, author = {益一哉 and 山根大輔 and 小西 敏文  and 佐布 晃昭  and 町田 克之 }, title = {解析装置}, howpublished = {登録特許}, year = 2019, month = {}, note = {特願2015-186382(2015/09/24), 特開2017-062544(2017/03/30), 特許第6555663号(2019/07/19)} }