@book{CTT100835470, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, publisher = {MDPI}, year = 2020, } @article{CTT100834843, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties}, journal = {Electrochem}, year = 2020, } @article{CTT100823691, author = {Kosuke Suzuki and Tso-Fu Mark Chang and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test}, journal = {MRS Communications}, year = 2020, } @article{CTT100823024, author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Ryo Shigeyama and Taiki Ogata and Yoshihiro Miyake}, title = {CMOS-MEMS Based Microgravity Sensor and Its Application}, journal = {ECS Transactions}, year = 2020, } @article{CTT100820976, author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers}, journal = {Journal of The Electrochemical Society}, year = 2020, } @article{CTT100819259, author = {Ludovico Minati and Tokgoz K.K and Mattia Frasca and Yasuharu Koike and Iannacci J and Natsue Yoshimura and Kazuya Masu and Hiroyuki Ito}, title = {Distributed sensing via inductively coupled single-transistor chaotic oscillators: a new approach and its experimental proof-of-concept}, journal = {IEEE Access}, year = 2020, } @article{CTT100806473, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability}, journal = {IEEE Conference Paper}, year = 2020, } @inproceedings{CTT100842066, author = {内山晃宏 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之}, title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100829964, author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics}, booktitle = {PRiME 2020}, year = 2020, } @inproceedings{CTT100830036, author = {Kosuke Suzuki and Yu-An Chien and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test}, booktitle = {PRiME 2020}, year = 2020, } @inproceedings{CTT100842065, author = {柴田滉平 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之}, title = {高分解能単一Au 錘CMOS-MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842067, author = {市川 崇志 and 内山晃宏 and 古賀 達也 and 町田 克之 and 石原昇 and 益 一哉 and 飯田 慎一 and 伊藤 浩之}, title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842069, author = {内山晃宏 and 市川 崇志 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之}, title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ}, booktitle = {}, year = 2020, } @inproceedings{CTT100842063, author = {Takashi Ichikawa and Kohei Shibata and Tatsuya Koga and Katsuyuki Machida and Shinichi Iida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito}, title = {A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer}, booktitle = {}, year = 2020, } @inproceedings{CTT100842068, author = {市川崇志 and 渥美賢 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之}, title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842064, author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes}, booktitle = {}, year = 2020, } @inproceedings{CTT100819252, author = {Yu-an Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices}, booktitle = {第67回応用物理学会春季学術講演会}, year = 2020, } @inproceedings{CTT100816076, author = {渥美 賢 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉}, title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100816075, author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing}, booktitle = {}, year = 2020, } @inproceedings{CTT100815902, author = {曽根 正人 and Hao-Chun Tang and Tso-Fu Mark Chang and 山根 大輔 and 町田 克之 and 伊藤 浩之 and 益 一哉}, title = {貴金属めっき材料の結晶組織制御とその医用MEMS デバイスへの応用}, booktitle = {日本金属学会 第166回講演大会}, year = 2020, } @inproceedings{CTT100819248, author = {入谷 友樹 and 新田京太朗 and Yu-An Chien and Tso-Fu Mark Chang and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人}, title = {Au-Pd合金膜の電気メッキとその機械的特性}, booktitle = {第67回応用物理学会春季学術講演会}, year = 2020, } @inproceedings{CTT100816077, author = {市川 崇志 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉}, title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討}, booktitle = {}, year = 2020, } @misc{CTT100835046, author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 町田克之 and 山根大輔 and 伊藤浩之 and 益一哉}, title = {貴金属またはその合金の微細結晶組織を有する金属材料}, howpublished = {公開特許}, year = 2020, month = {}, note = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)} } @misc{CTT100826097, author = {伊藤浩之 and 道正志郎 and 石原昇 and 益一哉}, title = {静電容量検出回路}, howpublished = {登録特許}, year = 2022, month = {}, note = {特願2018-147146(2018/08/03), 特開2020-020769(2020/02/06), 特許第7161178号(2022/10/18)} }