@inproceedings{CTT100842580, author = {Tomoya Aota and Akihiro Hayasaka and isao makabe and Shigeki Yoshida and Takahiro Gotow and YASUYUKI MIYAMOTO}, title = {Wet Etching for Isolation of N-polar GaN HEMT Structure by Electrodeless Photo-Assisted Electrochemical Reaction}, booktitle = {}, year = 2020, } @inproceedings{CTT100842581, author = {青田 智也 and 早坂 明泰 and 眞壁 勇夫 and 吉田 成輝 and 後藤 高寛 and 宮本 恭幸}, title = {N極性GaN HEMT構造での無電極PECエッチング}, booktitle = {}, year = 2020, }