@inproceedings{CTT100834856,
  author = {Tahsin Binte Shameem and Atsushi Takahashi and Hiroyoshi Tanabe and Yukihide Kohira and Chikaaki Kodama},
  title = {A Fast Look Up Table Based Lithography Simulator with SOCS Model for OPC Algorithm},
  booktitle = {Proc. DA Symposium 2020, IPSJ Symposium Series},
  year = 2020,
}

@inproceedings{CTT100834853,
  author = {東梨奈 and 小平行秀 and 松井知己 and 高橋篤司 and 児玉親亮},
  title = {ラグランジュ緩和法と境界Flippingによるプロセスばらつきを考慮したピクセルベースマスク最適化手法},
  booktitle = {電子情報通信学会技術研究報告 (VLD2019-105)},
  year = 2020,
}

@inproceedings{CTT100886230,
  author = {Rina Azuma and Yukihide Kohira and Tomomi Matsui and Atsushi Takahashi and Chikaaki Kodama},
  title = {Process variation-aware mask optimization with iterative improvement by subgradient method and boundary flipping},
  booktitle = {Proc. SPIE 11328, Design-Process-Technology Co-optimization for Manufacturability XIV, 113280O},
  year = 2020,
}