@inproceedings{CTT100881483,
  author = {Masato Sone and Hitomi Watanabe and Kyotaro Nitta and Hideaki Nakajima and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Tso-Fu Mark Chang},
  title = {A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer},
  booktitle = {},
  year = 2022,
}