@article{CTT100918360, author = {An Li and Takuya Hoshii and Kazuo Tsutsui and Hitoshi Wakabayashi and Kuniyuki Kakushima}, title = {Improved electrical characteristics of 4H-SiC (0001) MOS devices with atomic layer deposited SiO2 gate dielectric with H2O plasma}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @article{CTT100918374, author = {Gen Nakada and Yoshiharu Kihara and Akira Yasui and Kuniyuki KAKUSHIMA and Hiroshi Nohira}, title = {Estimation of the band alignment of metal/AlScN interfaces by hard X-ray photoelectron spectroscopy}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @article{CTT100918393, author = {Tomoya Tsutsumi and Kazuki Goshima and Yoshiharu Kirihara and Tatsuki Okazaki and Akira Yasui and Mitani Yuichiro and Kuniyuki KAKUSHIMA and Hiroshi Nohira}, title = {Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES}, journal = {}, year = 2024, } @article{CTT100918404, author = {Yukimura Tokita and Takuya Hoshii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA}, title = {Identification of compressive strain in thin ferroelectric Al1–xScxN films by Raman spectroscopy}, journal = {Japanese Journal of Applied Physics}, year = 2024, }