@article{CTT100911315, author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani}, title = {Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma}, journal = {Sensors and Materials}, year = 2024, } @inproceedings{CTT100911048, author = {佐藤美那 and 遠西美重 and 松谷晃宏}, title = {イオンビーム照射によりアモルファス化したSi表面のXRR測定}, booktitle = {}, year = 2024, } @inproceedings{CTT100908143, author = {Kazuki Shishikura and Hiroyuki Nabae and Akihiro Matsutani and Mina Sato and Koichi Suzumori}, title = {Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering}, booktitle = {Proceedings of the 2024 IEEE/SICE International Symposium on System Integration}, year = 2024, }