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Title
金属イリジウム及び／又はイリジウム酸化物薄膜の製造方法 
Author
HIROSHI FUNAKUBO.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学, 東ソー株式会社.  
Filing Date
2008/03/26
Application Number
特願2008-079643
Unexamined Application Date
2009/10/15
Publication Number
特開2009-235439

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