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Patent Information


Title
炭化ケイ素半導体装置及びその製造方法 
Author
Yuichiro Matsushita.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2019/07/30
Application Number
特願2019-140141
Unexamined Application Date
2021/02/18
Publication Number
特開2021-022706

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