Author,Title,Kind,Status,ApplicantName,ApplicationDate,ApplicationNumber,PublicationDate,PublicationNumber,RegistrationDate,RegistrationNumber "EIKI HOTTA,MASATO WATANABE,AKITOSHI OKINO,KAZUHIKO HORIOKA","極紫外光発生装置","Patent","Published","国立大学法人東京工業大学","2004/08/10","特願2004-233957","2006/02/23","特開2006-054270",,