発明者,発明の名称,種別,状態,出願人,出願日,出願番号,公開日,公開番号,登録日,登録番号 "鈴村暁男,池庄司敏孝,井本明子,香取真奈,坂本 将紘,崎道 哲","成膜処理方法および薄膜付物品の製造方法","特許","登録","国立大学法人東京工業大学, 株式会社デンソー","2012/11/29","特願2012-261394","2014/06/09","特開2014-105377","特許第5987657号","2016/08/19" "鈴村暁男,下嶽 光一,池庄司敏孝,山崎 敬久","マイクロメカニカル接合方法","特許","公開","国立大学法人東京工業大学","2009/10/29","特願2009-249169","2011/05/12","特開2011-096508",, "鈴村暁男,池庄司敏孝,野田 卓哉,山?敬久","マイクロメカニカル接合方法","特許","公開","国立大学法人東京工業大学","2007/05/08","特願2007-123463","2008/11/20","特開2008-282573",,