Author,Title,Kind,Status,ApplicantName,ApplicationDate,ApplicationNumber,PublicationDate,PublicationNumber,RegistrationDate,RegistrationNumber "Kuniyuki KAKUSHIMA,Takamasa Kawanago,Shu Munekiyo,Lei Yiming","半導体装置及びその製造方法","Patent","Registered","国立大学法人東京工業大学, 三菱電機株式会社","2014/08/28","特願2014-173714","2016/04/07","特開2016-048758","特許第6270667号","2018/01/12"