発明者,発明の名称,種別,状態,出願人,出願日,出願番号,公開日,公開番号,登録日,登録番号 "高橋邦夫,藤間 貞行 ","測定装置、測定方法、および測定プログラム","特許","公開","国立大学法人東京工業大学, 株式会社レスカ","2022/01/05","特願2022-000602","2023/07/18","特開2023-100140",, "齋藤滋規,河野健人,田尻陽亮,高橋邦夫,Radon DHELIKA","双極型静電チャックモジュールおよびその製造方法","特許","登録","国立大学法人東京工業大学","2017/02/28","特願2018-503354","2018/12/27","再表2017/150574","特許第6846821号","2021/03/04" "齋藤滋規,高橋邦夫,尾畑賢一","液体パターン形成方法及び形成装置","特許","公開","国立大学法人東京工業大学","2005/04/27","特願2005-129893","2006/11/09","特開2006-310470",,