Room-temperature direct bonding for integrated optical devices | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Room-temperature direct bonding for integrated optical devices

Author

Japanese:	武井, 阿部, 水本.
English:	R.Takei, K.Abe, Tetsuya MIZUMOTO.

Language

English

Journal/Book name

Japanese:
English:	2007 IEEE LEOS Annual Meeting Technical Digest

Volume, Number, Page

pp. TuD4

Published date

Oct. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Florida

DOI

https://doi.org/10.1109/LEOS.2007.4382337

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