Development of a high precision stage for vacuum environment using parallel mechanism with double ball joints

Publication Information

Title

Japanese:
English:	Development of a high precision stage for vacuum environment using parallel mechanism with double ball joints

Author

Japanese:	好田祥基, 一柳健, 武田行生, 廣瀬和也.
English:	Yoshiki YOSHIDA, Ken ICHIRYU, Yukio TAKEDA, Kazuya HIROSE.

Language

English

Journal/Book name

Japanese:
English:	Proc. the First IFToMM Asian Conference on Mechanism and Machine Science

Volume, Number, Page

Published date

Oct. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The First IFToMM Asian Conference on Mechanism and Machine Science

Conference site

Japanese:
English:	Taipei, Taiwan