Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint

Publication Information

Title

Japanese:
English:	Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint

Author

Japanese:	大西有希, 高木秀樹, Y.Hirai, M, Takahashi, R.Maeda, T.Tanabe, Y.Iriye.
English:	Y.Onishi, 高木秀樹, Y.Hirai, M, Takahashi, R.Maeda, T.Tanabe, Y.Iriye.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	20th International Microprocesses and Nanotechnology Conference (MNC)

Conference site

Japanese:
English: