CaF<sub>2</sub>/Si(111)上CoSi<sub>2</sub>薄膜の抵抗率測定

Publication Information

Title

Japanese:	CaF₂/Si(111)上CoSi₂薄膜の抵抗率測定
English:	Resistivity measurement of CoSi₂ epitaxial thin films on CaF₂/Si(111)

Author

Japanese:	渡辺正裕, 村竹茂樹, 藤本寛正, 坂森重則, 浅田雅洋, 荒井滋久.
English:	M. Watanabe, S. Muratake, H. Fujimoto, S. Sakamori, M. Asada, S. Arai.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

29p-ZF-3 1 244

Published date

Mar. 29, 1991

Publisher

Japanese:
English:

Conference name

Japanese:	第38回応用物理学会関係連合講演会
English:	Nat. Conv. Rec. of The Japan Soc. of Appl. Phys.

Conference site

Japanese:	神奈川県
English:	Kanagawa