Deposition of DLC films on inner face of metal tubes by nanopulse plasma CVD

Publication Information

Title

Japanese:
English:	Deposition of DLC films on inner face of metal tubes by nanopulse plasma CVD

Author

Japanese:	髙村瞭太, 井上雅貴, 赤坂大樹, 大竹尚登.
English:	Ryota Takamura, Masaki Inoue, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	ISPlasma2015/IC-PLANT2015

Volume, Number, Page

CD-ROM D3-O-10

Published date

2015

Publisher

Japanese:
English:	ISPlasma2015/IC-PLANT2015

Conference name

Japanese:
English:	ISPlasma2015/IC-PLANT2015

Conference site

Japanese:
English:	Nagoya