Large Scale Deposition of DLC Films at Sub-atmospheric Pressure

Publication Information

Title

Japanese:
English:	Large Scale Deposition of DLC Films at Sub-atmospheric Pressure

Author

Japanese:	舩橋輝, 髙村瞭太, Ikuo Azuma, Eiji Sasamoto, 稗田純子, 赤坂大樹, 大竹尚登.
English:	Akira Funahashi, Ryota Takamura, Ikuo Azuma, Eiji Sasamoto, Junko Hieda, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 17, 2015

Publisher

Japanese:
English:	Japanese Society of Tribologists

Conference name

Japanese:
English:	International Tribology Conference, Tokyo 2015

Conference site

Japanese:
English:	Tokyo