SiC-TiC Composite Thin Films Grown by Radiofrequency Magnetron Sputtering

Publication Information

Title

Japanese:
English:	SiC-TiC Composite Thin Films Grown by Radiofrequency Magnetron Sputtering

Author

Japanese:	樋渡智咲, 塩田忠, 篠崎和夫, 生駒俊之.
English:	Hiwatari Chisaki, Shiota Tadashi, Shinozaki Kazuo, Ikoma Toshiyuki.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conferencee on Materials and Systems for Sustainability 2017

Conference site

Japanese:
English:	Nagoya