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Title
Japanese:薄膜トランスバース型μTEGモジュールの最適構造における層間絶縁材料の影響”，第80回応用物理学会秋季学術講演会 
English: 
Author
Japanese: 遠藤弘之, 熊谷颯人, 塩津勇作, 菅原聡.  
English: Hiroyuki Endou, Hayato Kumagai, Yusaku Shiotsu, SATOSHI SUGAHARA.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 18, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第80回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese: 
English: 

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