Robust ferroelectricity in thick HfO2-based film

Publication Information

Title

Japanese:
English:	Robust ferroelectricity in thick HfO2-based film

Author

Japanese:	清水荘雄, 三村和仙, 舟窪浩.
English:	Takao Shimizu, Takanori Mimura, Hiroshi funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 9, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	STAC-11 (The 11th International Conference on the Science and Technology for Advanced Ceramics)

Conference site

Japanese:
English:	Tsukuba