Home >

news Help

Publication Information


Title
Japanese:表面クリーニング用大気圧アルゴンプラズマジェットの発光分光計測による電子温度・電子密度診断 
English:Electron temperature and density diagnostics of the atmospheric pressure argon plasma jet for surface cleaning based on optical emission spectroscopic measurement 
Author
Japanese: 山下 雄也, 秋葉 拓也, 岩永 敏秀, 山岡 英彦, 伊達 修一, 赤塚 洋.  
English: Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Hidehiko Yamaoka, Shuichi Date, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第68回応用物理学会春季学術講演会 講演予稿集 
English:The Extended Abstract of the 68th JSAP Spring Meeting 2021 
Volume, Number, Page     No. 8.1    p. 07-043
Published date Feb. 26, 2021 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese:2021年第68回応用物理学会春季学術講演会 
English:The 68th JSAP Spring Meeting 2021 
Conference site
Japanese: 
English: 
Official URL https://confit.atlas.jp/guide/event/jsap2021s/subject/18p-Z17-1/tables?cryptoId=
 
Abstract Electron temperature and density of the atmospheric pressure argon plasma jet for surface cleaning of wafers were diagnosed based on optical emission spectroscopic measurement. The diagnose was based on fitting with the excitation-level number density distribution of the theoretical value based on the collisional-radiative model and the experimental value based on the optical emission lines which upper levels are 4p’[3/2]1, 4p’[1/2]1, 4p[1/2]0, and 4p’[1/2]0 . The electron temperature and density were decreased in the downstream of discharge tube.

©2007 Tokyo Institute of Technology All rights reserved.