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Title
Japanese:Y2O3-HfO2強誘電体薄膜を搭載したMEMSユニモルフカンチレバーの作製と特性評価 
English: 
Author
Japanese: 海老原凌, 吉田慎哉, 志村礼司郎, 舟窪浩, 田中秀治.  
English: 海老原凌, 吉田慎哉, Reijiro Shimura, HIROSHI FUNAKUBO, Shuji Tanaka.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 16, 2021 
Publisher
Japanese: 
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Conference name
Japanese:第68回応用物理学会春季学術講演会 
English: 
Conference site
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