Thermal resistance reduction of membrane FP laser bonded by a-Si nano-film assisted surface activated bonding

Publication Information

Title

Japanese:
English:	Thermal resistance reduction of membrane FP laser bonded by a-Si nano-film assisted surface activated bonding

Author

Japanese:	FangWeicheng, 高橋直樹, 大磯義孝, 雨宮智宏, 西山伸彦.
English:	Weicheng Fang, Naoki Takahashi, Yoshitaka Ohiso, Tomohiro Amemiya, Nobuhiko Nishiya.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 10, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 82nd JSAP Autumn Meeting 2021

Conference site

Japanese:
English: