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Title
Japanese:Ar・N2混合大気圧非平衡プラズマにおける発光分光法による電子温度・電子密度の計測 
English:Measurement of Electron Temperature and Electron Density by Emission Spectroscopy in Ar&N2 Mixed Atmospheric Pressure Non-Equilibrium Plasma 
Author
Japanese: 石塚 良, 根津 篤, 赤塚 洋.  
English: Ryo Ishizuka, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第82回応用物理学会秋季学術講演会 講演予稿集 
English:ExtendednAbstracts of the 82nd JSAP Autumn Meeting 2021 
Volume, Number, Page         07-003
Published date Aug. 26, 2021 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese:第82回応用物理学会秋季学術講演会 
English:The 82nd JSAP Autumn Meeting 2021 
Conference site
Japanese: 
English: 
Official URL https://confit.atlas.jp/guide/event/jsap2021a/subject/10a-S301-3/tables
 
Abstract While atmospheric pressure non-equilibrium plasma is currently expected to have a wide range of applications, there are few reports on the measurement of "electron temperature" and "electron density", which are indispensable for the simulation and control of radical density. In particular, with an eye on industrial applications, measurement of plasma mixed with reactive gas is desired. Therefore, in this study, we try to measure the electron temperature and electron density of Ar / N2 mixed atmospheric pressure non-equilibrium plasma by optical emission spectroscopy.

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