異種材料集積光回路に向けた大気圧プラズマによる半導体親水化の検討

Publication Information

Title

Japanese:	異種材料集積光回路に向けた大気圧プラズマによる半導体親水化の検討
English:	Investigation of Semiconductor Hydrophilicity by Atomosphere Pressure Plasma toward Heterogeneous Material-integrated Photonic Circuits

Author

Japanese:	日原弘喜, MOATAZ Shaher Anis Mahmoud Eissa, 山口圭太, 小野寺広夢, 大磯義孝, 雨宮智宏, 沖野晃俊, 西山伸彦.
English:	Koki Hihara, Moataz Eissa, Keita Yamaguchi, Hiromu Onodera, Yoshitaka Ohiso, Tomohiro Amemiya, AKITOSHI OKINO, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	2022年第83回応用物理学会秋季学術講演会
English:	The 83rd JSAP Autumn Meeting 2022

Conference site

Japanese:	仙台
English: