裏面露光によるサブミクロン直径のSU-8円柱構造の作製と蛍光観察

Publication Information

Title

Japanese:	裏面露光によるサブミクロン直径のSU-8円柱構造の作製と蛍光観察
English:	Microfabrication and fluorescence imaging of sub-micron diameter SU-8 pillar using back-side exposure

Author

Japanese:	藤本美穂, 松谷晃宏.
English:	Miho Fujimoto, Akihiro Matsutani.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第71回応用物理学会春季学術講演会
English:	The 71th JSAP Spring Meeting 2024

Conference site

Japanese:	東京都世田谷区
English:	Setagaya, Tokyo Metropolitan area