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Title
Japanese:トモグラフィー発光分光法による減圧酸素ICPの空間分解計測 
English:Spatially resolved measurements of reduced-pressure oxygen ICP by tomographic emission spectroscopy 
Author
Japanese: 何 文涛, 清田 哲司, 土居 謙太, 中尾 裕利, 小関 智光, 内記 一宏, Li Kangbai, 大見 俊一郎, 赤塚 洋.  
English: Wentao He, Tetsuji Kiyota, Kenta Doi, Hirotoshi Nakao, Tomomitsu Ozeki, Kazuhiro Naiki, Kangbai Li, Shun-ichiro Ohmi, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第86回応用物理学会秋季学術講演会 講演予稿集 
English:Extended Abstracts of the 86th JSAP Autumn Meeting 2025 
Volume, Number, Page         08-111
Published date Aug. 26, 2025 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Applied Physics 
Conference name
Japanese:第86回応用物理学会秋季学術講演会 
English:The 86th JSAP Autumn Meeting 2025 
Conference site
Japanese:名古屋 
English:Nagoya 
Official URL https://pub.confit.atlas.jp/ja/event/jsap2025a/presentation/10a-N323-4
 
Abstract Using both tomography emission spectroscopy and actinometry measurements on reduced-pressure oxygen ICP, the ground and excited-state densities of oxygen atoms were observed with spatially resolved profile, and the electron temperature, density, and dissociation degree of oxygen molecule were measured in a spatially resolved manner by applying a self-consistent oxygen atom collisional radiative (CR) model solution. The electron temperature and degree of dissociation were high in the center, while the electron density was low in the center. This finding can be attributed to the presence of O- ions as negative charges in the central region of the plasma chamber.

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